Reclamation of Polymer PET Substrate Using T-Form Tool

2009 ◽  
Vol 626-627 ◽  
pp. 1-4
Author(s):  
Pai Shan Pa
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Feed Rate ◽  
Removal Rate ◽  
Etching Rate ◽  
High Rotational Speed ◽  
Small Thickness ◽  
Short Period ◽  
Gap Width ◽  
Pet Substrate

In the current study, a reclamation module uses micro electroetching as a precision fabrication with a new design of T-form tool to remove the defective Indium-tin-oxide (TCO) nanostructure from the optical PET surfaces of digital paper display is presented in current studies. The adopted precision reclamation process requires only a short period of time to remove the TCO nanostructure easily and cleanly is based on technical and economical considerations and is highly efficient. A large rotational diameter of the cathode accompanied by a small gap width between the cathode and the workpiece corresponds to a higher removal rate for the TCO nanostructure. A small thickness of the electrodes, or a small edge radius of the electrodes takes less time for the same amount of TCO removal. A higher feed rate of the optical PET diaphragm combines with enough electric power to drive fast etching rate. High rotational speed of the T-form tool can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece (optical PET diaphragm).

Precision Recycle Module for Digital-Paper Display Using Twins-Cylinder Tool

2010 ◽  
Vol 428-429 ◽  
pp. 387-390
Author(s):  
Pai Shan Pa
Keyword(s):  
Thin Film ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Feed Rate ◽  
Removal Rate ◽  
Small Diameter ◽  
Production Costs ◽  
High Rotational Speed ◽  
Digital Paper ◽  
Short Period

A new effective fabrication module was developed to mediate the problem of the low yield of Indium-tin-oxide (ITO) nanostructures deposition uses micro electroremoval technology and a design of twins-cylinder tool as a precision etching process to remove the defective Indium-tin-oxide (ITO) from the optical PET diaphragm surfaces of digital-paper displays. For the removal-process, a small gap width between the negative electrode and the workpiece (optical PET diaphragm) surface corresponds to a higher removal rate for the ITO. A small diameter of the anode or a small diameter of the cathode of the twins-cylinder tool provides large electric current density and takes less time for the same amount (20 nm) of ITO removal. High rotational speed of the twins-cylinder tool the discharge mobility and results in improving the removal effect. Providing enough electrical power can uses fast feed rate of the optical PET diaphragm combined with a fast removal rate for ITO. With increasing in current rating, pulsed direct current can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the optical PET diaphragm. By establishing a recycling process using the ultra-precise removal of thin-film nanostructures, through the micro electroremoval and the twins-cylinder electrodes requires only a short period of time to remove the ITO thin-film easily and cleanly. The optoelectronic semiconductor industry can effectively recycle defective products, minimizing both production costs and pollution.

The Removal of In2O3SnO4 Thin Film Using an Arc-Form Tool for the Precision Recycling of Defective Digital-Paper

2013 ◽  
Vol 668 ◽  
pp. 288-291
Author(s):  
P.S. Pa
Keyword(s):  
Thin Film ◽  
Indium Tin Oxide ◽  
Electrochemical Etching ◽  
Removal Rate ◽  
High Rotational Speed ◽  
Digital Paper ◽  
Higher Temperature ◽  
Pulsed Direct Current ◽  
Gap Width ◽  
Thin Film Nanostructures

A newly designed arc-form shaped tool was used to carry out precise micro electrochemical etching (MECE) to remove Indium-tin-oxide (In2O3SnO2) thin-film nanostructures from the optical PET diaphragm surfaces for digital-paper surface. For this precise removal process, a higher current with a faster feed rate of the optical PET diaphragm effectively achieved rapid material removal. A pulsed direct current can improve dregs discharge and is advantageous when associated with fast PET feed rates, but this raises the total current required. A higher temperature or flow velocity of the electrolyte corresponds to a higher removal rate of the In2O3SnO2 nanostructures. A high rotational speed of the arc-form shaped tool corresponds to a higher removal rate of In2O3SnO2. A large cathode, along with a small gap-width between the cathode and the PET diaphragm, increases In2O3SnO2 removal rates. A thin cathode, or a short arc length of the arc-form anode, reduces the time taken for In2O3SnO2 removal.

