2000 ◽
Vol 66
(6)
◽
pp. 907-911
Yuzo MORI
◽
Hiroaki KAKIUCHI
◽
Kumayasu YOSHII
◽
Kiyoshi YASUTAKE
2004 ◽
Vol 70
(8)
◽
pp. 1075-1079
Hiroaki KAKIUCHI
◽
Hiromasa OHMI
◽
Koichi NAKAZAWA
◽
Kiyoshi YASUTAKE
◽
Kumayasu YOSHII
◽
...
2006 ◽
Vol 496
(2)
◽
pp. 259-265
◽
H. Kakiuchi
◽
H. Ohmi
◽
M. Aketa
◽
K. Yasutake
◽
K. Yoshii
◽
...
Yuzo Mori
◽
Hiroaki Kakiuchi
◽
Kumayasu Yoshii
◽
Kiyoshi Yasutake
2000 ◽
Vol 71
(8)
◽
pp. 3173-3177
◽
Y. Mori
◽
K. Yoshii
◽
H. Kakiuchi
◽
K. Yasutake
2006 ◽
Vol 45
(10B)
◽
pp. 8381-8387
◽
Hiroaki Kakiuchi
◽
Hiromasa Ohmi
◽
Ryota Nakamura
◽
Masatoshi Aketa
◽
Kiyoshi Yasutake
2005 ◽
Vol 479
(1-2)
◽
pp. 17-23
◽
H. Kakiuchi
◽
Y. Nakahama
◽
H. Ohmi
◽
K. Yasutake
◽
K. Yoshii
◽
...
1999 ◽
Vol 65
(11)
◽
pp. 1600-1604
◽
Yuzo MORI
◽
Kumayasu YOSHII
◽
Kiyoshi YASUTAKE
◽
Hiroaki KAKIUCHI
◽
Seiichi KIYAMA
◽
...
2000 ◽
Vol 66
(10)
◽
pp. 1636-1640
Yuzo MORI
◽
Kumayasu YOSHII
◽
Kiyoshi YASUTAKE
◽
Motohiro NAKANO
◽
Hiroaki KAKIUCHI
◽
...
2003 ◽
Vol 444
(1-2)
◽
pp. 138-145
◽
Y. Mori
◽
K. Yoshii
◽
K. Yasutake
◽
H. Kakiuchi
◽
H. Ohmi
◽
...
1999 ◽
Vol 8
(10)
◽
pp. 1863-1874
◽
J.M. Larson
◽
M.T. Swihart
◽
S.L. Girshick
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High-Rate Deposition of Amorphous SiC Films by Atmospheric Pressure Plasma Chemical Vapor Deposition. (1st Report). Examination of Deposition Rate and Film Structure.
