Piezoelectric MEMS – Evolution from sensing technology to diversified applications in the 5G / Internet of Things (IoT) era

Author(s):  
Xianhao Le ◽  
Qiongfeng Shi ◽  
Philippe Vachon ◽  
Eldwin Jiaqiang Ng ◽  
Chengkuo Lee

Abstract The rapid development of the fifth-generation mobile networks (5G) and Internet of Things (IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and actuators. Piezoelectric micro-electromechanical system (MEMS) devices, fabricated by micromachining technologies, provide a versatile platform for various high-performance sensors, actuators, energy harvesters, filters and oscillators (main building blocks in radio frequency (RF) front-ends for wireless communication). In this paper, we provide a comprehensive review of the working mechanism, structural design, and diversified applications of piezoelectric MEMS devices. Firstly, various piezoelectric MEMS sensors are introduced, including contact and non-contact types, aiming for the applications in physical, chemical and biological sensing. This is followed by a presentation of the advances in piezoelectric MEMS actuators for different application scenarios. Meanwhile, piezoelectric MEMS energy harvesters, with the ability to power other MEMS devices, are orderly enumerated. Furthermore, as a representative of piezoelectric resonators, Lamb wave resonators are exhibited with manifold performance improvements. Finally, the development trends of wearable and implantable piezoelectric MEMS devices are discussed.

2020 ◽  
Vol 63 (2) ◽  
pp. 325-337
Author(s):  
Lei Zhou ◽  
Zhengjun Qiu ◽  
Yong He

HighlightsA quick solution for developing and deploying custom agricultural IoT systems is proposed.Low-cost and high-performance devices are used for the design of sensor nodes.A mobile application based on WeChat Mini-Program is developed for device and data management.The proposed system brings convenience to both users and developers.Abstract. Increasing demand for automatic management of agricultural production and real-time remote monitoring has increased the need for smart devices, wireless technologies, and sensors. The internet of things (IoT) has emerged as a common technology for the management of multiple devices by multiple users. Some professional solutions are relatively difficult to implement for researchers who are interested in agricultural IoT but do not have requisite skills in computers and electronics. The unfriendliness of the user software limits the practical application of agricultural IoT in China. This article presents a simple solution based on an SoC (system-on-chip) and WeChat mini-program that focuses on low-cost hardware, rapid development, user-friendly application design, and helping developers get a quick start in building a DIY monitoring system. The ESP8266, a high-performance SoC, is used as the microcontroller and Wi-Fi module to transfer the sensor data to a remote server. A WeChat mini-program provides the graphical user interface, enabling users to manage devices and access data by clicking. Users can log into the system using their WeChat accounts and bind devices by scanning QR codes on the devices. Thus, the complex management and device binding in conventional systems can be overcome. The system is easy to be expand and has great potential for greenhouse environmental monitoring in China. Keywords: Greenhouse ambient monitoring, Internet of things, WeChat mini-program, Wi-Fi SoC.


Smart Cities ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 894-918
Author(s):  
Luís Rosa ◽  
Fábio Silva ◽  
Cesar Analide

The evolution of Mobile Networks and Internet of Things (IoT) architectures allows one to rethink the way smart cities infrastructures are designed and managed, and solve a number of problems in terms of human mobility. The territories that adopt the sensoring era can take advantage of this disruptive technology to improve the quality of mobility of their citizens and the rationalization of their resources. However, with this rapid development of smart terminals and infrastructures, as well as the proliferation of diversified applications, even current networks may not be able to completely meet quickly rising human mobility demands. Thus, they are facing many challenges and to cope with these challenges, different standards and projects have been proposed so far. Accordingly, Artificial Intelligence (AI) has been utilized as a new paradigm for the design and optimization of mobile networks with a high level of intelligence. The objective of this work is to identify and discuss the challenges of mobile networks, alongside IoT and AI, to characterize smart human mobility and to discuss some workable solutions to these challenges. Finally, based on this discussion, we propose paths for future smart human mobility researches.


2021 ◽  
Vol 6 (51) ◽  
pp. eaaz5796
Author(s):  
I. D. Sîrbu ◽  
G. Moretti ◽  
G. Bortolotti ◽  
M. Bolignari ◽  
S. Diré ◽  
...  

