Oxygen vacancy defect engineering using atomic layer deposited HfAlOx in multi-layered gate stack
2018 ◽
Vol 8
(17)
◽
pp. 4399-4406
◽
Keyword(s):
2020 ◽
Vol 264
◽
pp. 118464
◽
Keyword(s):
2021 ◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):