Optimizing the gas sensing characteristics of Co-doped SnO2 thin film based hydrogen sensor

2019 ◽  
Vol 785 ◽  
pp. 819-825 ◽  
Author(s):  
Zili Zhang ◽  
Chenbo Yin ◽  
Liu Yang ◽  
Jin Jiang ◽  
Yu Guo
2002 ◽  
Vol 81 (2-3) ◽  
pp. 176-181 ◽  
Author(s):  
Chang-Hyun Shim ◽  
Dae-Sik Lee ◽  
Sook-I Hwang ◽  
Myoung-Bok Lee ◽  
Jeung-Soo Huh ◽  
...  

2021 ◽  
pp. 8-18
Author(s):  
M. S. Aleksanyan ◽  
V. M. Aroutiounian ◽  
G. E. Shahnazaryan ◽  
A. G. Sayunts

A technology was developed for manufacturing solid-state semiconductor sensor sensitive to hydrogen peroxide vapors. Gas sensitive nanostructured films made of doped metal oxide SnO2<Co> were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2<Co> targets was analyzed and the thickness of the deposited doped metal oxide film was measured. The morphology of the deposited Co-doped SnO2 film was studied by scanning electron microscopy. The gas sensing characteristics to the different concentrations of hydrogen peroxide vapors at various operating temperatures were also studied. The Co-doped SnO2 sensor showed enough sensitivity to very low concentration of hydrogen peroxide vapors (875 ppb) at the operating temperature of 100 °C. The SnO2<Co> based sensor can be successfully used in medical diagnostic apparatus for determining low concentration of hydrogen peroxide vapors in exhaled air.


2014 ◽  
Vol 2014 ◽  
pp. 1-4 ◽  
Author(s):  
Ayushi Paliwal ◽  
Anjali Sharma ◽  
Monika Tomar ◽  
Vinay Gupta

Focus has been made on the determination of dielectric constant of thin dielectric layer (SnO2 thin film) using surface plasmon resonance (SPR) technique and exploiting it for the detection of NH3 gas. SnO2 thin film has been deposited by rf-sputtering technique on gold coated glass prism (BK-7) and its SPR response was measured in the Kretschmann configuration of attenuated total reflection using a p-polarised light beam at 633 nm wavelength. The SPR response of bilayer film was fitted with Fresnel’s equations in order to calculate the dielectric constant of SnO2 thin film. The air/SnO2/Au/prim system has been utilized for detecting varying concentration (500 ppm to 2000 ppm) of NH3 gas at room temperature using SPR technique. SPR curve shows significant shift in resonance angle from 44.8° to 56.7° on exposure of fixed concentration of NH3 gas (500 ppm to 2000 ppm) with very fast response and recovery speeds.


1999 ◽  
Vol 146 (9) ◽  
pp. 3536-3537 ◽  
Author(s):  
P. H. Wei ◽  
G. B. Li ◽  
S. Y. Zhao ◽  
L. R. Chen

2019 ◽  
Vol 288 ◽  
pp. 625-633 ◽  
Author(s):  
Hwan-Seok Jeong ◽  
Min-Jae Park ◽  
Soo-Hun Kwon ◽  
Hyo-Jun Joo ◽  
Hyuck-In Kwon

YMER Digital ◽  
2021 ◽  
Vol 20 (12) ◽  
pp. 504-509
Author(s):  
C. K Nanhey ◽  
◽  
M. K Bhanarkar ◽  
B. M. Sargar ◽  
◽  
...  

Since many years, metal oxide semiconductor has paid too much interest as a gas sensing material by researchers because of wide performance. TiO2 is one of the majority crucial metal oxide which produced better performance in thin film development. Advanced spray pyrolysis system was used to develop thin film. The gas sensing characteristics TiO2 films are evaluated with responses. The gas sensing response, electrical characterization and sensitivity are corporate.


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