Development of 4H–SiC Epitaxial Growth Technique Achieving High Growth Rate and Large-Area Uniformity
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2008 ◽
Vol 600-603
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pp. 111-114
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Keyword(s):
2000 ◽
Vol 9
(9-10)
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pp. 1673-1677
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2016 ◽
Vol 858
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pp. 173-176
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2007 ◽
Vol 556-557
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pp. 157-160
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Keyword(s):
2011 ◽
Vol 316
(1)
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pp. 60-66
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2017 ◽
Vol 897
◽
pp. 43-46
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