Role of Rapid Thermal Processing in the Development of Disruptive and Non-disruptive Technologies for Semiconductor Manufacturing in the 21st Century

2003 ◽  
pp. 1-8
Author(s):  
Rajendra Singh ◽  
Mohammed Fakhruddin ◽  
Kelvin F. Poole
Keyword(s):  
21St Century ◽  
Thermal Processing ◽  
Semiconductor Manufacturing ◽  
Rapid Thermal Processing ◽  
Disruptive Technologies

Commercial RTP-A SEMATECH Perspective

1996 ◽  
Vol 429 ◽  
Author(s):  
Tony Speranza ◽  
Terry Riley ◽  
Arun Nanda ◽  
Burt Fowler ◽  
Kenneth Torres ◽  
...  
Keyword(s):  
Process Control ◽  
Thermal Processing ◽  
Semiconductor Manufacturing ◽  
Rapid Thermal Processing ◽  
Component Technology ◽  
Tool Development ◽  
Productivity Improvement ◽  
The Past ◽  
Vertical Furnace ◽  
Cluster Tool

AbstractThis paper discusses various commercial aspects of Rapid Thermal Processing (RTP). It provides an overview of SEMATECH's efforts to improve the manufacturing viability of RTP. Over the past several years SEMATECH, a U.S. Government/Industry consortium, has identified thermal equipment and processing needs relating to semiconductor manufacturing. It has aggressively pursued solutions to these needs through specific equipment projects. These projects include: RTP Installed Base Productivity Improvement, 0.25um RTP Tool Development, and RTP Modeling and Component Technology. Also discussed are several thermal projects which focus on the performance of more traditional tools. A comparison between RTP and a vertical furnace with model based process control and a small batch fast ramp furnace is made. A brief discussion of an RTP gate stack cluster tool project is followed by a review of future thermal processing needs, including 300mm.

Role of the carbon source in the transformation of amorphous carbon to graphene during rapid thermal processing

2019 ◽  
Vol 21 (18) ◽  
pp. 9384-9390 ◽  
Author(s):  
Xiaowei Li ◽  
Yong Zhou ◽  
Xiaowei Xu ◽  
Aiying Wang ◽  
Kwang-Ryeol Lee
Keyword(s):  
Carbon Source ◽  
Amorphous Carbon ◽  
Thermal Processing ◽  
Rapid Thermal Processing

A fast transfer-free synthesis of a graphene structure can be successfully achieved by Ni-catalysed transformation of amorphous carbon (a-C) during rapid thermal processing, but the role of the a-C structure in the a-C-to-graphene transformation is still unclear.

The Role of Thermal Radiative Properties of Semiconductor Wafers in Rapid Thermal Processing

1996 ◽  
Vol 429 ◽  
Author(s):  
P. J. Timans
Keyword(s):  
Thermal Processing ◽  
Radiation Heat Transfer ◽  
Rapid Thermal Processing ◽  
Device Fabrication ◽  
Radiative Properties ◽  
Thermal Radiative Properties ◽  
Wide Range ◽  
Basic Physics ◽  
Key Issues

AbstractRapid thermal processing (RTP) has become a key technology in the fabrication of advanced semiconductor devices. As RTP becomes the accepted technique for an increasingly wide range of processes in device fabrication, the understanding of the basic physics of radiation heat transfer in RTP systems is also being extended rapidly. This paper illustrates the use of optical models for prediction of the thermal radiative properties of semiconductor wafers. Such calculations can be used to address many of the key issues of interest in RTP, including questions concerning temperature measurement and process repeatability.

The Control and Impact of Processing Ambient During RTP

1998 ◽  
Vol 514 ◽  
Author(s):  
Karen Maex ◽  
Eiichi Kondoh ◽  
Anne Lauwers ◽  
Muriel DePotter ◽  
Joris Prost
Keyword(s):  
Thermal Processing ◽  
Thermal Process ◽  
Rapid Thermal Processing ◽  
Process Window ◽  
Temperature Uniformity ◽  
Silicide Formation ◽  
Temperature Variations ◽  
Set Up ◽  
Interconnect Technology

ABSTRACTThe introduction of rapid thermal processing for silicide formation has triggered a lot of research to temperature uniformity and reproducibility in RTP systems. From the other side there has been the demand to make the process itself as robust as possible for temperature variations. Indeed the way the module is set up can open or close the thermal process window for silicidation. In addition to the temperature, the ambient control is to be taken into account. Although gasses are specified to a low level of contaminants, the RTP step needs to be optimized for optimal contaminant reduction. Besides, the process wafer itself can be a source of contamination. In this paper an overview will be given of the role of temperature and ambient during RTP on the silicidation processes. The effect of the wafer on ambient purity will be highlighted. It will be shown that the latter can also have an impact on other process steps in the interconnect technology.

Materials for the 21st Century

2017 ◽  
Author(s):  
David Segal
Keyword(s):  
Solid State ◽  
21St Century ◽  
Historical Development ◽  
Synthetic Polymers ◽  
Solid State Lighting ◽  
Natural Polymers ◽  
Disruptive Technologies ◽  
Lighting Energy ◽  
Potential Use

The book is a general text that shows how materials can contribute to solving problems facing nations in the 21st century. It is illustrated with diverse applications and highlights the potential of existing materials for everyday life, healthcare and the economies of nations. There are 13 chapters and a glossary of 500 materials with their descriptions, historical development, their use or potential use and a range of references. Specific areas include synthetic polymers (e.g. nylon), natural polymers (e.g. proteins, cellulose) and the role of materials in the development of digital computers and in healthcare. Solid-state lighting, energy supplies in the 21st century, disruptive technologies and intellectual property, in particular patents, are discussed. The book concludes by asking how the 21st century will be characterised. Will it be the Silicon Age, Genomic Age or New Polymer Age, as examples?

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