Spatial structure of plasma potential oscillation and ion saturation current in VHF multi-tile electrode plasma source

2011 ◽  
Vol 11 (5) ◽  
pp. S114-S116 ◽  
Author(s):  
Kevin Ryan ◽  
David O’Farrell ◽  
A.R. Ellingboe
Keyword(s):  
Spatial Structure ◽  
Plasma Source ◽  
Plasma Potential ◽  
Potential Oscillation ◽  
Saturation Current

scholarly journals Measurement of Plasma Potential, Ion Saturation Current and Mach number using Retarding Field Energy Analyzer

2021 ◽  
Vol 7 (2) ◽  
pp. 76-80
Author(s):  
L. N. Mishra ◽  
Å. Fredriksen
Keyword(s):  
Mach Number ◽  
Plasma Source ◽  
Diffusion Chamber ◽  
Plasma Potential ◽  
Field Energy ◽  
Saturation Current ◽  
Energy Analyzer ◽  
Temperature Plasma ◽  
Helicon Plasma ◽  
Side Walls

This article deals about the experimental measurement of plasma potential, ion saturation current and Mach number obtained with the variation of power, operating gas pressure and radial position using retarding field energy analyzer. We employed a retarding field energy analyzer by rotating with different angles such as 0° (facing toward source), 90° (facing side walls) and 180° (facing opposite the source). The coil current is varied from 0 to 15 A to produce the magnetic field which is used to confine the plasma. The flow of plasma has been characterized which was found to be subsonic. The low-temperature plasma is produced by means of a 13.56 MHz helicon plasma source at 300-1000 kW radio frequency power. The plasma is expanding from 13.8 cm diameter source into a 150 cm long diffusion chamber of 60 cm diameter.

scholarly journals Effect of the gas puff location on the divertor plasma properties in COMPASS tokamak

2020 ◽  
Vol 1492 (1) ◽  
pp. 012003
Author(s):  
M Dimitrova ◽  
M Tomes ◽  
Tsv Popov ◽  
R Dejarnac ◽  
J Stockel ◽  
...  
Keyword(s):  
Electron Temperature ◽  
Vacuum Chamber ◽  
Plasma Potential ◽  
Saturation Current ◽  
Langmuir Probes ◽  
Plasma Parameters ◽  
Plasma Properties ◽  
Low Field ◽  
Saturation Current Density ◽  
Deuterium Gas

Abstract Langmuir probes are used to study the plasma parameters in the divertor during deuterium gas puff injection on the high- (HFS) or low-field sides (LFS). The probe data were processed to evaluate the plasma potential and the electron temperatures and densities. A difference was found in the plasma parameters depending on the gas puff location. In the case of a gas puff on the LFS, the plasma parameters changed vastly, mainly in the inner divertor – the plasma potential, the ion saturation-current density and the electron temperature dropped. After the gas puff, the electron temperature changed from 10-15 eV down to within the 5-9 eV range. As a result, the parallel heat-flux density decreased. At the same time, in the outer divertor the plasma parameters remained the same. We thus concluded that using a gas puff on the LFS will facilitate reaching a detachment regime by increasing the density of puffed neutrals. When the deuterium gas puff was on the HFS, the plasma parameters in the divertor region remained almost the same before and during the puff. The electron temperature decreased with just few eV as a result of the increased amount of gas in the vacuum chamber.

scholarly journals Effect of permanent magnets on plasma confinement and ion beam properties in a double layer helicon plasma source

2019 ◽  
Vol 85 (3) ◽  
Author(s):  
Erik Varberg ◽  
Åshild Fredriksen
Keyword(s):  
Magnetic Field ◽  
Permanent Magnets ◽  
Ion Beam ◽  
Plasma Source ◽  
Diffusion Chamber ◽  
Plasma Potential ◽  
Field Energy ◽  
Plasma Confinement ◽  
Plasma Device ◽  
Field Lines