Product Design of a Precision Recycle-Process Tool for Displays' Color Filters of TFT-LCDs

2008 ◽  
Vol 44-46 ◽  
pp. 449-454
Author(s):  
Pai Shan Pa
Keyword(s):  
Thin Film ◽  
Feed Rate ◽  
Removal Rate ◽  
Film Deposition ◽  
Production Costs ◽  
Color Filter ◽  
High Rotational Speed ◽  
Removal Process ◽  
Short Period ◽  
Thin Film Nanostructures

An effective process was developed using electroremoval as a precision removal-process for indium tin oxide (ITO) thin-film nanostructures from the displays’ color filter surface of thin film transistor liquid crystal displays (TFT-LCDs). The low yield of ITO thin-film deposition is an important factor in semiconductor production. By establishing a recycling process using the ultra-precise removal of thin-film nanostructures, the semiconductor optoelectronic industry can effectively recycle defective products, minimizing both production costs and pollution. For the removal-process, high rotational speed of the electrode (negative-pole) elevates the discharge mobility and results in improved removal. High flow velocity of the electrolyte provides larger discharge mobility and greater removal ability. An adequate gap-width between the negative-electrode and the ITO surface, or a higher working temperature, results in a higher removal rate for ITO thin-films. Also, adequate feed rate of the color filter combined with enough electrical power produces a fast removal rate. Pulsed direct current can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece (displays’ color filter), but it raises the current rating. Electrochemical removal requires only a short period of time to remove the ITO thin-film easily and cleanly.

Nanoscale Removal Processing by a Twin-Cylinder Tool

2013 ◽  
Vol 284-287 ◽  
pp. 414-417
Author(s):  
P.S. Pa
Keyword(s):  
Indium Tin Oxide ◽  
Removal Rate ◽  
Semiconductor Industry ◽  
Large Diameter ◽  
Production Costs ◽  
Tool Electrode ◽  
High Rotational Speed ◽  
The Cost ◽  
Color Filters ◽  
Gap Width

A major problem for the implementation of microelectroremoval is the cost and the design of the tool electrode. An effective nanoscale processing for yield improvement was developed using microelectroremoval and a designed twin-cylinder tool as a precision reclamation retrieval system to remove the defective indium tin oxide (ITO) thin-film nanostructures from the optical PET surfaces of digital paper. By establishing a recycling process using the ultra-precise removal of nanostructures, the optoelectronic semiconductor industry can effectively recycle defective products, minimizing both production costs and pollution. In the current experiment, small thickness of the anode, combined with enough electric power and provided a larger discharge space, and better removal effect. A large diameter of the cylinder acthode accompanied by a small gap-width between the cathode and the workpiece, takes less time to do the same amount of ITO removal. A higher rate of removal of the defective ITO nanostructures corresponds to high temperature, a large electrolyte flow rate with a high rotational speed of the electrodes. A faster feed rate of color filters combined with a higher electric current produces a fast removal rate. A small edge angle of the anode also provides higher current density, which is advantageous for ITO removal.

Design of Inner Wedge-Form Tool in Precision Recycle of Digital Paper Display

2009 ◽  
Vol 620-622 ◽  
pp. 607-610
Author(s):  
Pai Shan Pa
Keyword(s):  
Indium Tin Oxide ◽  
Feed Rate ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Machining Process ◽  
Slant Angle ◽  
High Rotational Speed ◽  
Digital Paper ◽  
Small Width ◽  
Short Period

The low yield of ITO thin film deposition is an important factor in optoelectronic semiconductor production. A recycle fabrication module uses micro electroremoving as a precision machining process with a new design of inner wedge-form tool to remove the defective Indium-tin-oxide (ITO) nanostructure from the optical PET surfaces of digital paper display is presented in current studies. The adopted precision recycle process requires only a short period of time to remove the ITO nanostructure easily and cleanly is based on technical and economical considerations and is highly efficient. In the current experiment, a higher feed rate of the optical PET diaphragm combines with enough electric power to drive fast micro electroremoving. A large slant angle of the cathode and a small arc rounding radius of the anode takes less time for the same amount of ITO removal. High rotational speed of the electrodes can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece (optical PET diaphragm). A small rotational diameter of the anode accompanied by a small width of the cathode corresponds to a higher removal rate for the ITO nanostructure.

Convex-Shape Tool in Nano-Fabrication of Digital-Paper Display

2010 ◽  
Vol 135 ◽  
pp. 36-40
Author(s):  
Pai Shan Pa
Keyword(s):  
Indium Tin Oxide ◽  
Feed Rate ◽  
Removal Rate ◽  
Large Diameter ◽  
Electrochemical Machining ◽  
Machining Time ◽  
Convex Shape ◽  
High Rotational Speed ◽  
Nano Fabrication ◽  
Digital Paper

This study describes a new module that uses micro electrochemical machining, and a new design of a convex-shaped tool, in a precision reclamation process to remove defective Indium-tin-oxide (ITO) nanostructures from the optical PET diaphragm surfaces of a digital-paper display. This process takes very little time to remove the ITO layers easily and cleanly and is highly efficient both technically and economically. A small end radius of the cathode or a thin cathode of the bulge-form tool takes less time for the same amount (20 nm) of ITO removal. A large diameter of the cathode of the bulge-form tool combined with a small gap between the cathode and the workpiece corresponds to a higher removal rate of ITO. A high rotational speed of the bulge-form tool can also improve dregs discharge and allows a higher feed rate of the optical PET diaphragm. This higher feed rate combined with enough voltage results in a shorter machining time.

