Failure mechanisms of PVD Ta and ALD TaN barrier layers for Cu contact applications
2007 ◽
Vol 84
(11)
◽
pp. 2669-2674
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1986 ◽
Vol 44
◽
pp. 732-733
Keyword(s):
1993 ◽
Vol 51
◽
pp. 892-893
2018 ◽
Vol 5
(4)
◽
pp. 186-199
Keyword(s):
Keyword(s):
Keyword(s):