Future robotic systems will be pervasive technologies operating autonomously in unknown spaces that are shared with humans. Such complex interactions make it compulsory for them to be lightweight, soft, and efficient in a way to guarantee safety, robustness, and long-term operation. Such a set of qualities can be achieved using soft multipurpose systems that combine, integrate, and commute between conventional electromechanical and fluidic drives, as well as harvest energy during inactive actuation phases for increased energy efficiency. Here, we present an electrostatic actuator made of thin films and liquid dielectrics combined with rigid polymeric stiffening elements to form a circular electrostatic bellow muscle (EBM) unit capable of out-of-plane contraction. These units are easy to manufacture and can be arranged in arrays and stacks, which can be used as a contractile artificial muscle, as a pump for fluid-driven soft robots, or as an energy harvester. As an artificial muscle, EBMs of 20 to 40 millimeters in diameter can exert forces of up to 6 newtons, lift loads over a hundred times their own weight, and reach contractions of over 40% with strain rates over 1200% per second, with a bandwidth over 10 hertz. As a pump driver, these EBMs produce flow rates of up to 0.63 liters per minute and maximum pressure head of 6 kilopascals, whereas as generator, they reach a conversion efficiency close to 20%. The compact shape, low cost, simple assembling procedure, high reliability, and large contractions make the EBM a promising technology for high-performance robotic systems.


Energies ◽  
2019 ◽  
Vol 12 (14) ◽  
pp. 2648 ◽  
Author(s):  
Antonio Delle Femine ◽  
Daniele Gallo ◽  
Carmine Landi ◽  
Mario Luiso

The widespread diffusion of Phasor Measurement Units (PMUs) is a becoming a need for the development of the “smartness” of power systems. However, PMU with accuracy compliant to the standard Institute of Electrical and Electronics Engineers (IEEE) C37.118.1-2011 and its amendment IEEE Std C37.118.1a-2014 have typically costs that constitute a brake for their diffusion. Therefore, in this paper, the design of a low-cost implementation of a PMU is presented. The low cost approach is followed in the design of all the building blocks of the PMU. A key feature of the presented approach is that the data acquisition, data processing and data communication are integrated in a single low cost microcontroller. The synchronization is obtained using a simple external Global Positioning System receiver, which does not provide a disciplined clock. The synchronization of sampling frequency, and thus of the measurement, to the Universal Time Coordinated, is obtained by means of a suitable signal processing technique. For this implementation, the Interpolated Discrete Fourier Transform has been used as the synchrophasor estimation algorithm. A thorough metrological characterization of the realized prototype in different test conditions proposed by the standards, using a high performance PMU calibrator, is also shown.


2013 ◽  
Vol 849 ◽  
pp. 302-309
Author(s):  
Yun Xu ◽  
Xin Hua Zhu ◽  
Yu Wang

With rapid development of micro fabrication technology, the performance of MIMU has gradually improved. The MIMU introduced in this paper is based on the silicon micro machined gyroscope of type MSG7000D and accelerometer of type MSA6000. The volume of it is 3×3×3cm3, the mass is 68.5g and the power consumption is less than 1w. The experimental result shows that the bias stability of the gyroscope and accelerometer for each axis of the designed MIMU is less than 10°/h and 0.5mg respectively. For the non orthogonality in three axes of the structure, MIMU needs to be calibrated. After calibration, the measurement accuracy has improved by an order of magnitude. The designed MIMU can satisfy the requirement of high performance, low cost, light weight and small size for strap-down navigation system, thus it can be widely applied not only to the field of vehicles integrated navigation, attitude measurement but also to the fields of personal goods such as mobile, game consoles and so on.


Molecules ◽  
2020 ◽  
Vol 25 (15) ◽  
pp. 3475 ◽  
Author(s):  
Shijie Zhang ◽  
Zhenguo Gao ◽  
Di Lan ◽  
Qian Jia ◽  
Ning Liu ◽  
...  

Nitrated-pyrazole-based energetic compounds have attracted wide publicity in the field of energetic materials (EMs) due to their high heat of formation, high density, tailored thermal stability, and detonation performance. Many nitrated-pyrazole-based energetic compounds have been developed to meet the increasing demands of high power, low sensitivity, and eco-friendly environment, and they have good applications in explosives, propellants, and pyrotechnics. Continuous and growing efforts have been committed to promote the rapid development of nitrated-pyrazole-based EMs in the last decade, especially through large amounts of Chinese research. Some of the ultimate aims of nitrated-pyrazole-based materials are to develop potential candidates of castable explosives, explore novel insensitive high energy materials, search for low cost synthesis strategies, high efficiency, and green environmental protection, and further widen the applications of EMs. This review article aims to present the recent processes in the synthesis and physical and explosive performances of the nitrated-pyrazole-based Ems, including monopyrazoles with nitro, bispyrazoles with nitro, nitropyrazolo[4,3-c]pyrazoles, and their derivatives, and to comb the development trend of these compounds. This review intends to prompt fresh concepts for designing prominent high-performance nitropyrazole-based EMs.


