Impact of germanium substrate orientation on morphological and structural properties of graphene grown by CVD method

ABSTRACTInfluence of processing condition on mechanical and structural properties of diamond-like carbon (DLC) by focused ion-beam chemical vapor deposition (FIB-CVD) method was investigated. The DLC specimens were produced under conditions of varying supplied amount of material gas and probe current of FIB. Volume determination results of DLC structures indicated that a deposition rate was increased with both the amount of gas and the probe current. To evaluation of mechanical property, indentation hardness was measured by a nano-indentation tester. From evaluation of mechanical property, it was found that the indentation hardness was sensitive to the processing condition, showing in the range of 8-13 GPa. The hardness of DLC structures was seemed to be lower when etching process higher contributed for formation process. Crystallographic structure of DLC remained amorphous even though the mechanical properties varied widely. Results of hydrogen concentration measurement indicated that increase of hydrogen concentration might lead to decrease of hardness.

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Magnetic and structural properties of Mn5+xGe3+y thin films as a function of substrate orientation

Journal of Magnetism and Magnetic Materials ◽

10.1016/j.jmmm.2021.168325 ◽

2021 ◽

pp. 168325

Author(s):

R.C. Oliveira ◽

D. Demaille ◽

N. Casaretto ◽

Y.J. Zheng ◽

M. Marangolo ◽

...

Keyword(s):

Thin Films ◽

Structural Properties ◽

Substrate Orientation

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Structural properties ofp+-type porous silicon layersversusthe substrate orientation: an X-ray diffraction comparative study

Journal of Applied Crystallography ◽

10.1107/s0021889899011103 ◽

1999 ◽

Vol 32 (6) ◽

pp. 1134-1144 ◽

Cited By ~ 12

Author(s):

C. Faivre ◽

D. Bellet

Keyword(s):

Porous Silicon ◽

Structural Properties ◽

Lattice Mismatch ◽

Thin Layers ◽

Interface Roughness ◽

X Ray Diffraction ◽

Scanning Calorimetry ◽

Substrate Orientation ◽

X Ray ◽

Calorimetry Data

The structural properties of (001)- and (111)-orientedp+-type porous silicon samples have been investigated using X-ray techniques. X-ray reflectivity applied to thin layers of both orientations allows the estimation of the layer thickness, the porosity and the interface roughness. High-resolution X-ray diffraction was used to obtain symmetrical and asymmetrical rocking curves, as well as maps of the reciprocal space. The lattice-mismatch parameter was measured and some indications about the pore shape, orientation and size were deduced. The obtained X-ray curves as well as differential scanning calorimetry data are compared to discuss the influence of the substrate orientation on the structural properties ofp+-type porous silicon material.

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