Structural evolution of a Ta-filament during hot-wire chemical vapour deposition of Silicon investigated by electron backscatter diffraction
2011 ◽
Vol 47
(5)
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pp. 2405-2410
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Keyword(s):
2008 ◽
Vol 255
(5)
◽
pp. 2557-2560
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Keyword(s):
2013 ◽
Vol 140
(1)
◽
pp. 37-41
◽
2011 ◽
Vol 11
(9)
◽
pp. 8202-8205
◽
Microdoping compensation of microcrystalline silicon obtained by hot-wire chemical vapour deposition
2000 ◽
Vol 63
(3)
◽
pp. 237-246
◽
Keyword(s):
Hot Wire
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Keyword(s):