Multi length scale hierarchical architecture overcoming pressure sensing range-speed tradeoff for flexible pressure sensors

2021 ◽  
Author(s):  
Qiong Tian ◽  
Wenrong Yan ◽  
Tianding CHEN ◽  
Derek Ho
Keyword(s):  
Biomedical Applications ◽  
Pressure Sensors ◽  
Human Machine Interface ◽  
Hierarchical Architecture ◽  
Soft Robotics ◽  
Length Scale ◽  
Pressure Sensing ◽  
Sensing Range ◽  
Machine Interface ◽  
Flexible Pressure Sensors

Pressure sensing electronics have gained great attention in human-machine interface, soft robotics, and wearable biomedical applications. However, existing sensor architectures are inadequate in overcoming the classic tradeoff between sensing range,...

Flexible hemispheric microarrays of highly pressure-sensitive sensors based on breath figure method

Nanoscale ◽  
2018 ◽  
Vol 10 (22) ◽  
pp. 10691-10698 ◽  
Author(s):  
Zhihui Wang ◽  
Ling Zhang ◽  
Jin Liu ◽  
Hao Jiang ◽  
Chunzhong Li
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Pressure Sensing ◽  
Sensing Range ◽  
Pressure Sensitive ◽  
Breath Figure ◽  
Breath Figure Method ◽  
Flexible Pressure Sensors

Flexible pressure sensors with interlocked hemispheric microstructures are prepared by a novel breath figure strategy. The subtle microstructure remarkably improves the sensitivity and pressure sensing range of the pressure sensor.

CMOS-MEMS Based Current Mirror MOSFET Embedded Pressure Sensor for Healthcare and Biomedical Applications

2013 ◽  
Vol 647 ◽  
pp. 315-320 ◽  
Author(s):  
Pradeep Kumar Rathore ◽  
Brishbhan Singh Panwar
Keyword(s):  
Pressure Sensor ◽  
Biomedical Applications ◽  
Circuit Simulation ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Cmos Technology ◽  
Current Mirror ◽  
Sensing Element ◽  
Pressure Sensing ◽  
Cmos Mems

This paper reports on the design and optimization of current mirror MOSFET embedded pressure sensor. A current mirror circuit with an output current of 1 mA integrated with a pressure sensing n-channel MOSFET has been designed using standard 5 µm CMOS technology. The channel region of the pressure sensing MOSFET forms the flexible diaphragm as well as the strain sensing element. The piezoresistive effect in MOSFET has been exploited for the calculation of strain induced carrier mobility variation. The output transistor of the current mirror forms the active pressure sensing MOSFET which produces a change in its drain current as a result of altered channel mobility under externally applied pressure. COMSOL Multiphysics is utilized for the simulation of pressure sensing structure and Tspice is employed to evaluate the characteristics of the current mirror pressure sensing circuit. Simulation results show that the pressure sensor has a sensitivity of 10.01 mV/MPa. The sensing structure has been optimized through simulation for enhancing the sensor sensitivity to 276.65 mV/MPa. These CMOS-MEMS based pressure sensors integrated with signal processing circuitry on the same chip can be used for healthcare and biomedical applications.

Flexible pressure sensing film based on ultra-sensitive SWCNT/PDMS spheres for monitoring human pulse signals

2015 ◽  
Vol 3 (27) ◽  
pp. 5436-5441 ◽  
Author(s):  
Yan-Long Tai ◽  
Zhen-Guo Yang
Keyword(s):  
Pressure Sensors ◽  
Pressure Sensing ◽  
Prosthetic Limbs ◽  
Electronic Skin ◽  
Essential Components ◽  
Biomedical Diagnostics ◽  
Healthcare Monitoring ◽  
Flexible Pressure Sensors ◽  
Human Healthcare

Flexible pressure sensors are essential components of an electronic skin for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics to robotic skins to prosthetic limbs.

Flexible Pressure Sensors for Biomedical Applications: From Ex Vivo to In Vivo

2020 ◽  
Vol 7 (17) ◽  
pp. 2000743 ◽  
Author(s):  
Lin Li ◽  
Jiahong Zheng ◽  
Jing Chen ◽  
Zebang Luo ◽  
Yi Su ◽  
...  
Keyword(s):  
Biomedical Applications ◽  
Ex Vivo ◽  
Pressure Sensors ◽  
Flexible Pressure Sensors

Carbon Nanotube Coated Fabric-Based Thin and Flexible Pressure Sensors with Ultra-Wide Sensing Range