The work described in this article was carried out to investigate how permanent magnets (PM) affect the plasma confinement and ion beam properties in an inductively coupled plasma which expands from a helicon source. The cylindrical plasma device Njord has a 13 cm long and 20 cm wide stainless steel port connecting the source chamber and the diffusion chamber. The source chamber has an axial magnetic field produced by two coils, with magnetic field lines expanding into the diffusion chamber. Simulations have shown that the field lines leaving the edge of the source hit the port wall, causing a loss of electrons in this section. In the experiments performed in this work, PMs were added around the port walls near the exit of a plasma source and the effect was investigated experimentally by means of a retarding field energy analyser probe. The plasma potential, ion density and ion beam parameters were estimated, and the results with and without the PMs were compared. The results showed that the plasma density in the centre can in some cases be doubled, and the density at the edges of the plasma increased significantly with PMs in place. Although the plasma potential was slightly affected, and the beam velocity dropped by ${\sim}$ 10 %, the ion beam flux increased by a factor of 1.5.

scholarly journals Dynamics of bipolar HiPIMS discharges by plasma potential probe measurements

2022 ◽  
Author(s):  
Michal Zanáška ◽  
Daniel Lundin ◽  
Nils Brenning ◽  
Hao Du ◽  
Pavel Dvorak ◽  
...  
Keyword(s):  
Pulse Length ◽  
Plasma Potential ◽  
Ion Acceleration ◽  
Time Interval ◽  
Saturation Current ◽  
Target Region ◽  
Peak Current ◽  
Positive Pulse ◽  
Positive Voltage ◽  
Substrate Position

Abstract The plasma potential at a typical substrate position is studied during the positive pulse of a bipolar high-power impulse magnetron sputtering (bipolar HiPIMS) discharge with a Cu target. The goal of the study is to identify suitable conditions for achieving ion acceleration independent on substrate grounding. We find that the time-evolution of the plasma potential during the positive pulse can be separated into several distinct phases, which are highly dependent on the discharge conditions. This includes exploring the influence of the working gas pressure (0.3 – 2 Pa), HiPIMS peak current (10 – 70 A corresponding to 0.5 – 3.5 A/cm2), HiPIMS pulse length (5 – 60 μs) and the amplitude of the positive voltage U+ applied during the positive pulse (0 – 150 V). At low enough pressure, high enough HiPIMS peak current and long enough HiPIMS pulse length, the plasma potential at a typical substrate position is seen to be close to 0 V for a certain time interval (denoted phase B) during the positive pulse. At the same time, spatial mapping of the plasma potential inside the magnetic trap region revealed an elevated value of the plasma potential during phase B. These two plasma potential characteristics are identified as suitable for achieving ion acceleration in the target region. Moreover, by investigating the target current and ion saturation current at the chamber walls, we describe a simple theory linking the value of the plasma potential profile to the ratio of the available target electron current and ion saturation current at the wall.

scholarly journals Influence of an external circuit on the plasma parameters in the channel of the radio-frequency accelerator with a closed electron drift

2021 ◽  
pp. 24-30
Keyword(s):  
Direct Current ◽  
Plasma Source ◽  
Plasma Potential ◽  
Electron Drift ◽  
Axial Distribution ◽  
Plasma Parameters ◽  
Local Maxima ◽  
First Case ◽  
Temperature Of Electrons ◽  
Closed Electron

The axial distribution of the plasma potential, concentration and temperature of electrons in an RF capacitive plasma source with the geometry of an accelerator with a closed electron drift is experimentally investigated in this work. Two cases of the external electrical discharge circuit are considered. In the first case, the electrodes were closed by direct current, in the second, they were opened. It is shown that direct current closure of the electrodes leads to a significant increase in the plasma potential and electron concentration. In a number of cases, local maxima of temperature and plasma density are observed near the electrodes, which can be associated with the occurrence of azimuthal electron drift in crossed electric and magnetic fields.

scholarly journals LANGMUIR PROBE TO CHARACTERIZE THE DUST PLASMA OF ALUMINUM OXIDE (AL2O3) PRODUCED BY DC PLASMA SYSTEM

2021 ◽  
Vol 03 (04) ◽  
pp. 23-34
Author(s):  
Ala F. AHMED
Keyword(s):  
Aluminum Oxide ◽  
Vacuum Chamber ◽  
Plasma Potential ◽  
Discharge Voltage ◽  
Dust Particles ◽  
Saturation Current ◽  
Air Plasma ◽  
Plasma Region ◽  
Dc System ◽  
Plasma Characteristics

