Fully depleted SOI CMOS technology for heterogeneous micropower, high-temperature or RF microsystems

2001 ◽  
Vol 45 (4) ◽  
pp. 541-549 ◽  
Author(s):  
D Flandre ◽  
S Adriaensen ◽  
A Akheyar ◽  
A Crahay ◽  
L Demeûs ◽  
...  
1997 ◽  
Vol 46 (1-3) ◽  
pp. 1-7 ◽  
Author(s):  
B. Gentinne ◽  
J.-P. Eggermont ◽  
D. Flandre ◽  
J.-P. Colinge

Author(s):  
Florent Torres ◽  
Eric Kerhervé ◽  
Andreia Cathelin ◽  
Magali De Matos

Abstract This paper presents a 31 GHz integrated power amplifier (PA) in 28 nm Fully Depleted Silicon-On-Insulator Complementary Metal Oxide Semiconductor (FD-SOI CMOS) technology and targeting SoC implementation for 5 G applications. Fine-grain wide range power control with more than 10 dB tuning range is enabled by body biasing feature while the design improves voltage standing wave ratio (VSWR) robustness, stability and reverse isolation by using optimized 90° hybrid couplers and capacitive neutralization on both stages. Maximum power gain of 32.6 dB, PAEmax of 25.5% and Psat of 17.9 dBm are measured while robustness to industrial temperature range and process spread is demonstrated. Temperature-induced performance variation compensation, as well as amplitude-to-phase modulation (AM-PM) optimization regarding output power back-off, are achieved through body-bias node. This PA exhibits an International Technology Roadmap for Semiconductors figure of merit (ITRS FOM) of 26 925, the highest reported around 30 GHz to authors' knowledge.


2003 ◽  
Vol 24 (4) ◽  
pp. 251-253 ◽  
Author(s):  
Sang Lam ◽  
Hui Wan ◽  
Pin Su ◽  
P.W. Wyatt ◽  
C.L. Chen ◽  
...  

2010 ◽  
Vol 41 (9) ◽  
pp. 540-546 ◽  
Author(s):  
S. Santra ◽  
F. Udrea ◽  
P.K. Guha ◽  
S.Z. Ali ◽  
I. Haneef

2012 ◽  
Vol 2012 (HITEC) ◽  
pp. 000227-000232
Author(s):  
K. Grella ◽  
S. Dreiner ◽  
A. Schmidt ◽  
W. Heiermann ◽  
H. Kappert ◽  
...  

Standard Bulk-CMOS-technology targets use-temperatures of not more than 175 °C. Silicon-on-Insulator-technologies are commonly used up to 250 °C. In this work we evaluate the limit for electronic circuit function realized in thin film SOI-technologies for even higher temperatures. At Fraunhofer IMS a versatile 1.0 μm SOI-CMOS process based on 200 mm wafers is available. It features three layers of tungsten metalization with excellent reliability concerning electromigration, voltage independent capacitors, various resistors, and single-poly-EEPROMs. We present a study of the temperature dependence of MOSFETs and basic circuits produced in this process. The electrical characteristics of NMOSFET- and PMOSFET-transistors were studied up to 450 °C. In a second step we investigated the functionality of ring oscillators, representing digital circuits, and bandgap references as examples of simple analog components. The frequency and the current consumption of ring oscillators and the output voltage of bandgap references were also characterized up to 450 °C. We found that the ring oscillator still functions at this high temperature with a frequency of about one third of the value at room temperature. The output voltage of the bandgap reference is in the specified range up to 250 °C. The deviations above this temperature are analyzed and measures to improve the circuit are discussed. The acquired data provide an important foundation to extend the application of CMOS-technology to its real maximum temperature limits.


Author(s):  
Konstantin O. Petrosyants ◽  
Sergey V. Lebedev ◽  
Lev M. Sambursky ◽  
Veniamin G. Stakhin ◽  
Igor A. Kharitonov ◽  
...  

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