Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA

2021 ◽  
pp. 251659842110452
Author(s):  
Rahul Shukla ◽  
Gowtham Beera ◽  
Ankit Dubey ◽  
Varun P. Sharma ◽  
P. Ram Sankar ◽  
...  
Keyword(s):  
Sacrificial Layer ◽  
Micro Electro Mechanical System ◽  
Maximum Torque ◽  
Element Analysis ◽  
Deposited Metal ◽  
Rotor Pole ◽  
Electroformed Nickel ◽  
Microfabrication Technique ◽  
Wet Chemical ◽  
Metal Layers

In the present work, a micro-electro-mechanical system (MEMS)-based electrostatic micromotor is designed and fabricated. Finite element analysis is done and various parameters affecting the torque are studied. Maximum torque is achieved at 120° phase angle. The effect of change in voltage, micromotor height and frequency is analysed and discussed. UV-SLIGA, a microfabrication technique, is used for the fabrication of electrostatic micromotor of height 30µm and higher. UV lithography is conducted by both positive AZ P4620 and negative (SU-8 10 and SU-8 2150) photoresists. Copper (Cu) is used as a sacrificial layer to release the rotor (the movable part) of the electrostatic micromotor. Electroformed nickel (Ni) is used for making stator, rotor and axle, whereas chromium (Cr) is used as a seed layer. The micromotor is fabricated with a stator-rotor pole having configuration ratio of 3:2. The gap between the rotor and axle is 20 µm. Wet chemical etching is used to etch the deposited metal layers (Cr, Ni and Cu). Challenges such as the adhesion between the photoresist mould and substrate, cracks, seepage and misalignment are faced during the microfabrication. These challenges are overcome by optimizing the various parameters. The fabrication of electrostatic micromotor is done successfully and the results are discussed in the article.

Ion-Assisted Surface Processing of Electronic Materials

MRS Bulletin ◽  
1992 ◽  
Vol 17 (6) ◽  
pp. 52-57 ◽  
Author(s):  
S.T. Picraux ◽  
E. Chason ◽  
T.M. Mayer
Keyword(s):  
Plasma Etching ◽  
Electronic Materials ◽  
Low Energy ◽  
Surface Processing ◽  
Wave Guides ◽  
Side Walls ◽  
Wet Chemical ◽  
Low Energy Ions ◽  
Metal Layers ◽  
Defect Densities

Why are low-energy ions relevant to the surface processing of electronic materials? The answer lies in the overriding trend of miniaturization in microelectronics. The achievement of these feats in ultrasmall architecture has required surface processing capabilities that allow layer addition and removal with incredible precision. The resulting benefits of greater capacity and speed at a plummeting cost per function are near legendary.The ability of low-energy ions to enhance the precision of surface etching, cleaning, and deposition/growth processes (Figure 1) provides one basis for the interest in ion-assisted processes. Low-energy ions are used, for example, to enhance the sharpness of side walls in plasma etching and to improve step coverage by metal layers in sputter deposition. Emerging optoelectronic applications such as forming ridges for wave-guides and ultrasmooth vertical surfaces for lasers further extend piesent requirements, and low-energy ions again provide one tool to help in this area of ultraprecise materials control. Trends associated with the decreased feature size include the movement from wet chemical processing to dry processing, the continuing need for reductions in defect densities, and the drive toward reduced temperatures and times in process steps.How do the above trends focus interest on studies of low-energy ion-assisted processes? In current applications, these trends are driving the need for increased atomic-level understanding of the ion-enhancement mechanisms, for example, in reactive ion etching to minimize defect production and enhance surface chemical reactions.

Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method

2018 ◽  
Vol 140 (7) ◽  
Author(s):  
Paolo Sanò ◽  
Matteo Verotti ◽  
Paolo Bosetti ◽  
Nicola P. Belfiore
Keyword(s):  
Rigid Body ◽  
Experimental Testing ◽  
Micro Electro Mechanical System ◽  
Element Analysis ◽  
Kinematic Synthesis ◽  
Replacement Method ◽  
Rigid Body Model ◽  
Mems Device ◽  
Conjugate Surfaces ◽  
Line Path

In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.

