Semiconducting behavior of niobium-doped titanium oxide in the amorphous state

2012 ◽  
Vol 100 (14) ◽  
pp. 142103 ◽  
Author(s):  
Kyung-Chul Ok ◽  
Joseph Park ◽  
Ju Ho Lee ◽  
Byung Du Ahn ◽  
Je Hun Lee ◽  
...  
2018 ◽  
Vol 6 (10) ◽  
pp. 2604-2604
Author(s):  
F. A. Alharthi ◽  
F. Cheng ◽  
E. Verrelli ◽  
N. T. Kemp ◽  
A. F. Lee ◽  
...  

Correction for ‘Solution-processable, niobium-doped titanium oxide nanorods for application in low-voltage, large-area electronic devices’ by F. A. Alharthi et al., J. Mater. Chem. C, 2018, 6, 1038–1047.


2016 ◽  
Vol 329 ◽  
pp. 428-431 ◽  
Author(s):  
Hiroyuki Usui ◽  
Yasuhiro Domi ◽  
Masahiro Shimizu ◽  
Akinobu Imoto ◽  
Kazuki Yamaguchi ◽  
...  

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Jesse S. Ko ◽  
Nam Q. Le ◽  
Danielle R. Schlesinger ◽  
Dajie Zhang ◽  
James K. Johnson ◽  
...  
Keyword(s):  

2007 ◽  
Vol 46 (4A) ◽  
pp. 1653-1655 ◽  
Author(s):  
Ming-Kwei Lee ◽  
Chung-Min Shih ◽  
Shih-Chang Fang ◽  
Hwei-Fu Tu ◽  
Chen-Lin Ho

1999 ◽  
Vol 606 ◽  
Author(s):  
Hisashi Fukuda ◽  
Yoshihiro Ishikawa ◽  
Seiogo Namioka ◽  
Shigeru Nomura

AbstractTitanium oxide (TiO2) thin ftlms were formed on a Si substrate by metalorganic decomposition(MOD) at temperatures ranging from 600 to 1100°C. As-deposited films were in the amorphous state and were completely transformed after annealing at 600°C to a crystalline structure with anatase as its main component. During crystallization, a reaction between TiO2 and Si occurred at the interface, which resulted in the formation of a thin interfacial SiO2 layer. Capacitance-voltage measurement showed good dielectric properties with a maximum dielectric constant of 76 for films annealed at 700°C. For the crystallized TiO2 films, the interface trap density was 1 × 1011 cm−2 eV−1, and the leakage current was 1 × 10−8 A/cm2 at 0.2 MV/cm. The modified structure of TiO2/SiO2/Si is expected to be suitable for the dielectric layer in an integrated circuit in place of conventional SiO2 films.


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