Screen-Printed Ceramic Based MEMS Piezoelectric Cantilever for Harvesting Energy

2014 ◽  
Vol 90 ◽  
pp. 84-92 ◽  
Author(s):  
Swee Leong Kok ◽  
Abdul Rani Othman ◽  
Azizah Shaaban
Keyword(s):  
Thick Film ◽  
Ambient Vibration ◽  
Free Standing ◽  
Charge Generation ◽  
Lower Electrode ◽  
Electrode Layer ◽  
Additional Layer ◽  
Piezoelectric Cantilever ◽  
Screen Printing Technology ◽  
Resultant Stress

Screen-printing technology provides a convenient method in fabricating thick-film conductive circuits and devices in the past few decades. Conventionally, piezoelectric thick-film is printed on alumina substrate with high mechanical Q-factor and resonates at higher frequency outside the range of ambient vibration. As the piezoelectric charge generation is proportional to the mechanical stress on the material, therefore the substrate can be removed in order to lower the natural frequency of the structure. In this paper, a series of piezoelectric ceramic cantilevers were fabricated in the form of free-standing cantilever. An additional layer of ceramic was also introduced to the upper and lower electrode to prevent delamination. The issue of zero resultant stress for the sandwiched piezoelectric cantilever was solved by repeating the electrode-PZT-electrode layer to form a multilayer structure. It was found from the experiment that an electrical output power of 32 μW was generated when it operates at its resonant frequency at 403 Hz.

Nano-Sized Semiconducting Oxide Powders for Thick Film Gas Sensors: From Powder Processing to Environmental Monitoring Devices

1999 ◽  
Vol 581 ◽  
Author(s):  
Enrico Traversa ◽  
Maria Cristina Carotta ◽  
Giuliano Martinelli
Keyword(s):  
Thick Film ◽  
Gas Sensors ◽  
Screen Printing ◽  
Powder Processing ◽  
International Standards ◽  
Electrical Measurements ◽  
Printing Technology ◽  
Semiconducting Oxides ◽  
Screen Printing Technology ◽  
Monitoring Devices

ABSTRACTThis paper reports the study of semiconducting oxides to develop gas sensors in thick-film form for use in atmospheric pollutant monitoring devices. The investigation was achieved with the following steps: selection of the suitable oxides and of their most appropriate processing method to obtain nano-sized powders, fabrication using screen-printing technology of thick-film sensors from these powders, and electrical measurements in laboratory and in the field. Chemical routes such as sol-gel techniques and thermal decomposition of heteronuclear complexes have been used to prepare nano-sized powders of n-type (TiO2) and p-type (LaFeO3 and SmFeO3) semiconducting oxides. Thick-film gas sensors have been produced by screen-printing technology. Pastes have been prepared and printed on laser precut 96% alumina substrates, each 2×2 mm element being provided with a heater, comb-type Au contacts and a Pt-100 resistor for controlling the operating temperature. The firing of the films has been performed in conditions able to keep grain size at nanometer level. Electrical responses to some major polluting gases (CO, NO, NO2 and O3) have been tested in laboratory and in the field, and compared with results of the analytical techniques approved by the international standards.

scholarly journals Free-standing thick-film piezoelectric device

2008 ◽  
Vol 44 (4) ◽  
pp. 280 ◽  
Author(s):  
S.L. Kok ◽  
N.M. White ◽  
N.R. Harris
Keyword(s):  
Thick Film ◽  
Free Standing ◽  
Piezoelectric Device

A Wideband Electromagnetic Energy Harvester for Random Vibration Sources

2009 ◽  
Vol 74 ◽  
pp. 165-168 ◽  
Author(s):  
Bin Yang ◽  
Cheng Kuo Lee
Keyword(s):  
Printed Circuit Board ◽  
Energy Harvester ◽  
Wide Band ◽  
Longitudinal Direction ◽  
Circuit Board ◽  
Ambient Vibration ◽  
Flat Band ◽  
Free Standing ◽  
Band Frequency ◽  
Acrylic Plate