Novel switched flux machine with radial and circumferential permanent magnets

2016 ◽  
Vol 35 (2) ◽  
pp. 473-492 ◽  
Author(s):  
M.M.J. Al-ani ◽  
Z.Q. Zhu
Keyword(s):  
Permanent Magnets ◽  
Outer Region ◽  
Optimization Procedure ◽  
Design Parameters ◽  
Element Analysis ◽  
Content Type ◽  
Copper Loss ◽  
Rotor Pole ◽  
Internal Rotor ◽  
External Rotor

Purpose – The paper purposes a novel SFPM machine topology with radial and circumferential permanent magnets (PMs). The paper aims to discuss this issue. Design/methodology/approach – In order to reduce the flux leakage in the stator-outer region and consequently achieve higher magnetic material utilization in switched flux permanent magnet (SFPM) machine, a novel topology with radial and circumferential PMs is proposed. This topology (SFRCPM) has the same structure as conventional SFPM (CSFPM) machine except of the additional set of radially magnetized PMs located around the back iron and surrounded by a laminated ring frame. Using finite element analysis (FEA) the influence of the design parameters on the performance is investigated in order to obtain an effective optimization procedure. Internal and external rotor SFRCPM machines with either NdFeB or ferrite magnets are investigated, optimized and compared with the CSFPM machine having the same size, copper loss and stator/rotor pole combination. Findings – It is concluded that comparing SFRCPM with its CSFPM machine counterpart, internal rotor SFRCPM machine can achieve high PM flux-linkage per magnet volume, however reduced slot area leads to low output torque, whereas external rotor SFRCPM machine can produce higher torque and torque per magnet volume. Originality/value – This paper proposes a novel SFPM machine topology.

scholarly journals Evaluation of Efficient Operation for Electromechanical Brake Using Maximum Torque per Ampere Control

Energies ◽  
2019 ◽  
Vol 12 (10) ◽  
pp. 1869 ◽  
Author(s):  
Seung-Koo Baek ◽  
Hyuck-Keun Oh ◽  
Joon-Hyuk Park ◽  
Yu-Jeong Shin ◽  
Seog-Won Kim
Keyword(s):  
Permanent Magnet Synchronous Motor ◽  
Current Control ◽  
Experimental Results ◽  
Input Current ◽  
Maximum Torque ◽  
Element Analysis ◽  
Efficient Operation ◽  
Current Controller ◽  
Maximum Torque Per Ampere ◽  
Electromechanical Brake

This paper deals with efficient operation method for the electromechanical brake (EMB). A three-phase interior permanent magnet synchronous motor (IPMSM) is applied to the EMB operation. A current controller, speed controller, and position controller based on proportional-integral (PI) control are used to drive the IPMSM. Maximum torque per ampere (MTPA) control is applied to the current controller to perform efficient control. For MTPA control, the angle β is calculated from total input current, and the synchronous frame d–q axis current reference is determined by the angle β. The IPMSM is designed and analyzed with finite element analysis (FEA) software and current control is simulated by Matlab/Simulink using a motor model designed by FEA software. The simulation results were verified to compare with experimental results that are input current and clamping force of caliper. In addition, the experimental results showed that the energy consumption is reduced by MTPA.

scholarly journals Comparison of different magnet arrangement on performance of flux reversal permanent magnet (FRPM) machine

2019 ◽  
Vol 10 (3) ◽  
pp. 1207
Author(s):  
M. H. Remlan ◽  
R. Aziz ◽  
S Salimin
Keyword(s):  
Finite Element Analysis ◽  
Permanent Magnet ◽  
High Speed ◽  
Permanent Magnets ◽  
Correct Position ◽  
Maximum Torque ◽  
Element Analysis ◽  
Flux Reversal ◽  
Previous Design ◽  
Analysis Of Performance

<span lang="EN-MY">This paper offers the analysis of performance of Flux Reversal Permanent Magnet (FRPM) machines with different type of magnet arrangements. There are two designs that have been proposed in this report, which one of them has a pair of permanent magnets (PM) with alternate polarities place on surface of stator tooth and the polarities of two adjacent PM at these two stators are identical. This PM arrangement is called as NS-SN configuration. Second design is NS-NS configuration that has different PM polarities on different stator tooth. By comparing this PM arrangement, generally the NS-NS configuration offers high speed and power. However, the NS-SN configuration shows higher maximum torque compared to the previous design. The design process for both configurations is completely using finite element analysis (FEA) which is JMAG-Designer. To make sure the coil phase is in correct position, the design configuration with coil arrangement tests are evaluated. Finally, each flux of both designs been observed by analyse their torque with various armature current density.</span>

scholarly journals Surface Micromachined Silicon Carbide Accelerometers for Gas Turbine Applications

1999 ◽  
Author(s):  
Russell G. DeAnna
Keyword(s):  
Finite Element Analysis ◽  
Silicon Carbide ◽  
Finite Element ◽  
Mechanical Design ◽  
Sacrificial Layer ◽  
Shape Change ◽  
Chemical Vapor ◽  
Element Analysis ◽  
Centripetal Acceleration ◽  
On Chip