A Precise Recycle Module of e-Paper as a Clean Production Process for Environmental Protection Considerations

2012 ◽  
Vol 241-244 ◽  
pp. 2565-2568
Author(s):  
Pai Shan Pa
Keyword(s):  
Environmental Protection ◽  
Feed Rate ◽  
Removal Rate ◽  
Transparent Conducting Oxide ◽  
Large Diameter ◽  
Machining Time ◽  
High Rotational Speed ◽  
Paper Surface ◽  
Transparent Conducting ◽  
20 Nm

This study describes a new precise recycle module as a clean poduction pocess and an environmental protection consideration that uses micro electroetching (MECE) and a new design of an intercross tool to remove defective transparent conducting oxide (TCO) nanostructures from the optical PET diaphragm surfaces for e-paper surface. This process takes very little time to remove the TCO easily and cleanly and is highly efficient both technically and economically. A large diameter of the cathode of the intercross tool combined with a small gap between the cathode and the workpiece corresponds to a higher removal rate of TCO. This higher feed rate combined with enough voltage results in a shorter machining time. A high rotational speed of the intercross tool can also improve dregs discharge and allows a higher feed rate of the optical PET. A small end radius of the cathode or a thin cathode of the bulge-form tool takes less time for the same amount (20 nm) of TCO removal.

Defects Removal Using a Triangular-Shape Designed Tool

2010 ◽  
Vol 297-301 ◽  
pp. 203-208
Author(s):  
Pai Shan Pa
Keyword(s):  
Indium Tin Oxide ◽  
Feed Rate ◽  
Electrochemical Etching ◽  
Removal Rate ◽  
Semiconductor Industry ◽  
Production Costs ◽  
Color Filter ◽  
Filter Surface ◽  
Triangular Shape ◽  
Ito Thin Films

A new triangular-shape designed tool as a cathode in microelectromechanical etching process is a precision nanoscale production of a reclamation system of Indium tin oxide (ITO) thin-films defects removal from optoelectronic flat panel displays’ color filter surface is demonstrated in the current study. Through the ultra-precise removal of the thin-film nanostructure, the optoelectronic semiconductor industry can effectively reclaim defective products, reducing production costs. In the current experiment, a large size triangular shape cathode is accompanied by a small gap-width between the cathode and the workpiece takes less time for the same amount of ITO removal. A higher feed rate of displays’ color filter or a small end radius of the cathode combined with enough electric power produces fast machining. Pulsed direct current can improve the effect of dregs discharge and is advantageous in association with a fast workpiece feed rate. However, it raises the current rating. A large flow rate of the electrolyte corresponds to a higher removal rate for the ITO nanostructure. The electrochemical etching just needs a short time to make the ITO remove removal easy and clean.

Laser patterning indium tin oxide (ITO) coated on PET substrate

2000 ◽  
Author(s):  
Hong-Yin Tsai ◽  
Hsiharng Yang ◽  
Chengtang Pan ◽  
Min-Chieh Chou
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Laser Patterning ◽  
Pet Substrate

scholarly journals Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser

2020 ◽  
Vol 9 (1) ◽  
pp. 1539-1549
Author(s):  
Chern Yang Leong ◽  
Seong Shan Yap ◽  
Guang Liang Ong ◽  
Teng Sian Ong ◽  
Seong Ling Yap ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Glass Substrate ◽  
Single Pulse ◽  
Nonlinear Process ◽  
Thermomechanical Properties ◽  
Ito Glass ◽  
Fs Laser ◽  
Pet Substrate ◽  
High Absorption

Abstract Indium tin oxide (ITO) is the most important transparent conducting electrode to date and the candidate for ultrafast signal processing in telecommunication region. ITO is normally selectively removed in a multiple-steps process for device application. In this work, we aimed to study single pulse removal of ITO-coated glass and PET by using a nanosecond (ns) laser (266 nm) and a femtosecond (fs) laser (1,025 nm) where each process is dominated by either linear or nonlinear process. For ns laser, ITO was removed from PET substrate at 0.01 J/cm2. Detachment likely occurred via thermal-induced process because of the high absorption by both ITO and PET and the thermomechanical properties of PET. At higher laser fluence (∼0.04 J/cm2), the ITO films on both substrates were damaged, and at 1.34 J/cm2, ITO was ablated from the glass substrate. For fs laser removal via nonlinear process, ITO was removed from PET substrate at 0.3 J/cm2, but at 0.8 J/cm2, the PET substrate was also modified. ITO layer was partially removed from glass substrate by fs laser pulse at 0.3 J/cm2 and full removal only occurred at 1.7 J/cm2. Thus, the fluence range for single fs pulse removal of ITO/PET was 0.3–0.8 J/cm2 and >1.7 J/cm2 for ITO/glass.

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