Numerical simulation of metallic film thickness distribution deposited by electron beam co-evaporation under vacuum

2005 ◽  
Vol 33 (1-3) ◽  
pp. 400-406 ◽  
Author(s):  
P. Aubreton ◽  
A. Bessaudou ◽  
C. Di Bin
Keyword(s):  
Numerical Simulation ◽  
Electron Beam ◽  
Film Thickness ◽  
Thickness Distribution ◽  
Metallic Film

scholarly journals Research on Distribution Properties of Coating Film Thickness from Air Spraying Gun-Based on Numerical Simulation

Coatings ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 721 ◽  
Author(s):  
Xiaopeng Xie ◽  
Yinan Wang
Keyword(s):  
Numerical Simulation ◽  
Flow Field ◽  
Film Thickness ◽  
Coating Thickness ◽  
Thickness Distribution ◽  
Air Pressure ◽  
Reasonable Assumption ◽  
Coating Film ◽  
Discrete Phase Model ◽  
Spraying Process

This work aims to study the influence of the spraying parameters on the spray flow field and coating thickness distribution during the air spraying process. The shaping air pressure and the target geometry have an important influence on the distribution of coating film thickness. This paper begins with a 3-D physical model of an air spray gun, in which unstructured grids were generated for control domain. A grid independency study was also carried out to determine the optimal number of cells for the simulations. Then the Euler–Lagrange method was used to describe the two-phase spray flow by establishing a paint deposition model. The numerical simulation based on the discrete phase model (DPM) and TAB model has been carried out. A reasonable assumption was proposed based on the analysis of the spraying process, so that the droplets were injected into the airflow at the position of the paint hole. The influence of the shaping air pressure on the air flow field and the coating thickness distribution was analyzed by changing the shaping air pressure. From the numerical simulation results, it can be concluded that the smaller the shaping air pressure, the more concentrated the coating. With increasing the shaping air pressure, the length of the coating film along z-axis gradually increases, the width along x-axis gradually decreases, and the spray area gradually increases. The paper ends with a numerical simulation and experimental study on planar vertical spraying, planar tilted spraying, and cylinder spraying. Comparisons and experiment results verify the validity and practicability of the model built in this paper.

The method of replication affects metal film granularity and resolution

1989 ◽  
Vol 47 ◽  
pp. 708-709
Author(s):  
George C. Ruben
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Film Thickness ◽  
Single Molecule ◽  
Metal Film ◽  
Vertical Surface ◽  
High Resolution Imaging ◽  
Controllable Factors ◽  
Resolution Imaging

Single molecule resolution in electron beam sensitive, uncoated, noncrystalline materials has been impossible except in thin Pt-C replicas ≤ 150Å) which are resistant to the electron beam destruction. Previously the granularity of metal film replicas limited their resolution to ≥ 20Å. This paper demonstrates that Pt-C film granularity and resolution are a function of the method of replication and other controllable factors. Low angle 20° rotary , 45° unidirectional and vertical 9.7±1 Å Pt-C films deposited on mica under the same conditions were compared in Fig. 1. Vertical replication had a 5A granularity (Fig. 1c), the highest resolution (table), and coated the whole surface. 45° replication had a 9Å granulartiy (Fig. 1b), a slightly poorer resolution (table) and did not coat the whole surface. 20° rotary replication was unsuitable for high resolution imaging with 20-25Å granularity (Fig. 1a) and resolution 2-3 times poorer (table). Resolution is defined here as the greatest distance for which the metal coat on two opposing faces just grow together, that is, two times the apparent film thickness on a single vertical surface.

scholarly journals Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution

Coatings ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 599
Author(s):  
Handan Huang ◽  
Li Jiang ◽  
Yiyun Yao ◽  
Zhong Zhang ◽  
Zhanshan Wang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Film Thickness ◽  
Multilayer Film ◽  
Thickness Distribution ◽  
Parabolic Cylinder ◽  
Particle Model ◽  
Planetary Motion ◽  
X Rays ◽  
X Ray ◽  
Sputtering System

The laterally graded multilayer collimator is a vital part of a high-precision diffractometer. It is applied as condensing reflectors to convert divergent X-rays from laboratory X-ray sources into a parallel beam. The thickness of the multilayer film varies with the angle of incidence to guarantee every position on the mirror satisfies the Bragg reflection. In principle, the accuracy of the parameters of the sputtering conditions is essential for achieving a reliable result. In this paper, we proposed a precise method for the fabrication of the laterally graded multilayer based on a planetary motion magnetron sputtering system for film thickness control. This method uses the fast and slow particle model to obtain the particle transport process, and then combines it with the planetary motion magnetron sputtering system to establish the film thickness distribution model. Moreover, the parameters of the sputtering conditions in the model are derived from experimental inversion to improve accuracy. The revolution and rotation of the substrate holder during the final deposition process are achieved by the speed curve calculated according to the model. Measurement results from the X-ray reflection test (XRR) show that the thickness error of the laterally graded multilayer film, coated on a parabolic cylinder Si substrate, is less than 1%, demonstrating the effectiveness of the optimized method for obtaining accurate film thickness distribution.

