Aging analysis of nMOS of a 1.3- mu m partially depleted SIMOX SOI technology comparison with a 1.3- mu m bulk technology

1993 ◽  
Vol 40 (2) ◽  
pp. 364-370 ◽  
Author(s):  
G. Reimbold ◽  
A.-J. Auberton-Herve
1987 ◽  
Vol 107 ◽  
Author(s):  
P L F Hemment ◽  
A K Robinson ◽  
K J Reeson ◽  
J R Davis ◽  
J R Kilner ◽  
...  

AbstractA method of achieving total dielectric isolation (TDI) of device islands (or larger areas) using ion beam synthesis to form a continuous but non planar layer of SiO2 is described. The technique involves implantation through a patterned masking layer in which windows have been opened to define the dimensions and location of the islands. TDI structures have been successfully formed in annealed (1300°C, 5 hours) wafers implanted with a dose of 2.2 x 1018 O+ cm2 at 200 keV, using a thermal oxide mask of thickness 4750 Å.


2020 ◽  
Vol 63 (11) ◽  
pp. 586-595
Author(s):  
Alexander Korotkov ◽  
Dmitry Morozov ◽  
Mikhail Pilipko ◽  
Mikhail Yenuchenko

Author(s):  
Z. G. Song ◽  
S. K. Loh ◽  
X. H. Zheng ◽  
S.P. Neo ◽  
C. K. Oh

Abstract This article presents two cases to demonstrate the application of focused ion beam (FIB) circuit edit in analysis of memory failure of silicon on insulator (SOI) devices using XTEM and EDX analyses. The first case was a single bit failure of SRAM units manufactured with 90 nm technology in SOI wafer. The second case was the whole column failure with a single bit pass for a SRAM unit. From the results, it was concluded that FIB circuit edit and electrical characterization is a good methodology for further narrowing down the defective location of memory failure, especially for SOI technology, where contact-level passive voltage contrast is not suitable.


Author(s):  
K. Dickson ◽  
G. Lange ◽  
K. Erington ◽  
J. Ybarra

Abstract This paper describes the use of Electron Beam Absorbed Current (EBAC) mapping performed from the back side of the device as a means of locating metallization defects on flip chip 45nm SOI technology.


Author(s):  
A.V. Stomatov ◽  
D.V. Stomatov ◽  
P.V. Ivanov ◽  
V.V. Marchenko ◽  
E.V. Piitsky ◽  
...  

In this work, the authors studied and compared the two main methods used in dental practice for the automated production of orthopedic structures: the widely used CAD / CAM milling method and the 3D printing technology. As an object of research, temporary crowns were used, which were made on the basis of the same digital model: a) by the method of CAD / CAM milling from polymethylmethacrylate disks; b) by 3D printing from photopolymer resin based on LCD technology. Comparison of production methods and finished designs was carried out according to the following characteristics: strength, durability, aesthetic qualities, accuracy of orthopedic designs, etc. According to the results of the study, it was concluded that 3D printing can be a good alternative to CAD / CAM milling in solving problems of temporary prosthetics.


Author(s):  
Antonio Creta ◽  
Viijayabharathy Kanthasamy ◽  
Richard J. Schilling ◽  
James Rosengarten ◽  
Fakhar Khan ◽  
...  

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