Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization

2008 ◽  
Vol 389-390 ◽  
pp. 498-503
Author(s):  
N. Qin ◽  
Dong Ming Guo ◽  
Ren Ke Kang ◽  
Feng Wei Huo

The calculating model of surface non-uniformity of polishing pad and the kinematical model between polishing pad and conditioner are initially established. Then the effects of several conditioning parameters were investigated by using the two models. The results of simulation and calculation show that the width ratio of diamond band of conditoner and the rotation speed at the same speed ratio between pad and conditioner have little effect on the surface non-uniformity of polishing pad, while at high non-integer rotation speed ratio, the surface non-uniformity of polishing pad is better than that at low integer speed ratio. The research results are available to select appropriate conditioning parameters especially for the stringent requirement of within-wafer non-uniformity in next generation IC.

1981 ◽  
Vol 24 (4) ◽  
pp. 520-525 ◽  
Author(s):  
Bruce L. Plakke ◽  
Daniel J. Orchik ◽  
Daniel S. Beasley

Binaural auditory fusion of 108 children (4, 6, and 8 years old) was studied using three lists of monosyllabic words (WIPI) presented at two sensation levels (30 and 40 dB). The words were processed to produce three bandwidth conditions (100, 300, 600 Hz) and were administered via three presentation modes (binaural fusion 1, diotic, binaural fusion 2). Results showed improved discrimination scores with increasing age, sensation level, and filter bandwidth. Diotic scores were better than binaural fusion scores for the narrower bandwidth conditions, but the diotic enhancement effect was seriously compromised in the widest bandwidth (600 Hz) condition. The results confirmed the contention that prior research results were equivocal due, in large measure, to procedural variability. Methods for reducing such variability and enhancing the clinical viability of binaural fusion tasks are suggested.


Materials ◽  
2021 ◽  
Vol 14 (7) ◽  
pp. 1691 ◽  
Author(s):  
Zhenzhen Chen ◽  
Donghui Wen ◽  
Jianfei Lu ◽  
Jie Yang ◽  
Huan Qi

For the traditional single-side planetary abrasive lapping process particle trajectories passing over the target surface are found to be periodically superposed due to the rational rotation speed ratio of the lapping plate to workpiece that could affect the material removal uniformity and hence its surface quality. This paper reports on a novel driving system design with combination of the tapered roller and contact roller to realize the irrational rotation speed ratio of the lapping plate to workpiece in the single-side planetary abrasive lapping process for the improvement of surface quality. Both of the numerical and experimental investigations have been conducted to evaluate the abrasive lapping performance of the novel driving system. It has been found from the numerical simulation that particle trajectories would theoretically cover the whole target surface if the lapping time is long enough due to their non-periodic characteristics, which can guarantee the uniformity of material removal from the surface of workpiece with relatively high surface quality. The encouraging experimental results underline the potential of the novel driving system design in the application of the single-side planetary abrasive lapping for the improvement of the surface quality in terms of surface roughness and material removal uniformity.


2015 ◽  
Vol 8 (2) ◽  
pp. 179-184 ◽  
Author(s):  
Valeria Nocella ◽  
Luca Pelliccia ◽  
Paola Farinelli ◽  
Roberto Sorrentino ◽  
Mario Costa ◽  
...  

A robust and tuneless micromachined waveguide diplexer operating in the frequency range 71–86 GHz is here presented. The diplexer is based on multiple coupled cavities and it is manufactured using micromachining technology on two staked silicon layers. The diplexer consists of two filters combined to a common waveguide port via an E-plane T-junction. The two eight-order band-pass filters are centered at 73.5 and 83.5 GHz. The fractional bandwidths for two bands are 8.8 and 7.8% at higher- and lower-band, respectively. The measured insertion loss is below 0.7 dB for both the filters and the diplexer isolation is better than 55 dB, as required. The proposed technology allows for a very compact device (<20 × 20 × 1.5 mm) and the first prototypes were proved to be very robust to manufacturing tolerances and environmental tests, thus leading to an excellent tuneless manufacturing yield in future production. The diplexer will be employed in next generation terrestrial radio-link communications front-ends.


2017 ◽  
Vol 4 (1) ◽  
pp. 5-7
Author(s):  
Chinnadurai T ◽  
Nagaraj P

The vision of the greenish world refashions lightning into brownish ground. When our human minds enlarge, our souls and hearts become brownie and narrow. Our world is expected to face massive calamities which have already given enough signs to be aware of disasters like Tsunami, earthquakes, global warmingand less prime span of living. According to the poet W.H. Auden “a culture is no better than its woods”.Today’s children are being taught how to cut away the trees and build fine air conditioner rooms. Being an English teacher, one has the greatest responsibility in language classroom in molding the future leaders. If we do not care of our square classroom today, our circle globe will be no more for next generation. Only our four pillars of classroom are to shape our Earth. Students are facing many problems in indoor learning like attention difficulties, diminished use of sense, hyperactivity, and childhood obesity and disconnection from real things. English teacher has to have the efficiency to transfer students’ ability into positive environmental action to preserve our earth as over grown living areas. It’s our responsibility to grow our children with greenish perspective. This paper focuses how to develop our ecological system through English fortomorrow’s leaders.


Author(s):  
Khalaeb Richardson ◽  
Anne Collins McLaughlin ◽  
Mitchell McDonald ◽  
Aaron Crowson

Many environments contain visual and auditory distractions. Cognitive aids help limit these distractions, support attention, and improve task performance. One way this is done is by adding information to the environment via Augmented Reality (AR). Attention may also be supported by removing distractors using Diminished Reality (DR), a form of AR that computationally erases, de-emphasizes, or otherwise diminishes external stimuli. However, there was no research investigating the design of the control and display system for DR technology and the question of how to redirect or gain someone’s attention when their environment is diminished had not been addressed. This study explored the acceptability and effectiveness of notifications with varying attributes and fills that gap in research. Results indicated that low specificity notifications in a diminished environment are rated as being subjectively better than notifications of other formats; low specificity messages were also recalled at a greater rate.


2015 ◽  
Vol 39 (3) ◽  
pp. 455-465 ◽  
Author(s):  
Long-Chang Hsieh ◽  
Tzu-Hsia Chen ◽  
Hsiu-Chen Tang

To achieve reduced costs and energy conservation, this paper proposes non-standard helical spur gear reducer with one gear pair (having reduction ratio 19.25) to be the gear reducer for electric scooter. This paper also focuses on the meshing efficiency analysis of non-standard helical spur gear pair. According to Buckingham’s research, the theoretical meshing efficiency formula of non-standard helical spur gear pair is derived. Three design cases of non-standard helical spur gear pair (4, 77) are proposed as examples for analyzing their meshing efficiencies at widely rotation speed range. The theoretical meshing efficiencies for the helical spur gear pair (4, 77) are between 96.47–99.26%. Its best meshing efficiency occurs at 800–1000 rpm of pinion. The meshing efficiencies of these three design cases are almost same, and their differences are less than 0.5%. Considering the root strength of pinion, Cases II and III are better than Case I.


2008 ◽  
Vol 85 (11) ◽  
pp. 2236-2242 ◽  
Author(s):  
Sukhoon Jeong ◽  
Sangjik Lee ◽  
Haedo Jeong

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