Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films

AbstractFuture interlayer dielectric (ILD) requirements necessitate reductions in dielectric constant to 2.1 within four years. Due to gaseous-like transport properties and near liquid-like densities, supercritical methods have been developed to dry and strip resist from these highly porous materials. Although a non-polar molecule, the solvating capability of supercritical CO2 (SCCO2) can be tailored by varying pressure, temperature, and co-solvents. This flexibility has been employed to remove photoresist and moisture from porous low-k films. The results of these experiments have been characterized using FTIR, ellipsometry, and SEM.

Download Full-text

Quantitative and qualitative characterization of mango kernel seed oil extracted using supercritical CO2 and solvent extraction techniques

Heliyon ◽

10.1016/j.heliyon.2019.e03068 ◽

2019 ◽

Vol 5 (12) ◽

pp. e03068 ◽

Cited By ~ 4

Author(s):

Olugbenga Olufemi Awolu ◽

Balaraman Manohar

Keyword(s):

Solvent Extraction ◽

Supercritical Co2 ◽

Seed Oil ◽

Extraction Techniques ◽

Mango Kernel

Download Full-text

Ions and Aggregates of Tetra-n-butylammonium Picrate in Nonaqueous Solvents at 25 °C: A Solvent Extraction Study

Canadian Journal of Chemistry ◽

10.1139/v71-280 ◽

1971 ◽

Vol 49 (10) ◽

pp. 1726-1735 ◽

Cited By ~ 7

Author(s):

Saul Goldman ◽

G. C. B. Cave

Keyword(s):

Dielectric Constant ◽

Solvent Extraction ◽

Organic Phase ◽

Extraction Method ◽

Nonaqueous Solvents ◽

Extraction Study ◽

Solvent Extraction Method

The values of ΔG0 at 25 °C were determined for the ionization, dimerization, and trimerization of tetra-n-butylammonium picrate (1) in benzene, chlorobenzene, and o-dichlorobenzene by a solvent extraction method. Corrections were applied for the presence of hydrates in the organic phase, in order to report ΔG0 values for the anhydrous solvents. In chlorobenzene, hexamers of 1 were also indicated in measurable concentrations. The various values of ΔG0 are related in a simple way to the bulk dielectric constant of the solvent.

Download Full-text

The solvent extraction of Fe(III) from acidic chloride solutions by open cell polyurethane foam sponge (OCPUFS)

Canadian Journal of Chemistry ◽

10.1139/v79-326 ◽

1979 ◽

Vol 57 (15) ◽

pp. 2032-2036 ◽

Cited By ~ 21

Author(s):

J. J. Oren ◽

K. M. Gough ◽

H. D. Gesser

Keyword(s):

Dielectric Constant ◽

Solvent Extraction ◽

Distribution Coefficient ◽

Polyurethane Foam ◽

Aqueous Phase ◽

Acid Chloride ◽

Iron Concentration ◽

Metal Distribution ◽

Open Cell ◽

Acidic Chloride

The extraction of Fe(III) by open cell polyurethane foam sponge was studied as a function of acid, chloride, and iron concentration in the aqueous phase. The results indicate a mixed extraction of FeCl3 and HFeCl4. The results also show a dependence of the metal distribution coefficient on [Fe(III)]aq and indicate a dissociation (in the foam) of the extracted HFeCl4 species. The solid polyurethane is equated to a liquid extractant of a moderate dielectric constant.

Download Full-text