scholarly journals Helicon Wave Measurements in an Inductively Coupled Magnetoplasma

1995 ◽  
Vol 48 (3) ◽  
pp. 461 ◽  
Author(s):  
Keiji Nakamura ◽  
Keiji Suzuki ◽  
Hideo Sugai

Small-amplitude test waves at 30-100 MHz are externally excited in an inductive rf plasma for a magnetic field of rv100 G, to obtain a full dispersion relation for helicon waves. Measured wavelengths agree well with theoretical ones, not only for the test waves but also for largeamplitude principal waves at the discharge frequency of 13�56 MHz. Absolute measurements of the radial magnetic field B; of the large-amplitude helicon wave are carried out, and the r, q and z components of the wave electric field are estimated to be E; rv Eo rv 8 V cm-1 and Ez rv 0�7Vcm-1 at an rf power of 800 W.

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Kazunori Takahashi

AbstractDevelopment of a magnetic nozzle radiofrequency (rf) plasma thruster has been one of challenging topics in space electric propulsion technologies. The thruster typically consists of an rf plasma source and a magnetic nozzle, where the plasma produced inside the source is transported along the magnetic field and expands in the magnetic nozzle. An imparted thrust is significantly affected by the rf power coupling for the plasma production, the plasma transport, the plasma loss to the wall, and the plasma acceleration process in the magnetic nozzle. The rf power transfer efficiency and the imparted thrust are assessed for two types of rf antennas exciting azimuthal mode number of $$m=+1$$ m = + 1 and $$m=0$$ m = 0 , where propellant argon gas is introduced from the upstream of the thruster source tube. The rf power transfer efficiency and the density measured at the radial center for the $$m=+1$$ m = + 1 mode antenna are higher than those for the $$m=0$$ m = 0 mode antenna, while a larger thrust is obtained for the $$m=0$$ m = 0 mode antenna. Two-dimensional plume characterization suggests that the lowered performance for the $$m=+1$$ m = + 1 mode case is due to the plasma production at the radial center, where contribution on a thrust exerted to the magnetic nozzle is weak due to the absence of the radial magnetic field. Subsequently, the configuration is modified so as to introduce the propellant gas near the thruster exit for the $$m=0$$ m = 0 mode configuration and the thruster efficiency approaching twenty percent is successfully obtained, being highest to date in the kW-class magnetic nozzle rf plasma thrusters.


1975 ◽  
Vol 30 (12) ◽  
pp. 1600-1605 ◽  
Author(s):  
H. Schlüter ◽  
G. Schürger

Abstract A theoretical study is carried out for the resistive loading of an rf power source inductively coupled to a plasma cylinder which is immersed in a magnetic field. The plasma is assumed to consist of electrons, two ion and two neutral species. The results are compared with measurements in a hydrogen plasma.


Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 89
Author(s):  
Jongwon Lee ◽  
Kilsun Roh ◽  
Sung-Kyu Lim ◽  
Youngsu Kim

This is the first demonstration of sidewall slope control of InP via holes with an etch depth of more than 10 μm for 3D integration. The process for the InP via holes utilizes a common SiO2 layer as an InP etch mask and conventional inductively coupled plasma (ICP) etcher operated at room temperature and simple gas mixtures of Cl2/Ar for InP dry etch. Sidewall slope of InP via holes is controlled within the range of 80 to 90 degrees by changing the ICP power in the ICP etcher and adopting a dry-etched SiO2 layer with a sidewall slope of 70 degrees. Furthermore, the sidewall slope control of the InP via holes in a wide range of 36 to 69 degrees is possible by changing the RF power in the etcher and introducing a wet-etched SiO2 layer with a small sidewall slope of 2 degrees; this wide slope control is due to the change of InP-to-SiO2 selectivity with RF power.


2011 ◽  
Vol 105-107 ◽  
pp. 2289-2294
Author(s):  
Jun Qiang Lian ◽  
Shun Yi Xie ◽  
Jian Wang

This paper provide two methods to analyze the cogging torque of PM motor with radial magnetic field and parallel magnetic field, FEM method and Analytic method. The FEM model and Analytic model of PM motor with radial magnetic field and parallel magnetic field are founded. We analyze the model in both methods. From the result of analysis. The air-gap magnetic density of PM motor can be analyzed. We can find the cogging torque of radial magnetic field PM motor is much heavily than the cogging torque of parallel magnetic field PM motor. The result of Analytic method is close to the result of FEM method. The Analytic method is useful in analyze the cogging torque of PM motor.


1962 ◽  
Vol 13 (1) ◽  
pp. 21-32 ◽  
Author(s):  
W. F. Hughes ◽  
R. A. Elco

The motion of an electrically conducting, incompressible, viscous fluid in the presence of a magnetic field is analyzed for flow between two parallel disks, one of which rotates at a constant angular velocity. The specific application to liquid metal lubrication in thrust bearings is considered. The two field configurations discussed are: an axial magnetic field with a radial current and a radial magnetic field with an axial current. It is shown that the load capacity of the bearing is dependent on the MHD interactions in the fluid and that the frictional torque on the rotor can be made zero for both field configurations by supplying electrical energy through the electrodes to the fluid.


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