Infrared spectroscopy of interfaces in amorphous hydrogenated silicon/silicon nitride superlattices

Applied Physics Letters ◽

10.1063/1.96932 ◽

1986 ◽

Vol 48 (2) ◽

pp. 168-170 ◽

Author(s):

B. Abeles ◽

L. Yang ◽

P. D. Persans ◽

H. S. Stasiewski ◽

W. Lanford

Keyword(s):

Infrared Spectroscopy ◽

Silicon Nitride ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon ◽

Nitride Superlattices ◽

Silicon Silicon

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Role of fluorocarbon film formation in the etching of silicon, silicon dioxide, silicon nitride, and amorphous hydrogenated silicon carbide

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1626642 ◽

2004 ◽

Vol 22 (1) ◽

pp. 53-60 ◽

Author(s):

T. E. F. M. Standaert ◽

C. Hedlund ◽

E. A. Joseph ◽

G. S. Oehrlein ◽

T. J. Dalton

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Silicon Dioxide ◽

Film Formation ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon ◽

Silicon Silicon ◽

Fluorocarbon Film

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Amorphous hydrogenated silicon-nitride films for applications in solar cells

Vacuum ◽

10.1016/j.vacuum.2008.01.004 ◽

2008 ◽

Vol 82 (10) ◽

pp. 942-946 ◽

Author(s):

B. Swatowska ◽

T. Stapinski

Keyword(s):

Solar Cells ◽

Silicon Nitride ◽

Hydrogenated Silicon ◽

Silicon Nitride Films ◽

Amorphous Hydrogenated Silicon

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Electrical breakdown of amorphous hydrogenated silicon rich silicon nitride thin film diodes

IEEE Transactions on Electron Devices ◽

10.1109/16.535353 ◽

1996 ◽

Vol 43 (9) ◽

pp. 1592-1601 ◽

Author(s):

S.J. Bijlsma ◽

H. van Kranenburg ◽

K.J.B.M. Nieuwesteeg ◽

M.G. Pitt ◽

J.F. Verweij

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Electrical Breakdown ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon

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Optically Induced Nitrogen Dangling Bonds in Amorphous Hydrogenated Silicon Nitride Thin Films

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 ◽

10.1007/978-1-4899-1588-7_46 ◽

1993 ◽

pp. 421-426

Author(s):

W. L. Warren ◽

J. Kanicki ◽

P. J. McWhorter ◽

E. H. Poindexter

Keyword(s):

Silicon Nitride ◽

Dangling Bonds ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon ◽

Optically Induced

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Hole transport via dangling-bond states in amorphous hydrogenated silicon nitride

Journal of Applied Physics ◽

10.1063/1.370966 ◽

1999 ◽

Vol 86 (3) ◽

pp. 1548-1551 ◽

Author(s):

J. M. Shannon ◽

B. A. Morgan

Keyword(s):

Silicon Nitride ◽

Hole Transport ◽

Dangling Bond ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon

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Growth of long aligned carbon nanotubes on amorphous hydrogenated silicon nitride by thermal chemical vapor deposition

Materials Letters ◽

10.1016/j.matlet.2009.02.050 ◽

2009 ◽

Vol 63 (15) ◽

pp. 1249-1251 ◽

Author(s):

Sangeeta Handuja ◽

Sarab Preet Singh ◽

P. Srivastava ◽

V.D. Vankar

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hydrogenated Silicon ◽

Thermal Chemical Vapor Deposition ◽

Amorphous Hydrogenated Silicon ◽

Aligned Carbon Nanotubes

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Structural and optical study of amorphous hydrogenated silicon nitride thin film as antireflection coating on solar cell

Advanced Materials Proceedings ◽

10.5185/amp.2017/686 ◽

2017 ◽

Vol 2 (9) ◽

pp. 570-574

Author(s):

Swati Mamgain

Keyword(s):

Thin Film ◽

Silicon Nitride ◽

Antireflection Coating ◽

Optical Study ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon

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Thermally Induced Changes in the Hydrogen Microstructure of Amorphous Hydrogenated Silicon Films, Analyzed UsingIn SituReal Time Infrared Spectroscopy

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4002 ◽

1999 ◽

Vol 38 (Part 1, No. 7A) ◽

pp. 4002-4006 ◽

Author(s):

A. von Keudell ◽

J. R. Abelson

Keyword(s):

Infrared Spectroscopy ◽

Silicon Films ◽

Hydrogenated Silicon ◽

Thermally Induced ◽

Amorphous Hydrogenated Silicon ◽

Induced Changes

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Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/21/9/095010 ◽

2009 ◽

Vol 21 (9) ◽

pp. 095010 ◽

Author(s):

Sarab Preet Singh ◽

P Srivastava ◽

S Ghosh ◽

Saif Ali Khan ◽

G Vijaya Prakash

Keyword(s):

Silicon Nitride ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Nitride Film ◽

Silicon Nitride Film ◽

Hydrogenated Silicon ◽

Phase Stabilization ◽

Amorphous Hydrogenated Silicon

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Optical absorption in amorphous hydrogenated silicon nitride thin films deposited by the electron cyclotron resonance plasma method and subjected to rapid thermal annealing

Thin Solid Films ◽

10.1016/s0040-6090(98)01669-1 ◽

1999 ◽

Vol 343-344 ◽

pp. 433-436 ◽

Author(s):

F.L. Martínez ◽

I. Mártil ◽

G. González-Díaz ◽

A.M. Bernal-Oliva ◽

J.M. González-Leal ◽

...

Keyword(s):

Silicon Nitride ◽

Optical Absorption ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Hydrogenated Silicon ◽

Amorphous Hydrogenated Silicon ◽

Resonance Plasma

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