Numerical Simulation of the Effects of Preheating on Electron Beam Additive Manufactured Ti-6Al-4V Build Plate

2016 ◽  
Vol 879 ◽  
pp. 274-278 ◽  
Author(s):  
Jun Cao ◽  
Philip Nash
Keyword(s):  
Numerical Simulation ◽  
Residual Stress ◽  
Finite Element ◽  
Electron Beam ◽  
Cross Section ◽  
Element Model ◽  
Normal Direction ◽  
Thermal Residual Stresses ◽  
Longitudinal Residual Stress ◽  
Middle Cross Section

In an earlier study, a 3-D thermomechanical coupled finite element model was built and experimentally validated to investigate the evolution of the thermal residual stresses and distortions in electron beam additive manufactured Ti-6Al-4V build plates. In this study, an investigation using this robust and accurate model was focused on an efficient preheating method, in which the electron beam quickly scanned across the substrate to preheat the build plate prior to the deposition. Various preheat times, beam powers, scan rates, scanning paths and cooling times (between the end of current preheat scan/deposition layer and the beginning of the next preheat scan/deposition layer) were examined, and the maximum distortion along the centerline of the substrate and the maximum longitudinal residual stress along the normal direction on the middle cross-section of the build plate were quantitatively compared. The results show that increasing preheat times and beam powers could effectively reduce both distortion and residual stress for multiple layers/passes components.

NUMERICAL INVESTIGATION OF FILM DISTRIBUTION IN HORIZONTAL-TUBE FALLING FILM EVAPORATOR

2011 ◽  
Vol 19 (03) ◽  
pp. 177-183 ◽  
Author(s):  
JIN-BO CHEN ◽  
QING-GANG QIU
Keyword(s):  
Numerical Simulation ◽  
Fluid Flow ◽  
Film Thickness ◽  
Liquid Film ◽  
Numerical Investigation ◽  
Horizontal Tube ◽  
Flow Density ◽  
Falling Film ◽  
Film Distribution ◽  
Simulation Results

The technique of horizontal-tube falling film has been used in the cooling and heating industries such as refrigeration systems, heating systems and ocean thermal energy conversion systems. The comprehensive performance of evaporator is directly affected by the film distribution characteristics outside tubes. In this paper, numerical investigation was performed to predict the film characteristics outside the tubes in horizontal-tube falling film evaporator. The effects of liquid flow rate, tube diameter and the circular degree of tube on the film thickness were presented. The numerical simulation results were compared with that of the empirical equations for calculating the falling film thickness, and agreements between them were reasonable. Numerical simulation results show that, at the fixed fluid flow density, the liquid film is thicker on the upper and lower tube and the thinnest liquid film appears at angle of about 120°. The results also indicate that, when the fluid flow density decreases to a certain value, the local dryout spot on the surface of the tube would occur. In addition, the film thickness decreases with the increases of the tube diameter at the fixed fluid flow density.

An Accurate Solution of the Gas Lubricated, Flat Sector Thrust Bearing

1977 ◽  
Vol 99 (1) ◽  
pp. 82-88 ◽  
Author(s):  
I. Etsion ◽  
D. P. Fleming
Keyword(s):  
Film Thickness ◽  
Thrust Bearing ◽  
Load Capacity ◽  
Thickness Distribution ◽  
Maximum Load ◽  
Accurate Solution ◽  
Operating Conditions ◽  
Thrust Bearings ◽  
Practical Design ◽  
Minimum Film Thickness

A flat sector shaped pad geometry for gas lubricated thrust bearings is analyzed considering both pitch and roll angles of the pad and the true film thickness distribution. Maximum load capacity is achieved when the pad is tilted so as to create a uniform minimum film thickness along the pad trailing edge. Performance characteristics for various geometries and operating conditions of gas thrust bearings are presented in the form of design curves. A comparison is made with the rectangular slider approximation. It is found that this approximation is unsafe for practical design, since it always overestimates load capacity.

scholarly journals The Effects of Artificially-Produced Defects on the Film Thickness Distribution in Sliding EHD Point Contacts

1982 ◽  
Vol 104 (3) ◽  
pp. 365-375 ◽  
Author(s):  
C. Cusano ◽  
L. D. Wedeven
Keyword(s):  
Film Thickness ◽  
Contact Region ◽  
Thickness Distribution ◽  
Point Contact ◽  
Optical Interferometry ◽  
Point Contacts ◽  
Thickness Profile ◽  
Inlet Region

The effects of artificially-produced dents and grooves on the elastohydrodynamic (EHD) film thickness profile in a sliding point contact are investigated by means of optical interferometry. The defects, formed on the surface of a highly polished ball, are held stationary at various locations within and in the vicinity of the contact region while the disk is rotating. It is shown that the defects, having a geometry similar to what can be expected in practice, can dramatically change the film thickness which exists when no defects are present in or near the contact. This change in film thickness is mainly a function of the position of the defects in the inlet region, the geometry of the defects, the orientation of the defects in the case of grooves, and the depth of the defect relative to the central film thickness.

Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures

1990 ◽  
Vol 67 (11) ◽  
pp. 7050-7058 ◽  
Author(s):  
Z. Meglicki ◽  
R. J. Sumich ◽  
L. Faraone ◽  
A. G. Nassibian
Keyword(s):  
Numerical Simulation ◽  
Electron Beam ◽  
Semiconductor Structures ◽  
Temperature Distributions
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