Accumulation-mode and inversion-mode triple-gate MOSFETs

Author(s):  
R. Yan ◽  
A. Afzalian ◽  
C.-W. Lee ◽  
D.N. Akhavan ◽  
W. Xiong ◽  
...  
2019 ◽  
Vol 963 ◽  
pp. 588-591
Author(s):  
Ki Jeong Han ◽  
B. Jayant Baliga

Power MOSFETs operate at elevated temperatures due to self-heating and hot ambient temperatures. This paper analyzes the increase in on-resistance with temperature for 1.2 kV rated 4H-SiC planar MOSFETs. The impact of various structural parameters are studied using analytical models supported by experimental data. This work defines how to achieve a low ratio [Ron(150°C)/Ron(25°C)] by structural optimization of 1.2 kV SiC planar MOSFETs for the first time. It is found that the inversion mode MOSFETs, fabricated by us in a 6 inch commercial foundry, have a lower ratio [Ron(150°C)/Ron(25°C)] than the accumulation mode MOSFETs, due to a better balance of change in channel and bulk mobility with temperature. Compared with typical commercially available MOSFETs, our fabricated accumulation mode and inversion mode MOSFETs exhibit a lower ratio [Ron(150°C)/Ron(25°C)], resulting in superior HF-FOM [RonxQgd] at 150°C.


1990 ◽  
Vol 182 ◽  
Author(s):  
S. Batra ◽  
K. Park ◽  
S. Banerjee ◽  
R. Sundaresan

AbstractCarrier transport in the channel region of polysilicon thin film MOSFETs is affected by the presence of grain boundary potential barriers and is further complicated by the modulation of the grain boundary barrier height with gate voltage. Passivation of the trap sites with atomic hydrogen reduces the barrier height and thereby improves the performance of polysilicon transistors. In this paper, we demonstrate the effectiveness of Rapid Thermal Annealing (RTA) using Si3N4 as a solid source of H as a passivation technique for both inversion and accumulation mode polysilicon MOSFETs. ON/OFF ratios of 107 can be obtained by RTA passivation for inversion mode polysilicon MOSFETs compared to 106 after furnace passivation permitting the potential application of these MOSFETs both as load transistors in SRAMs as well as pass transistors in DRAMs. In contrast, the ON&OFF ratio of accumulation mode polysilicon MOSFETs does not show any improvement even though ID and VT improve with passivation. This is because of excessive back channel leakage in accumulation mode MOSFETs which increases with passivation.


2008 ◽  
Vol 52 (11) ◽  
pp. 1815-1820 ◽  
Author(s):  
Chi-Woo Lee ◽  
Dimitri Lederer ◽  
Aryan Afzalian ◽  
Ran Yan ◽  
Nima Dehdashti ◽  
...  

2018 ◽  
Vol 65 (2) ◽  
pp. 470-475 ◽  
Author(s):  
Jungsik Kim ◽  
Jin-Woo Han ◽  
M. Meyyappan

2013 ◽  
Vol 684 ◽  
pp. 295-298
Author(s):  
Seung Min Lee ◽  
Hyun Jun Jang ◽  
Jong Tae Park

A comparative study on off-state breakdown characteristics in nanowire JL and IM multiple gate MOSFETs has been performed for different gate bias voltages and fin widths. In order to understand the drain breakdown mechanism with different transistor structures, the device was simulated using the 3-dimensional ATLAS software. The band-to-band tunneling current and the gate-induced-drain-leakage current trigger the off-state breakdown in JL transistor and IM transistor, respectively. From experiment and simulation, the off-state breakdown voltage is lower in JL transistor than in IM transistor. As the gate is biased more negatively, the off-state breakdown voltages are increased in JL and IM transistors.


Author(s):  
Chan-Hoon Park ◽  
Myung-Dong Ko ◽  
Ki-Hyun Kim ◽  
Jae-Ho Hong ◽  
Rock-Hyun Baek ◽  
...  

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