2019 ◽  
Vol 2019 (NOR) ◽  
pp. 000006-000011
Author(s):  
N Palavesam ◽  
W Hell ◽  
A Drost ◽  
C Landesberger ◽  
C Kutter ◽  
...  

Abstract The emerging Internet-of-Everything (IoE) framework aims to revolutionise human-machine interaction where billions of sensors and actuators placed on almost every physical object will be tasked to communicate with each other. A substantial fraction of these devices will be placed on locations that would undergo repeated bending deformation (such as sensors for prosthetics, human body and robots) or on curved surfaces (like interior as well as exterior of automobiles, buildings and industrial equipment). Therefore, flexible sensors and actuators delivering high performance at low power requirements and manufactured at low cost will be the key for successful implementation of IoE. Though massive developments achieved in printed and organic electronics have enabled them to fulfil the required flexibility and low cost demands of IoE applications, printed and organic electronics often fall short of the high performance and low power requirements demonstrated by silicon ICs. Flexible chip foil packages fabricated by integrating ultra-thin bare silicon ICs fulfil the aforementioned demands posed by IoE applications and therefore, they are often considered as potential enablers of IoE. Here, we present an innovative roll-to-roll manufacturing compatible low cost approach for direct metal interconnection and integration of ultra-thin silicon ICs. The thickness of the fabricated flexible packages with the integrated and interconnected ultra-thin ICs were as thin as 100 μm. Electrical measurements conducted on the 60 fabricated samples with interconnected flexible ultra-thin ICs revealed a very promising yield of 94%.


Author(s):  
Ian K. Wong ◽  
D. Sandy Staples

In the past several decades, we have seen tremendous advancements in the development of communication technology. Since the invention of the Internet in 1969, there has been rapid development of Internet-based communication tools and technologies. This technology has revolutionized business practices by offering another important and effective channel for communication (Foo & Lim, 1997), and has allowed people to work on projects irrespective of their physical location. One resulting business practice that has been adopted in recent years is virtual teamwork. Virtual teams are groups of individuals who work at interdependent tasks, who share responsibility for outcomes, and who work together from different locations. Recently, the use of teams as fundamental building blocks in organizations is increasing, as is the use of virtual teamwork (Furst, Blackburn & Rosen, 1999). This article identifies the characteristics of high performing virtual teams.


2019 ◽  
Vol 15 (5) ◽  
pp. 155014771984712 ◽  
Author(s):  
Leonardo Juan Ramírez López ◽  
Arturo Rodriguez Garcia ◽  
Gabriel Puerta Aponte

The implementation of the Internet of things in healthcare is a promising challenge to achieve coverage for a bigger number of users in different places at lower costs. Internet of things might mean better technology regarding response time and proper control of medical parameters. This study introduces an Internet-of-things system for healthcare with possibilities to control medical variables according to recent breakthroughs in sensors and data processing. The goal of the system is to optimize the development of applications to obtain variables in real time and with less energy consumption. The proposed model is validated on the measurement and monitoring of oxygen saturation, heart rate, and body temperature in patients with respiratory disorders. This was achieved by the optimization of data acquisition, integrated into a secure architecture using Message Queuing Telemetry Transport protocol. A cloud architecture with interconnection to low-cost and open-source devices was implemented, which interconnect to the sensors and actuators’ network. The experimental results were statistically treated against the device pattern data, through hypothesis tests for mean differences to probe the accuracy of the model. Finally, the proposed model demonstrates an efficient performance in several clinical parameters, such as oxygen saturation and heart rate per minute.


2013 ◽  
Vol 1553 ◽  
Author(s):  
R. A. Sporea ◽  
S. Georgakopoulos ◽  
X. Xu ◽  
X. Guo ◽  
M. Shkunov ◽  
...  

ABSTRACTIn order to achieve high performance, the design of devices for large-area electronics needs to be optimized despite material or fabrication shortcomings. In numerous emerging technologies thin-film transistor (TFT) performance is hindered by contact effects. Here, we show that contact effects can be used constructively to create devices with performance characteristics unachievable by conventional transistor designs. Source-gated transistors (SGTs) are not designed with increasing transistor speed, mobility or sub-threshold slope in mind, but rather with improving certain aspects critical for real-world large area electronics such as stability, uniformity, power efficiency and gain. SGTs can achieve considerably lower saturation voltage and power dissipation compared to conventional devices driven at the same current; higher output impedance for over two orders of magnitude higher intrinsic gain; improved bias stress stability in amorphous materials; higher resilience to processing variations; current virtually independent of source-drain gap, source-gate overlap and semiconductor thickness variations. Applications such as amplifiers and drivers for sensors and actuators, low cost large area analog or digital circuits could greatly benefit from incorporating the SGT architecture.


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