Thin Film Surface Morphology Visibility (Double Sources of Secondaries)

Author(s):  
J. Temple Black

The continued development of commercial STEM systems in the next few years will have a dramatic impact on all aspects of electron microscopy, particularly as the resolution improves. The STEM system offers us the opportunity for direct computer analysis of image signals of all types, wherein signals produced by characteristic X-rays, photons, electrons will be used in a variety of mixes to produce micrographs of thin films. For example, because larger areas and thicker films can be examined in STEM systems compared to CTEM scopes, it will be commonplace to examine sections of thickness cut for OLM transmission work in the STEM. It will also become increasingly important to produce micrographs of matched internal and external structure; that is, internal structure examined by STEM signals and external structure via SEM topographical signals (secondary and backscatter emission). The examination of thin films in the SEM mode however presents some difficulties in that the depth of penetration of the primary beam is a function of the accelerating 1 voltage (roughly according to where k' and n depend on the material).

10.14311/1767 ◽  
2013 ◽  
Vol 53 (2) ◽  
Author(s):  
Jan Píchal ◽  
Julia Klenko

Thin film technology has become pervasive in many applications in recent years, but it remains difficult to select the best deposition technique. A further consideration is that, due to ecological demands, we are forced to search for environmentally benign methods. One such method might be the application of cold plasmas, and there has already been a rapid growth in studies of cold plasma techniques. Plasma technologies operating at atmospheric pressure have been attracting increasing attention. The easiest way to obtain low temperature plasma at atmospheric pressure seems to be through atmospheric dielectric barrier discharge (ADBD). We used the plasma enhanced chemical vapour deposition (PECVD) method applying atmospheric dielectric barrier discharge (ADBD) plasmafor TiOx thin films deposition, employing titanium isopropoxide (TTIP) and oxygen as reactants, and argon as a working gas. ADBD was operated in filamentary mode. The films were deposited on glass. We studied the quality of the deposited TiOx thin film surface for various precursor gas inlet positions in the ADBD reactor. The best thin films quality was achieved when the precursor gases were brought close to the substrate surface directly through the inlet placed in one of the electrodes.High hydrophilicity of the samples was proved by contact angle tests (CA). The film morphology was tested by atomic force microscopy (AFM). The thickness of the thin films varied in the range of (80 ÷ 210) nm in dependence on the composition of the reactor atmosphere. XPS analyses indicate that composition of the films is more like the composition of TiOxCy.


Vacuum ◽  
2007 ◽  
Vol 82 (2) ◽  
pp. 154-157 ◽  
Author(s):  
M. Marton ◽  
T. Ižák ◽  
M. Veselý ◽  
M. Vojs ◽  
M. Michalka ◽  
...  

2019 ◽  
Vol 27 (04) ◽  
pp. 1950133
Author(s):  
RAHIMA NASRIN ◽  
HUMAYUN KABIR ◽  
A. H. BHUIYAN

In order to understand the variation of surface morphology and optical properties due to modification, an attempt has been made to synthesize iodine-doped n-butyl methacrylate thin films through plasma polymerization technique. Field emission scanning electron microscope images displayed that the surface of the modified plasma polymerized n-butyl methacrylate (PPnBMA) thin films became smooth after iodine doping. Atomic force microscopic analysis reveals that with increasing doping time from 0[Formula: see text]min to 60[Formula: see text]min the surface root-mean-square roughness value is decreased from 0.68[Formula: see text]nm to 0.51[Formula: see text]nm, which suggests that roughness of the PPnBMA thin film surface quite improved due to iodine doping. UV-Vis absorption spectroscopic analyses exhibited that iodine doping noticeably decreased both the direct and indirect energy bandgap values of PPnBMA thin film. The effect of doping by iodine on absorption coefficient, extinction coefficient, etc. of these thin films have been also discussed.


2021 ◽  
Author(s):  
Vadali Venkata Satya Siva Srikanth

Diamond thin films are touted to be excellent in surface-sensitive sensing, electro-mechanical systems, and electrochemical applications. However, these applications often entail patterned active surfaces and subtle chemical surface modifications. But due to diamond’s intrinsic hardness and chemical inertness, surface patterning (using micro-machining and ion etching) and chemical surface modifications, respectively, are very difficult. In the case of surface patterning, it is even more challenging to obtain patterns during synthesis. In this chapter, the direct patterning of sub-wavelength features on diamond thin film surface using a femtosecond laser, rapid thermal annealing as a means to prepare the diamond thin film surface as an efficient direct charge transfer SERS substrate (in metal/insulator/semiconductor (MIS) configuration), and implantation of 14N+ ions into the surface and sub-surface regions for enhancing the electrical conductivity of diamond thin film to a certain depth (in MIS configuration) will be discussed encompassing the processing strategies and different post-processing characteristics.


2000 ◽  
Vol 88 (5) ◽  
pp. 3047-3052 ◽  
Author(s):  
Toshiyuki Fujimoto ◽  
Kikuo Okuyama ◽  
Manabu Shimada ◽  
Yousuke Fujishige ◽  
Motoaki Adachi ◽  
...  

2011 ◽  
Vol 486 ◽  
pp. 127-130
Author(s):  
Chao Cheng Chang

This study used molecular dynamics simulations with an embedded-atom method (EAM) potential to investigate the effect of surface roughness on the surface activated bonding (SAB) of aluminium thin films. The simulations started with the bonding process and followed by the tensile test for estimating bonding strength. By averaging the atomic stresses over the entire system, the stress-time curves for the bonded films under a tensile condition were predicted. Moreover, the evolution of the crystal structure in the local atomic order was examined by the common neighbour analysis. The simulated results show that the decrease in the surface roughness of thin film improves the bonding strength. The observed recrystallization processes inside the bonded thin films also reveal that the plastic deformation of the aluminium surface due to atomic attracting force compensates surface roughness.


2011 ◽  
Vol 148-149 ◽  
pp. 1500-1503
Author(s):  
Wen Ning Mu ◽  
Shuang Zhi Shi

TiO2 thin films were deposited on SAM-coated silicon substrate by layer-by-layer self-assembly method. The influence of various parameters was investigated to optimize the conditions and the results show that with increasing deposition temperature and deposition time, and decreasing molar ratio of HCl to TiO22+, the content of TiO22+ in the reaction solution decreases. The as-deposited thin films were fully amorphous from the result of XRD, also were homogeneous and continuous produced at 80 °C for120 min as presented in SEM images, and the average size of particles on the thin film surface is approximately 33 nm.


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