In this research, we have conducted an experimental study of the dusty plasma to the Aluminum oxide (Al2O3) dust material with a grain radius of (0.2) µm to (0.6) µm. In the experiment, we use air in the vacuum chamber system under different low pressure (0.1-0.8) Torr. The results have showed that the existence of dust particles in air plasma is equal to the Paschen minimum which is (0.4) Torr with Al2O3 dusty and without dust. The effect of Al2O3 dust particles on the plasma characteristics like floating potential (Vf), plasma potential (Vp), electron saturation current (Ies), temperature of the electron (Te), density of electron (ne) and density of ion (ni) of the DC system that can be calculated in the glow-discharge region. Parameter measurements are taken by four cylindrical probes which are diagnosed at a distance of (40) mm from the cathode diameter, the Paschen minimum at a pressure of (0.4) Torr. The plasma potential and the probe's floating voltage become more negative when dust is immersed in the plasma region. The features of these parameters show that the current discharge decreases while the discharge voltage increases when the aluminum oxide dust particles that are incorporated. And vice versa was in the absence of dust. Electron density increases in the existence of dust particles which causes the electron temperature to decrease.

Axial and radial development of the hot electron distribution in a helicon plasma source, measured by a retarding field energy analyzer (RFEA)

2022 ◽  
Author(s):  
Lisa Buschmann ◽  
Ashild Fredriksen
Keyword(s):  
Magnetic Field ◽  
Electron Distribution ◽  
Potential Drop ◽  
Plasma Source ◽  
High Energy ◽  
Plasma Potential ◽  
Field Configuration ◽  
Field Energy ◽  
Hot Electron ◽  
High Energy Tail

Abstract The information about the electron population of a helicon source plasma that expands along a magnetic nozzle is important for understanding the plasma acceleration across the potential drop that forms in the nozzle. The electrons need an energy higher than the potential drop to escape from the source. At these energies the signal of a Langmuir probe is less accurate. An inverted RFEA measures the high-energy tail of the electrons. To reach the probe, they must have energies above the plasma potential VP, which can vary over the region of the measurement. By constructing a full distribution by applying the electron temperature Te obtained from the electron IV-curve and the VP obtained from the ion collecting RFEA or an emissive probe, a density measure of the hot electron distribution independent of VP can be obtained. The variation of the high-energy tail of the EEDF in both radial and axial directions, in the two different cases of 1) a purely expanding magnetic field nozzle, and 2) a more constricted one by applying current in a third, downstream coil was investigated. The electron densities and temperatures from the source are then compared to two analytic models of the downstream development of the electron density. The first model considers the development for a pure Boltzmann distribution while the second model takes an additional magnetic field expansion into account. A good match between the measured densities and the second model was found for both configurations. The RFEA probe also allows for directional measurement of the electron current to the probe. This property is used to compare the densities from the downstream and upstream directions, showing a much lower contribution of downstream electrons into the source for a purely expanding magnetic field in comparison to the confined magnetic field configuration.

Electron hole and electron wave excitation in a plasma with transverse effects

1986 ◽  
Vol 36 (3) ◽  
pp. 453-463 ◽  
Author(s):  
Satoru Iizuka ◽  
Hiroshi Tanaca
Keyword(s):  
Plasma Source ◽  
Plasma Potential ◽  
Particle Model ◽  
Wave Excitation ◽  
Electron Wave ◽  
Qualitative Properties ◽  
Electron Hole ◽  
The Poisson Equation ◽  
Electron Holes ◽  
Good Agreement

Excitation of electron holes and electron wave pulses is investigated numerically in a single-ended plasma by computer simulation using a particle model. The transverse effects are taken into account by introducing the perpendicular wavenumber in the Poisson equation. Increase in the plasma potential in front of a plasma source, resulting from propagation of the rarefaction pulse from an end boundary, gives rise to the excitation of electron holes, while the rarefaction pulse reflects back as the compression pulse toward the boundary. The qualitative properties are in good agreement with experiment.

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