STRUCTURE SIZE'S EFFECT ON THE PERFORMANCE OF THE SPM PIEZOELECTRIC MICROCANTILEVER

2013 ◽  
Vol 27 (22) ◽  
pp. 1350164 ◽  
Author(s):  
XIAO-NAN SUN ◽  
AN-PING LIU ◽  
XIAO-SONG SUN
Keyword(s):  
Output Voltage ◽  
Nanometer Scale ◽  
Voltage Sensitivity ◽  
Device Structure ◽  
Work Requirements ◽  
Electrode Layer ◽  
Piezoelectric Cantilever ◽  
Displacement Sensitivity ◽  
Probe Microscope ◽  
Piezoelectric Microcantilever

For the piezoelectric microcantilever, a device is designed for the IPC-208B type scanning probe microscope. We analyzed the structure size's effect on the piezoelectric cantilever device, and find that the deformation displacement of the cantilever tip depends mainly on the length, while the output voltage of piezoelectric layer depends on the aspect ratio of cantilever itself. We choose the device structure as the length and width dimensions of 200 μm × 40 μm, piezoelectric thickness of 2.0 μm, and electrode layer of 0.2 μm for the experimental analysis. We conclude that the device voltage sensitivity is 0.43 mV/nN, and tip displacement sensitivity up to 4.6 nm/nN, which shows that the output voltage is in the mV-level, is easy to meet the input requirements of testing circuit. The differentiable range can be in nanometer scale, which meets the SPM work requirements, and the device performance is considerable.

A Study of the Photoelectric Effect Caused by a Laser Beam Used in a Beam Bounce Technique in a C-AFM System

2008 ◽  
Author(s):  
Hung-Sung Lin ◽  
Mong-Sheng Wu
Keyword(s):  
Laser Beam ◽  
Failure Analysis ◽  
Atomic Force Microscope ◽  
Photoelectric Effect ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Electrical Characteristics ◽  
Atomic Force ◽  
Probe Microscope ◽  
Probe Head

Abstract The use of a scanning probe microscope (SPM), such as a conductive atomic force microscope (C-AFM) has been widely reported as a method of failure analysis in nanometer scale science and technology [1-6]. A beam bounce technique is usually used to enable the probe head to measure extremely small movements of the cantilever as it is moved across the surface of the sample. However, the laser beam used for a beam bounce also gives rise to the photoelectric effect while we are measuring the electrical characteristics of a device, such as a pn junction. In this paper, the photocurrent for a device caused by photon illumination was quantitatively evaluated. In addition, this paper also presents an example of an application of the C-AFM as a tool for the failure analysis of trap defects by taking advantage of the photoelectric effect.

Enhanced output of ZnO nanosheet-based piezoelectric nanogenerator with a novel device structure

2021 ◽  
Author(s):  
Siju Mishra ◽  
P. Supraja ◽  
Vishnu V. Jaiswal ◽  
P. Ravi Sankar ◽  
R. Rakesh Kumar ◽  
...  
Keyword(s):  
Output Voltage ◽  
Photoluminescence Property ◽  
Cost Effective ◽  
Design Strategy ◽  
Aluminum Substrate ◽  
Device Structure ◽  
Novel Device ◽  
Voltage Output ◽  
Zno Nanosheets ◽  
Side Coating

Abstract We report the double-fold enhancement of piezoelectric nanogenerator output voltage with a simple design strategy. The piezoelectric nanogenerator is fabricated with ZnO nanosheets coated on both sides of the aluminum substrate in this new design strategy with necessary electrodes. The cost-effective hydrothermal method is employed to synthesize two-dimensional (2D) ZnO nanosheets on both sides of the aluminum substrate at a low growth temperature of 80˚C for 4 hours. The ZnO nanosheets were characterized for their morphology, crystallinity, and photoluminescence property. The nanogenerator is fabricated with a double-side coated aluminum substrate and compared its performance with a single-side coated aluminum substrate. The nanogenerators fabricated only with one side coating produced an output voltage of ~ 170 mV. In contrast, the nanogenerators fabricated with a double side coating produced an output voltage of ~ 285 mV. The nanogenerator with double-side coating produced ~1.7 times larger voltage output compared to the voltage output from one side coated nanogenerators fabricated with each side of the substrate. The enhancement in the output

