Improving the wire bonding process quality using statistically designed experiments

1999 ◽  
Vol 30 (2) ◽  
pp. 161-168 ◽  
Author(s):  
Jiju Antony
2019 ◽  
Vol 36 (1) ◽  
pp. 47-54
Author(s):  
C. C. Yang ◽  
Y. F. Su ◽  
Steven Y. Liang ◽  
K. N. Chiang

ABSTRACTThermosonic wire bonding is a common fabrication process for connecting devices in electronic packaging. However, when the free air ball (FAB) is compressed onto the I/O pad of the chip during bonding procedure, chip cracking may occur if the contact pressure is too large. This study proposes an effective simulation technique that can predict the wire ball geometry after bonding in an accurate range. The contact force obtained in the simulation can be used for possible die cracking behavior evaluation. The simulation in this study used the explicit time integration scheme to deal with the time marching problem, and the second-order precision arbitrary Lagrangian-Eulerian (ALE) algorithm was used to deal with the large deformation of the wire ball during the bonding process. In addition, the equilibrium smoothing algorithm in LS-DYNA can make the contact behavior and geometry of the bonding wire almost the same as the experiment, which can also significantly reduce the distortion of the mesh geometry after remeshing.


1994 ◽  
Vol 116 (1) ◽  
pp. 44-48 ◽  
Author(s):  
M. A. Jog ◽  
I. M. Cohen ◽  
P. S. Ayyaswamy

We have analyzed an electric discharge between wire and planar electrodes with wire diameter and current densities that are typically used in upscaled experimental simulations of the wire bonding process employed in microelectronic manufacturing. A set of continuum conservation equations has been solved to obtain the variation of electric potential, temperature distributions, and the electrode heat fluxes. Results indicate that the main body of the discharge is quasineutral bounded by space charge sheaths at both electrodes. Strong electric fields are concentrated in the electrode sheaths. The heat flux to the wire is sharply peaked near the wire tip but on the plane it decays slowly away from the discharge axis. The model studied here may be used to establish optimum discharge parameters for wire bonding.


2014 ◽  
Vol 609-610 ◽  
pp. 1153-1158
Author(s):  
Dong Rui Wang ◽  
Mei Liu

The wire bonding process in the package of MEMS accelerometer is analyzed by the finite element software ANSYS/LS-DYNA. Impact on the bonding strength of the ultrasonic amplitude, ultrasonic frequency and the friction between wire bond and bond pad are studied. The strength of wire bond is evaluated through the bond pull test experiment. The test result shows that the analysis on the wire bonding is helpful for improving the quality of wire bonding.


Author(s):  
Valentina Korchnoy

Abstract Bond-pad integrity directly affects the performance of microelectronic devices. Bond-pad cracking and the related sub-pad cracking of Inter-Metal Dielectric (IMD) may introduce a high reliability risk and cause units to fail at environmental stress. Bond-pad cracks may be initiated by probing during wafer sort and the wire bonding process during assembly. This paper presents a comparative analysis of the various chemistries used for exposure and decoration of pad cracks. The investigation showed that a tri-iodine etch provides clean and artifact-free exposure of the TiN barrier layer of the pad and is the best (of the methods tried herein) for pad crack observation.


1993 ◽  
Vol 20 (8) ◽  
pp. 879-888 ◽  
Author(s):  
Qiwen Wang ◽  
Xiaoyun Sun ◽  
Bruce L. Golden ◽  
Lenore Desilets ◽  
Edward A. wasil ◽  
...  

1994 ◽  
Vol 116 (3) ◽  
pp. 212-219 ◽  
Author(s):  
Wei Qin ◽  
Ira M. Cohen ◽  
P. S. Ayyaswamy

In the latest generation of wire bonders, the cycle is so short that the wand electrode is kept stationary and the electronic flame off (EFO) discharge is from the side of the wire. This is the discharge that heats and melts the wire causing roll up into a ball that is pressed down onto the chip to form a ball bond. The balls must be perfectly formed with defects in the few ppm range. In the first part of the paper, the fixed, conically shaped side wand and the improved ring wand design are studied by considering the electrostatic field before the breakdown. In the second part of the paper, discharge development starting from the initial electrostatic field between a wire and a ring wand up to the breakdown, and ionization growth in the gap between the electrodes are both examined by numerical simulations. In the computations, the conservation equations for ions and electrons and Poisson’s equation have been employed for the self-consistent electric field. Based on sensitivity to wire length and wire deflection, the results show that the ring wand is a better design than the conical side wand electrode for ball formation and wire bonding. Also, positive wire polarity is preferred over negative wire polarity.


2014 ◽  
Vol 82 (2) ◽  
pp. 100-103 ◽  
Author(s):  
Keisuke OZAKI ◽  
Toshiki KUROSU ◽  
Jin ONUKI

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