Nonlinear increase in silicon epitaxial growth rate in a SiHCl3H2 system under atmospheric pressure
1997 ◽
Vol 182
(3-4)
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pp. 352-362
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2012 ◽
Vol 717-720
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pp. 97-100
Keyword(s):
1999 ◽
Vol 09
(PR8)
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pp. Pr8-221-Pr8-228
1988 ◽
Vol 53
(12)
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pp. 2995-3013
Keyword(s):
Keyword(s):
2012 ◽
Vol 717-720
◽
pp. 105-108
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1990 ◽
Vol 21
(5)
◽
pp. 29-39
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2020 ◽
Vol 16
(4)
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pp. 385-395
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