A finite-element analysis of possible silicon carbide (SiC), folded-beam, lateral-resonating accelerometers is presented. Results include stiffness coefficients, acceleration sensitivities, resonant frequency versus temperature, and proof-mass displacements due to centripetal acceleration of a blade-mounted sensor. The surface micromachined devices, which are similar to the Analog Devices® Inc., (Norwood, MA) air-bag crash detector, are etched from 2-μm thick, 3C-SiC films grown at 1600 K using atmospheric pressure chemical vapor deposition (APCVD). The substrate is a 500 μm-thick, (100) silicon wafer. Polysilicon or silicon dioxide is used as a sacrificial layer. The finite-element analysis includes temperature-dependent properties, shape change due to volume expansion, and thermal stress caused by differential thermal expansion of the materials. The finite-element results are compared to experimental results for a SiC device of similar, but not identical, geometry. Along with changes in mechanical design, blade-mounted sensors would require on-chip circuitry to cancel displacements due to centripetal acceleration and improve sensitivity and bandwidth. These findings may result in better accelerometer designs for this application.

scholarly journals Performances analysis of interior permanent magnet motors having different rotor iron pole shapes

2021 ◽  
Vol 12 (4) ◽  
pp. 1999
Author(s):  
Ahlam Luaibi Shuraiji ◽  
Buraq Abdulhadi Awad
Keyword(s):  
Permanent Magnet ◽  
Torque Ripple ◽  
High Energy ◽  
Electromagnetic Torque ◽  
Permanent Magnet Motors ◽  
Element Analysis ◽  
Magnet Material ◽  
Interior Permanent Magnet ◽  
Rotor Pole ◽  
Permanent Magnet Material

<p><span lang="EN-US">Interior permanent magnet motors (IPMMs) have been increasing in popularity, since the emergence of permanent magnet material with high energy products, i.e. rare earth permanent magnet material. This paper analyses the performances of IPMMs having different rotor iron pole shapes including eccentric, sinusoidal and sinusoidal with 3th order harmonic injected rotor pole arc shapes IPMMs. Cogging torque, static torque, torque ripple, torque-speed and power-speed curves of the mentioned motors have been compared. It must be noted that the mentioned motors have been designed with the same stator, PM shape and the same dimensions, in order to highlight the effect of the rotor pole arc shape on the performance of the such motors. Two-dimensional (2D) finite element analysis (FEA) has been utilized to design and analyze the mentioned machines. It has been found that rotor iron pole shape of the IPM has notably influence on the machine performance, practically on output electromagnetic torque and its ripple. The highest value of average electromagnetic torque as well as torque capability in the constant torque reign is delivered by 3th order harmonic injected rotor pole arc shapes machine, while the lowest torque ripple is obtained by the sinusoidal rotor pole arc machine.</span></p>

Nondimensional Analysis on the Mitigation of Hard Surface Roughness Induced Torque on Hard Cylinders by Introduction of a Soft Interfacial Layer for Precision Positioning Applications

Tribology ◽  
2006 ◽  
Author(s):  
Steven R. H. Barrett ◽  
Alexander H. Slocum
Keyword(s):  
Finite Element Analysis ◽  
Surface Roughness ◽  
Finite Element ◽  
Interfacial Layer ◽  
Maximum Torque ◽  
Element Analysis ◽  
Geometric Imperfections ◽  
Positioning Accuracy ◽  
Drive Roller ◽  
Torque Values

It is widely known that surface roughness and other geometric imperfections can impose a limit on the positioning precision of actuators. The case of a hard cylinder rolling on a hard layer is investigated here, as it is applicable to friction drives. It is proposed that a soft interfacial layer between the drive roller and drive rail can mitigate the effects of geometric imperfections on positioning accuracy. Positioning accuracy is characterized by way of a 'roughness torque', which is the maximum torque that the roller sustains due to roughness of the rail. It is assumed that lower roughness torque values lead to greater positioning accuracy. Finite element analysis and an analytic approach are employed to investigate the situation.

scholarly journals PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 319 ◽  
Author(s):  
Mansoor Ahmad ◽  
Ayhan Bozkurt ◽  
Omid Farhanieh
Keyword(s):  
Wafer Bonding ◽  
Sacrificial Layer ◽  
Ultrasonic Transducer ◽  
Center Frequency ◽  
Single Element ◽  
Element Analysis ◽  
Laboratory Equipment ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
Dry Etch

This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as compared to other wafer-bonding methods and sacrificial-layer processes. A low-temperature (< 180 ∘ C ) bonding process was carried out in a purpose-built bonding tool to minimize the involvement of expensive laboratory equipment. A single-element CMUT comprising 16 cells of 2.5 mm radius and 800 nm cavity was fabricated. The center frequency of the device was set to 200 kHz for underwater communication purposes. Characterization of the device was carried out in immersion, and results were subsequently validated with data from Finite Element Analysis (FEA). Results show the feasibility of the fabricated CMUTs as receivers for underwater applications.

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