Model for metal interconnection design rule optimization

Abstract This paper presents the problems, the solutions, and the development state of the novel 0.18 μm Cu Metal Process through failure analysis of the Alpha CPU under development at Samsung Electronics. The presented problems include : “Via Bottom Lifting” induced by the Cu Via void, “Via Bottom dissociation” due to the IMD stress, “Via side dissociation” due to the poor formation of the Barrier Metal, “Via short/not-open failure” due to the IMD lifting, and Cu metal Corrosion/Loss. The analysis was carried out on the Via Contact Test Chain Patterns, using the “Electron (ION) Charge Up” method. After carefully analyzing each of the failure types, process improvement efforts followed. As a result, the pass rate of the via contact Rc was brought up from a mere 20% to 95%, and the device speed higher than 1.1 GHz was achieved, which surpasses the target speed of 1 GHz.

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РАЗРАБОТКА ПРОТОТИПА ПРОГРАММНОГО МОДУЛЯ АВТОМАТИЗИРОВАННОЙ ГЕНЕРАЦИИ КВАЛИФИКАЦИОННЫХ ЯЧЕЕК ДЛЯ КОНТРОЛЯ ПРАВИЛ ПРОЕКТИРОВАНИЯ ИС

Nanoindustry Russia ◽

10.22184/1993-8578.2020.13.3s.721.725 ◽

2020 ◽

Vol 96 (3s) ◽

pp. 721-725

Author(s):

Ф.С. Золотухин ◽

А.С. Надин ◽

И.Е. Трифанихина

Keyword(s):

Industrial Design ◽

Automated Design ◽

Design Rule ◽

Software Module ◽

The Real ◽

Rule Checking ◽

Design Rule Checking

Разработан прототип программного модуля генератора квалификационных ячеек для автоматизированного контроля геометрических правил проектирования DRC. Проведено тестирование прототипа генератора в реальных рабочих условиях проектирования. The paper presents a prototype of software module of the QA-cells Generator for automated Design Rule Checking. The QA-Cells Generator has been tested in the real workplace within actual microelectronic industrial design.

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Scattering Analysis and Efficiency Optimization of Dielectric Pancharatnam–Berry-Phase Metasurfaces

Nanomaterials ◽

10.3390/nano11030586 ◽

2021 ◽

Vol 11 (3) ◽

pp. 586

Author(s):

Chen-Yi Yu ◽

Qiu-Chun Zeng ◽

Chih-Jen Yu ◽

Chien-Yuan Han ◽

Chih-Ming Wang

Keyword(s):

Phase Modulation ◽

Rotation Angle ◽

Berry Phase ◽

Fine Tuning ◽

Design Rule ◽

Polarization Conversion ◽

Swarm Optimization ◽

Efficiency Optimization ◽

Phase Type ◽

Gradient Phase

In this study, the phase modulation ability of a dielectric Pancharatnam–Berry (PB) phase metasurface, consisting of nanofins, is theoretically analyzed. It is generally considered that the optical thickness of the unit cell of a PB-phase metasurface is λ/2, i.e., a half-waveplate for polarization conversion. It is found that the λ/2 is not essential for achieving a full 2π modulation. Nevertheless, a λ/2 thickness is still needed for a high polarization conversion efficiency. Moreover, a gradient phase metasurface is designed. With the help of the particle swarm optimization (PSO) method, the wavefront errors of the gradient phase metasurface are reduced by fine-tuning the rotation angle of the nanofins. The diffraction efficiency of the gradient phase metasurface is thus improved from 73.4% to 87.3%. This design rule can be utilized to optimize the efficiency of phase-type meta-devices, such as meta-deflectors and metalenses.

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