Optimizing Energy Output of Piezoelectric Microcantilevers

2011 ◽  
Author(s):  
Mehdi Rezaeisaray ◽  
Don Raboud ◽  
Walied Moussa
Keyword(s):  
Output Voltage ◽  
Proof Mass ◽  
Geometry Optimization ◽  
Electrical Energy ◽  
Electrical Circuit ◽  
Energy Output ◽  
Test Cases ◽  
New Methods ◽  
Piezoelectric Cantilever ◽  
Piezoelectric Cantilevers

This work presents some new methods in optimizing electrical energy, harvested using a micro piezoelectric cantilever. Both mechanical and electrical aspects have been considered. Mechanically, two items have been considered to maximize the generated voltage: geometry of the cantilever and placement of the electrodes. It has been shown that for given sizes of length and width of the harvester and for a given natural frequency, the output voltage can be increased by adjusting the thickness of the beam and the proof mass and consequently increasing the amplitude of vibration. As well, the placement of the electrodes plays a very important role in optimizing output voltage. It has also been shown that piezoelectric cantilevers with shorter top electrodes induce higher voltage than cantilevers with longer top electrodes. Overall results agree with the analytical equations reported in literature so far. Moreover, distribution of top electrodes along the width of the cantilever has been taken into consideration. It has been shown how output voltage can be approximately doubled by using two narrower top electrodes along the width of the cantilever. All analysis in this work was carried out in ANSYS. In this research, to improve the electrical efficiency, diodes have been considered in the circuit to reduce electrical losses in comparison to rectifiers which have been used in conventional harvesters. Applying these methods to particular test cases, a 71% increase in output voltage was observed for the case of geometry optimization, a 116% increase was observed for the case of shortening the top electrode and losses in the electrical circuit were reduced by approximately 50% by using diodes comparing to using rectifiers. While these results focused on cantilever based harvesters, the ideas contained are equally applicable to other structures.

The Study on the Analytic Model and Design Software for IP of Piezoresistive Cantilever Beams

2013 ◽  
Vol 562-565 ◽  
pp. 482-485
Author(s):  
Jian Long Zhu ◽  
Wei Hua Li ◽  
Zai Fa Zhou ◽  
Qin Gan Huang
Keyword(s):  
Output Voltage ◽  
Voltage Sensitivity ◽  
Analytic Model ◽  
Cantilever Beams ◽  
Mems Devices ◽  
New Model ◽  
Mems Sensor ◽  
Piezoresistive Sensor ◽  
Design Software

Piezoresistive sensor was one of the earliest silicon MEMS devices, which based on the theory of piezoresistive. In order to build the piezoresistive IP library for the MEMS foundry, we improved the structures of the piezoresistive based on the achievement of Liwei Lin1, and new analytic model and design software for square shape membrance has been developed. The ability to calculate sensitivity and linearity of MEMS piezoresistive sensor using the new model have been demonstrated. As results, output voltage, sensitivity and linearity characteristics of MEMS sensor are presented in this paper.