A novel non-resonant energy harveser with wide band frequency is proposed for collecting energy from ambient vibration at low frequency. A free-standing magnet is packaged inside a sealed hole which is created by stacking 5 pieces of printed circuit board (PCB) substrates with multi-layer copper coils made on double-sides. When the energy harvester is shook from 10 to 300 Hz at 1.9g acceleration along longitudinal direction of hole, a 65 Hz flat-band-like output voltage of 4.5 mV at the case of only one side with drilled air holes on acrylic plate is generated within 35 to 100 Hz. The output power from the coils is measured as 0.1µW under matched loading resistance of 50 Ω within this flat band range under 1.9 g ambient vibration.

Single-domain Yba2Cu3Oy thick films and fabrics prepared by an infiltration and growth process

2001 ◽  
Vol 16 (4) ◽  
pp. 955-966 ◽  
Author(s):  
E. Sudhakar Reddy ◽  
J. G. Noudem ◽  
M. Tarka ◽  
G. J. Schmitz
Keyword(s):  
Liquid Phase ◽  
Thick Film ◽  
Growth Process ◽  
Thick Films ◽  
Solidification Process ◽  
Film Coating ◽  
Single Domain ◽  
Free Standing ◽  
Liquid Phases ◽  
Woven Structure

An infiltration and growth process has been developed to produce single-domain Yba2Cu3Oy(123) as thick films on various substrates or as self-supporting fabrics. Commercially available Y2O3 cloths of square woven or satin woven structure were infiltrated with liquid phases from a suitable source containing barium cuprates and copper oxides and subsequently converted into Y2BaCuO5(211) and −123 phases by a series of distinct peritectic reactions. Depending on the final form of 123, the Y2O3 cloth was either clamped firmly at corners to produce a self-supporting 123 fabric or placed on a suitable substrate to result in a thick film coating of 123. The source material for the liquid phase being in the form of solid blocks was placed at corners of the cloth in the case of free-standing 123 fabrics. In case of the thick film configuration the liquid phase powder was spread on the surface of the Y2O3 cloth. A small c-axis-oriented MgO or Nd(123) seed was used to generate an oriented 123 domain in the infiltrated fabric. The solidification process was optimized to transform the entire Y2O3 fabric into a single-domain 123. The microstructure of the single domain was optimized in terms of 211 size and content for high Jc. A detailed description of the process, the growth mechanism, the resulting microstructures was given, and basic superconducting properties of the new form of 123 are briefly discussed.

STRUCTURE SIZE'S EFFECT ON THE PERFORMANCE OF THE SPM PIEZOELECTRIC MICROCANTILEVER

2013 ◽  
Vol 27 (22) ◽  
pp. 1350164 ◽  
Author(s):  
XIAO-NAN SUN ◽  
AN-PING LIU ◽  
XIAO-SONG SUN
Keyword(s):  
Output Voltage ◽  
Nanometer Scale ◽  
Voltage Sensitivity ◽  
Device Structure ◽  
Work Requirements ◽  
Electrode Layer ◽  
Piezoelectric Cantilever ◽  
Displacement Sensitivity ◽  
Probe Microscope ◽  
Piezoelectric Microcantilever

For the piezoelectric microcantilever, a device is designed for the IPC-208B type scanning probe microscope. We analyzed the structure size's effect on the piezoelectric cantilever device, and find that the deformation displacement of the cantilever tip depends mainly on the length, while the output voltage of piezoelectric layer depends on the aspect ratio of cantilever itself. We choose the device structure as the length and width dimensions of 200 μm × 40 μm, piezoelectric thickness of 2.0 μm, and electrode layer of 0.2 μm for the experimental analysis. We conclude that the device voltage sensitivity is 0.43 mV/nN, and tip displacement sensitivity up to 4.6 nm/nN, which shows that the output voltage is in the mV-level, is easy to meet the input requirements of testing circuit. The differentiable range can be in nanometer scale, which meets the SPM work requirements, and the device performance is considerable.

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