The Effect of Casimir Force to the Performance of the Micro-Accelerometer
2013 ◽
Vol 562-565
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pp. 247-250
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Casimir had measured the Casimir force through experimental methods, and fitted the empirical formula between the plates. On its basis we analyse that when the gap of two separating surfaces achieves submicron in micro devices, the effect of the Casimir force to the micro-devices is great and this Casimir effect can not be ignored. The results show that: Considering the Casimir force or not, the extreme value of acceleration which can be detected by micro-accelerometer is different, and we have got the specific numerical fitting figure by Matlab .
2012 ◽
Vol 14
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pp. 200-214
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2002 ◽
Vol 11
(10)
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pp. 1567-1572
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2016 ◽
Vol 31
(06)
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pp. 1650012
2006 ◽
Vol 21
(25)
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pp. 1957-1963
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2020 ◽
Vol 35
(03)
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pp. 2040015
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2012 ◽
Vol 07
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pp. 165-173
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Keyword(s):
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