2019 ◽  
Author(s):  
Sagar Doshi ◽  
Amit Chaudhari ◽  
Colleen Murray ◽  
Jill Higginson ◽  
Erik Thostenson
Keyword(s):  
Carbon Nanotube ◽  
Pressure Sensors ◽  
Sensing Range ◽  
Coated Fabric ◽  
Flexible Pressure Sensors

scholarly journals Highly Sensitive Pseudocapacitive Iontronic Pressure Sensor with Broad Sensing Range

2021 ◽  
Vol 13 (1) ◽  
Author(s):  
Libo Gao ◽  
Meng Wang ◽  
Weidong Wang ◽  
Hongcheng Xu ◽  
Yuejiao Wang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Limit Of Detection ◽  
Pressure Sensors ◽  
List Type ◽  
Practical Application ◽  
Flexible Robot ◽  
Sensing Range ◽  
Physical Activity Monitoring ◽  
Ultrahigh Sensitivity ◽  
Flexible Pressure Sensors

Highlights The iontronic pressure sensor achieved an ultrahigh sensitivity (Smin > 200 kPa−1, Smax > 45,000 kPa−1). The iontronic pressure sensor exhibited a broad sensing range of over 1.4 MPa. Pseudocapacitive iontronic pressure sensor using MXene was proposed. ABSTRACT Flexible pressure sensors are unprecedentedly studied on monitoring human physical activities and robotics. Simultaneously, improving the response sensitivity and sensing range of flexible pressure sensors is a great challenge, which hinders the devices’ practical application. Targeting this obstacle, we developed a Ti3C2Tx-derived iontronic pressure sensor (TIPS) by taking the advantages of the high intercalation pseudocapacitance under high pressure and rationally designed structural configuration. TIPS achieved an ultrahigh sensitivity (Smin > 200 kPa−1, Smax > 45,000 kPa−1) in a broad sensing range of over 1.4 MPa and low limit of detection of 20 Pa as well as stable long-term working durability for 10,000 cycles. The practical application of TIPS in physical activity monitoring and flexible robot manifested its versatile potential. This study provides a demonstration for exploring pseudocapacitive materials for building flexible iontronic sensors with ultrahigh sensitivity and sensing range to advance the development of high-performance wearable electronics.

Novel silicone-based capacitive pressure sensors with high sensitivity for biomedical applications

e-Polymers ◽  
2004 ◽  
Vol 4 (1) ◽  
Author(s):  
Khalil Arshak ◽  
Deirdre Morris ◽  
Olga Korostynska ◽  
Essa Jafer ◽  
Arousian Arshak ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Carbon Black ◽  
Silicone Rubber ◽  
Biomedical Applications ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Pressure Sensing ◽  
Mechanical And Electrical Properties ◽  
Full Investigation ◽  
Carbon Loading

Abstract In this work, an investigation of the pressure-sensing properties of a silicone rubber was conducted. Small amounts of carbon black were added to the silicone during fabrication and the effect on the sensitivity was explored. A full investigation of the mechanical and electrical properties of each composition shows that adding carbon black to the material greatly increases its sensitivity to pressure. This increase in sensitivity appears to be related to improvements in the material’s permittivity, which increases with carbon loading.

Hermetic capacitive pressure sensors for biomedical applications

2016 ◽  
Vol 33 (2) ◽  
pp. 79-86 ◽  
Author(s):  
Daniela Diaz-Alonso ◽  
Mario Moreno-Moreno ◽  
Carlos Zuñiga ◽  
Joel Molina ◽  
Wilfrido Calleja ◽  
...  
Keyword(s):  
Biomedical Applications ◽  
Pressure Sensors ◽  
Polyimide Film ◽  
Composite Model ◽  
Internal Cavity ◽  
Capacitive Pressure Sensor ◽  
Pressure Sensing ◽  
Content Type ◽  
Aluminum Films ◽  
Rigid Frame

Purpose This paper aims to purpose the new design and fabrication scheme of Touch Mode Capacitive Pressure Sensor (TMCPS), which can be used in a wireless integrated resistor, inductor and capacitor circuit for monitoring pressure in biomedical applications. Design/methodology/approach This study focuses on the design, simulation and fabrication of dynamic capacitors, based on surface micromachining using polysilicon or aluminum films as the top electrode, both structural materials are capped with a 1.5 μm-thick polyimide film. Findings The design of microstructures using a composite model fits perfectly the preset mechanical behavior. After the full fabrication, the dynamic capacitors show complete mechanical flexibility and stability. Originality/value The novelty of the method presented in this study includes two important aspects: first, the capacitors are designed as a planar cavity within a rigid frame, where two walls contain channels which allow for the etching of the sacrificial material. Second, the electromechanical structures are designed using a composite model that includes a polyimide film capping for a precise pressure sensing, which also protects the internal cavity and, at the same time, provides full biocompatibility.

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