High-Speed Atomic Force Microscope Technology：A Review

: The atomic force microscope (AFM) is widely used in many fields such as biology, materials, and physics due to its advantages of simple sample preparation, high-resolution topography measurement and wide range of applications. However, the low scanning speed of traditional AFM limits its dynamics process monitoring and other further application. Therefore, the improvement of AFM scanning speed has become more and more important. In this review, the working principle of AFM is first proposed. Then, we introduce the improvements of cantilever, drive mechanism, and control method of the high-speed atomic force microscope (HS-AFM). Finally, we provide the next developments of HS-AFM.

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Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

Ultramicroscopy ◽

10.1016/j.ultramic.2015.10.016 ◽

2016 ◽

Vol 160 ◽

pp. 213-224 ◽

Cited By ~ 12

Author(s):

I. Soltani Bozchalooi ◽

A. Careaga Houck ◽

J.M. AlGhamdi ◽

K. Youcef-Toumi

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Large Range ◽

High Speed Imaging ◽

Atomic Force ◽

And Control

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High-Resolution and High-Speed Atomic Force Microscope Imaging

Methods in Molecular Biology - Nanoscale Imaging ◽

10.1007/978-1-4939-8591-3_11 ◽

2018 ◽

pp. 181-200 ◽

Cited By ~ 4

Author(s):

Francesca Zuttion ◽

Lorena Redondo-Morata ◽

Arin Marchesi ◽

Ignacio Casuso

Keyword(s):

High Resolution ◽

Atomic Force Microscope ◽

High Speed ◽

Atomic Force ◽

Microscope Imaging

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High-Resolution Imaging of Myosin Motor in Action by a High-Speed Atomic Force Microscope

Advances in Experimental Medicine and Biology - Molecular and Cellular Aspects of Muscle Contraction ◽

10.1007/978-1-4419-9029-7_11 ◽

2003 ◽

pp. 119-127 ◽

Cited By ~ 16

Author(s):

Noriyuki Kodera ◽

Tatsuya Kinoshita ◽

Takahiro Ito ◽

Toshio Ando

Keyword(s):

High Resolution ◽

Atomic Force Microscope ◽

High Speed ◽

High Resolution Imaging ◽

Myosin Motor ◽

Atomic Force ◽

Resolution Imaging

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Development, analysis and control of a high-speed laser-free atomic force microscope

Review of Scientific Instruments ◽

10.1063/1.3302553 ◽

2010 ◽

Vol 81 (2) ◽

pp. 023707 ◽

Cited By ~ 7

Author(s):

Saeid Bashash ◽

Reza Saeidpourazar ◽

Nader Jalili

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Atomic Force ◽

Development Analysis ◽

And Control

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Electrical Probing and Surface Imaging of Deep Sub-Micron Integrated Circuits

ISTFA 1999: Conference Proceedings from the 25th International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa1999p0039 ◽

1999 ◽

Author(s):

Kenneth Krieg ◽

Richard Qi ◽

Douglas Thomson ◽

Greg Bridges

Keyword(s):

High Resolution ◽

Integrated Circuits ◽

Real Time ◽

High Speed ◽

Time Signal ◽

Surface Imaging ◽

Atomic Force ◽

Submicron Structures ◽

High Resolution Images ◽

Capacitive Loading

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.

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Faculty Opinions recommendation of A high-speed atomic force microscope for studying biological macromolecules.

Faculty Opinions – Post-Publication Peer Review of the Biomedical Literature ◽

10.3410/f.1002373.16711 ◽

2001 ◽

Author(s):

Jane Clarke

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Biological Macromolecules ◽

Atomic Force

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Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction

International Journal of Precision Engineering and Manufacturing ◽

10.1007/s12541-021-00561-7 ◽

2021 ◽

Author(s):

Janik Schaude ◽

Maxim Fimushkin ◽

Tino Hausotte

Keyword(s):

Atomic Force Microscope ◽

Piezoelectric Actuator ◽

High Speed ◽

Closed Loop ◽

Coefficient Of Thermal Expansion ◽

Measuring System ◽

Contact Mode ◽

Loop Control ◽

Atomic Force ◽

Measuring Machine

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.

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Design and Fabrication of a High-Speed Atomic Force Microscope Scan-Head

Sensors ◽

10.3390/s21020362 ◽

2021 ◽

Vol 21 (2) ◽

pp. 362

Author(s):

Luke Oduor Otieno ◽

Bernard Ouma Alunda ◽

Jaehyun Kim ◽

Yong Joong Lee

Keyword(s):

Atomic Force Microscope ◽

Natural Frequency ◽

High Speed ◽

Contact Mode ◽

Ongoing Process ◽

Atomic Force ◽

Constant Height ◽

Mode Tracking

A high-speed atomic force microscope (HS-AFM) requires a specialized set of hardware and software and therefore improving video-rate HS-AFMs for general applications is an ongoing process. To improve the imaging rate of an AFM, all components have to be carefully redesigned since the slowest component determines the overall bandwidth of the instrument. In this work, we present a design of a compact HS-AFM scan-head featuring minimal loading on the Z-scanner. Using a custom-programmed controller and a high-speed lateral scanner, we demonstrate its working by obtaining topographic images of Blu-ray disk data tracks in contact- and tapping-modes. Images acquired using a contact-mode cantilever with a natural frequency of 60 kHz in constant deflection mode show good tracking of topography at 400 Hz. In constant height mode, tracking of topography is demonstrated at rates up to 1.9 kHz for the scan size of 1μm×1μm with 100×100 pixels.

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