Preparation and Properties of Co/Fe Multilayers and Co-Fe Alloy Films for Application in Magnetic Field Sensors
In magnetoelectric sensors for the detection of weak magnetic fields, the magnetostrictivecomponent is required to show a high strain at small magnetic field changes. Co-Fe alloys, amongrare earth free materials, have one of the largest saturation magnetostriction and are magnetically softat the same time. In this study, Co-Fe alloy films with 66 at.-% Co are prepared by magnetron sputterdeposition of Co/Fe-multilayers which differ in their individual layer structure and in a subsequentrapid thermal annealing process. The influence of the initial bilayer period and the annealing temperatureon the phase formation and film structure are investigated. X-ray diffraction revealed a higherfraction of the desired face-centered cubic solid solution for thicker individual layers after the 800 °Cannealing. The change of the electrical in-plane resistivity reaches a minimum around 500 °C and iscorrelating well with the observed grain growth and solid solution phase formation. The investigationof magnetic properties with vibrating sample magnetometry shows coercive fields of 3.2 kA/m and2.2 kA/m for fully alloyed films with initial bilayer periods of 25 nm and 250 nm, respectively.