Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma

2006 ◽  
Vol 16 (1) ◽  
pp. 193-199 ◽  
Author(s):  
Masashi Shimada ◽  
George R Tynan ◽  
Robert Cattolica
Keyword(s):  
Inductively Coupled Plasma ◽  
Pressure Balance ◽  
Gas Density ◽  
Inductively Coupled ◽  
Neutral Gas ◽  
Density Depletion ◽  
Gas Heating

Effect of neutral gas heating in argon radio frequency inductively coupled plasma

2014 ◽  
Vol 32 ◽  
pp. 1460320 ◽  
Author(s):  
O. H. Chin ◽  
K. K. Jayapalan ◽  
C. S. Wong
Keyword(s):  
Magnetic Field ◽  
Inductively Coupled Plasma ◽  
Reasonable Agreement ◽  
Inductively Coupled ◽  
Magnetic Field Profile ◽  
Neutral Gas ◽  
Planar Coil ◽  
Gas Heating ◽  
The Magnetic Field ◽  
Measured Magnetic Field

Heating of neutral gas in inductively coupled plasma (ICP) is known to result in neutral gas depletion. In this work, this effect is considered in the simulation of the magnetic field distribution of a 13.56 MHz planar coil ICP. Measured electron temperatures and densities at argon pressures of 0.03, 0.07 and 0.2 mbar were used in the simulation whilst neutral gas temperatures were heuristically fitted. The simulated results showed reasonable agreement with the measured magnetic field profile.

scholarly journals Development of Injection Gas Heating System for Introducing Large Droplets to Inductively Coupled Plasma

2013 ◽  
Vol 29 (12) ◽  
pp. 1147-1151 ◽  
Author(s):  
Yuki KABURAKI ◽  
Akito NOMURA ◽  
Yukiko ISHIHARA ◽  
Takahiro IWAI ◽  
Hidekazu MIYAHARA ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Heating System ◽  
Inductively Coupled ◽  
Gas Heating
Sign in / Sign up

Export Citation Format

Share Document