Electrical properties of La2O3 thin films grown on TiN/Si substrates via atomic layer deposition
2006 ◽
Vol 252
(24)
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pp. 8506-8509
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Keyword(s):
2012 ◽
Vol 12
(7)
◽
pp. 5598-5603
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Enhanced Electrical Properties of SrTiO3 Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
2011 ◽
Vol 14
(10)
◽
pp. G45
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Keyword(s):
Keyword(s):
2007 ◽
Vol 7
(11)
◽
pp. 3758-3764
2008 ◽
Vol 155
(4)
◽
pp. H267
◽
Keyword(s):
2011 ◽
Vol 29
(1)
◽
pp. 01A302
◽
2016 ◽
Vol 51
(11)
◽
pp. 5082-5091
◽
Keyword(s):