Visible Light Sensor Based on Metal-Oxide-Semiconductor Structure
We present results for the effect of visible and UV light on the capacitance-voltage characteristics of a p-type Si based Metal-Oxide-Semiconductor ring-dot structure. It is shown that the structure can be used as a low cost sensor that is simple and easy to manufacture. The sensor can be used to measure visible and UV light intensity or as a light switch. The output signal is change of the inversion capacitance under light illumination at a given bias. The device power consumption is very low and the output signal is independent of the temperature.
Keyword(s):
2010 ◽
Vol 157
(6)
◽
pp. H633
◽
Keyword(s):