Structural Design and Testing of a Butterfly Piezoelectric Generator with Multilayer Cantilever Beams

2013 ◽  
Vol 655-657 ◽  
pp. 823-829 ◽  
Author(s):  
Zhi Lin Ruan ◽  
Jun Jie Gong ◽  
Meng Chang Cai ◽  
Bing Huang
Keyword(s):  
Resonant Frequency ◽  
Cantilever Beam ◽  
Structural Design ◽  
Output Voltage ◽  
Experimental Setup ◽  
Cantilever Beams ◽  
Material Parameters ◽  
Piezoelectric Cantilever ◽  
Piezoelectric Generator ◽  
Design And Testing

In order to solve the inconsistent problem of multi-layer connection and vibration in each layer, a butterfly piezoelectric generator with multilayer cantilever beams is designed. The generator is mainly constituted by butterfly multilayer cantilever beams and mass subassembly two parts. Physical devices of butterfly generator and typical piezoelectric cantilever are fabricated respectively. The experimental setup is also put up for the testing of resonant frequency and output voltage. It can be found that each layer of multilayer generator has a similar output voltage and resonant frequency to the typical one with same geometric and material parameters. So each layer in butterfly piezoelectric generator can be simplified as a typical cantilever beam for researching and analyzing.

Performance Analysis of Varied Dimensions Piezoelectric Energy Harvester

2015 ◽  
Vol 754-755 ◽  
pp. 481-488
Author(s):  
Bibi Nadia Taib ◽  
Norhayati Sabani ◽  
Chan Buan Fei ◽  
Mazlee Mazalan ◽  
Mohd Azarulsani Md Azidin
Keyword(s):  
Thin Film ◽  
Low Power ◽  
Piezoelectric Material ◽  
Cantilever Beam ◽  
Physical Vapor Deposition ◽  
Output Voltage ◽  
High Energy ◽  
Experimental Result ◽  
Piezoelectric Energy ◽  
Piezoelectric Cantilever

Thin film piezoelectric material plays a vital role in micro-electromechanical systems (MEMS), due to its low power requirements and the availability of high energy harvesting. Zinc oxide is selected for piezoelectric material because of its high piezoelectric coupling coefficient, easy to deposit on silicon substrate and excellent adhesion. Deposited ZnO and Al improve the electrical properties, electrical conductivity and thermal stability. The design, fabrication and experimental test of fabricated MEMS piezoelectric cantilever beams operating in d33 mode were presented in this paper. PVD (Physical Vapor Deposition) was selected as the deposition method for aluminium while spincoating was chosen to deposit ZnO thin film. The piezoelectric cantilever beam is arranged with self-developed experimental setup consisting of DC motor and oscilloscope. Based on experimental result, the longer length of piezoelectric cantilever beam produce higher output voltage at oscilloscope. The piezoelectric cantilevers generated output voltages which were from 2.2 mV to 8.8 mV at 50 Hz operation frequency. One of four samples achieved in range of desired output voltage, 1-3 mV and the rest samples produced a higher output voltage. The output voltage is adequate for a very low power wireless sensing nodes as a substitute energy source to classic batteries.

scholarly journals Design and analysis of energy harvester using MEMS based Cantilever with variable perforations

2017 ◽  
Vol 7 (1.5) ◽  
pp. 141
Author(s):  
G.R.K Prasad ◽  
N. Siddaiah ◽  
P. Sanjeev ◽  
A. Raviteja ◽  
P. Karunya ◽  
...  
Keyword(s):  
Coupling Coefficient ◽  
Output Voltage ◽  
Energy Harvester ◽  
Piezoelectric Properties ◽  
Piezoelectric Materials ◽  
Crystal Properties ◽  
Displacement Sensitivity ◽  
Eigen Frequencies ◽  
Output Capacitance ◽  
Pzt Thick Film

This paper represents the design and analysis of energy harvester using MEMS based cantilever with PMN-PT single crystal properties which has excellent piezoelectric properties while compared to other piezoelectric materials like PZT thick film. The design is analysed using COMSOL multi physics which is used for many MEMS operations and also problems related to physics with many mathematical calculations with better efficiency and ease to design. We designed a cantilever with PMN-PT properties which has good coupling coefficient and increased perforations in number in form of square and circular. We tested the displacement sensitivity i.e., the variation of displacement at different eigen frequencies with increase in number of perforations. We observe output voltage by designing electromechanical analysis and variation in output capacitance of  2 .41 x 10-22 Farads is observed.

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