Wellenabsorption in einem Plasma mit zwei Ionensorten/ Wave Absorption in a Plasma with Two Ion Species

1975 ◽  
Vol 30 (12) ◽  
pp. 1600-1605 ◽  
Author(s):  
H. Schlüter ◽  
G. Schürger

Abstract A theoretical study is carried out for the resistive loading of an rf power source inductively coupled to a plasma cylinder which is immersed in a magnetic field. The plasma is assumed to consist of electrons, two ion and two neutral species. The results are compared with measurements in a hydrogen plasma.

1995 ◽  
Vol 48 (3) ◽  
pp. 461 ◽  
Author(s):  
Keiji Nakamura ◽  
Keiji Suzuki ◽  
Hideo Sugai

Small-amplitude test waves at 30-100 MHz are externally excited in an inductive rf plasma for a magnetic field of rv100 G, to obtain a full dispersion relation for helicon waves. Measured wavelengths agree well with theoretical ones, not only for the test waves but also for largeamplitude principal waves at the discharge frequency of 13�56 MHz. Absolute measurements of the radial magnetic field B; of the large-amplitude helicon wave are carried out, and the r, q and z components of the wave electric field are estimated to be E; rv Eo rv 8 V cm-1 and Ez rv 0�7Vcm-1 at an rf power of 800 W.


Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 89
Author(s):  
Jongwon Lee ◽  
Kilsun Roh ◽  
Sung-Kyu Lim ◽  
Youngsu Kim

This is the first demonstration of sidewall slope control of InP via holes with an etch depth of more than 10 μm for 3D integration. The process for the InP via holes utilizes a common SiO2 layer as an InP etch mask and conventional inductively coupled plasma (ICP) etcher operated at room temperature and simple gas mixtures of Cl2/Ar for InP dry etch. Sidewall slope of InP via holes is controlled within the range of 80 to 90 degrees by changing the ICP power in the ICP etcher and adopting a dry-etched SiO2 layer with a sidewall slope of 70 degrees. Furthermore, the sidewall slope control of the InP via holes in a wide range of 36 to 69 degrees is possible by changing the RF power in the etcher and introducing a wet-etched SiO2 layer with a small sidewall slope of 2 degrees; this wide slope control is due to the change of InP-to-SiO2 selectivity with RF power.


2021 ◽  
Vol 87 (2) ◽  
Author(s):  
Ivan A. Ivanov ◽  
V. O. Ustyuzhanin ◽  
A. V. Sudnikov ◽  
A. Inzhevatkina

A plasma gun for forming a plasma stream in the open magnetic mirror trap with additional helicoidal field SMOLA is described. The plasma gun is an axisymmetric system with a planar circular hot cathode based on lanthanum hexaboride and a hollow copper anode. The two planar coils are located around the plasma source and create a magnetic field of up to 200 mT. The magnetic field forms the magnetron configuration of the discharge and provides a radial electric insulation. The source typically operates with a discharge current of up to 350 A in hydrogen. Plasma parameters in the SMOLA device are Ti ~ 5 eV, Te ~ 5–40 eV and ni ~ (0.1–1)  × 1019 m−3. Helium plasma can also be created. The plasma properties depend on the whole group of initial technical parameters: the cathode temperature, the feeding gas flow, the anode-cathode supply voltage and the magnitude of the cathode magnetic insulation.


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Kazunori Takahashi

AbstractDevelopment of a magnetic nozzle radiofrequency (rf) plasma thruster has been one of challenging topics in space electric propulsion technologies. The thruster typically consists of an rf plasma source and a magnetic nozzle, where the plasma produced inside the source is transported along the magnetic field and expands in the magnetic nozzle. An imparted thrust is significantly affected by the rf power coupling for the plasma production, the plasma transport, the plasma loss to the wall, and the plasma acceleration process in the magnetic nozzle. The rf power transfer efficiency and the imparted thrust are assessed for two types of rf antennas exciting azimuthal mode number of $$m=+1$$ m = + 1 and $$m=0$$ m = 0 , where propellant argon gas is introduced from the upstream of the thruster source tube. The rf power transfer efficiency and the density measured at the radial center for the $$m=+1$$ m = + 1 mode antenna are higher than those for the $$m=0$$ m = 0 mode antenna, while a larger thrust is obtained for the $$m=0$$ m = 0 mode antenna. Two-dimensional plume characterization suggests that the lowered performance for the $$m=+1$$ m = + 1 mode case is due to the plasma production at the radial center, where contribution on a thrust exerted to the magnetic nozzle is weak due to the absence of the radial magnetic field. Subsequently, the configuration is modified so as to introduce the propellant gas near the thruster exit for the $$m=0$$ m = 0 mode configuration and the thruster efficiency approaching twenty percent is successfully obtained, being highest to date in the kW-class magnetic nozzle rf plasma thrusters.


AIP Advances ◽  
2020 ◽  
Vol 10 (5) ◽  
pp. 055209
Author(s):  
Shengwu Zhang ◽  
Yiwen Li ◽  
Wang Ma ◽  
Xiaolong Wei ◽  
Wenyuan Zhang

2017 ◽  
Vol 19 (2) ◽  
Author(s):  
Yuri I. Golovin ◽  
Sergey L. Gribanovsky ◽  
Dmitry Y. Golovin ◽  
Alexander O. Zhigachev ◽  
Natalia L. Klyachko ◽  
...  

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