Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

Author(s):  
V. Matvejev ◽  
C. De Tandt ◽  
W. Ranson ◽  
J. Stiens
2019 ◽  
Vol 48 (4) ◽  
pp. 567-581 ◽  
Author(s):  
Jiamin Liu ◽  
Zia Ullah Khan ◽  
Siamak Sarjoghian

Abstract Theory of five kinds of layered structure THz waveguides is presented. In these waveguides, the modified and hybrid THz surface plasmon-polaritons (SPPs) are researched in detail. On these modes, the effects of material in each layer are discussed. The anti-resonant reflecting mechanism is also discussed in these waveguides. The mode characteristics of both TM mode and TE mode are analyzed for guiding TM mode with low loss and TE modes with huge loss in one waveguide: the TE modes filter application is put forward. The mode characteristics for one waveguide have useful sensor applications: for TE1 mode, we find that the low cut-off frequency has a sensitivity (S) to the refractive index of the dielectric slab. The highest S can be 666.7 GHz/RIU when n2 = 1.5, w = 0 and t = 0.1 mm. We believe these results are very useful for designing practical THz devices for SPPs, filter and sensor applications.


Sensors ◽  
2014 ◽  
Vol 14 (3) ◽  
pp. 4585-4598 ◽  
Author(s):  
Amir Heidari ◽  
Yong-Jin Yoon ◽  
Woo-Tae Park ◽  
Pei-Chen Su ◽  
Jianmin Miao ◽  
...  

2016 ◽  
Vol 2016 (CICMT) ◽  
pp. 000011-000017
Author(s):  
Rena Gradmann ◽  
Thomas Seuthe ◽  
Christian Vedder ◽  
Markus Eberstein ◽  
Uwe Partsch

Abstract The ceramic thick-film technology allows the build-up of miniaturised and robust integrated multilayer-circuits and sensors by means of sequential screen-printing and firing of different functional materials. However, the manufacturing of integrated electronics does not succeed if the components are temperature sensitive or too large for the process in a sintering furnace. At present, large components like wind power rotors, axles or roller bearings are monitored by vulnerable hybrid sensor systems. In order to implement the advantages of integrated devices, like the direct surface contact and the high thermomechanical stability, functional ceramic-based materials are adapted or newly developed to accommodate the needs of laser sintering techniques of printed sensor layers on structural components. In a first approach, screen printed thick films on steel components are investigated. The defect-free densification of functional layers crucially depends on the particular material composition in combination with adapted laser treatment. A first generation of functional layers is presented, comprising isolating, conductive, and resistive electrical materials. The films are tested in demonstrator setups and show functional properties comparable to those of the furnace sintering technology. Future aspects of material optimization and the adaption to specific application requirements will be discussed.


2012 ◽  
Vol 184 ◽  
pp. 443-448 ◽  
Author(s):  
C. Schwarz ◽  
D. Heinert ◽  
K. Haughian ◽  
G. Hofmann ◽  
J. Komma ◽  
...  

The paper summarises systematic studies of the mechanical loss of crystalline silicon at low temperatures from 300 to 5 K. Thermo-elastic loss is discussed as a main contribution in thin samples. A numerical method based on a finite element analysis is presented to determine the thermo-elastic loss of arbitrarily shaped samples. Additionally, mechanical loss associated with oxygen is investigated in Czochralski grown silicon bulk samples. The process has the activation energy of about 168 meV. An orientation dependency of the loss is observed. The lowest loss reported in this paper was achieved with a cylindrical bulk sample having a diameter of 110 mm and a length of 200 mm at around 5 K and a resonant frequency of about 22.3 kHz.


2008 ◽  
Vol 16 (12) ◽  
pp. 8845 ◽  
Author(s):  
Shaghik Atakaramians ◽  
Shahraam Afshar V. ◽  
Bernd M. Fischer ◽  
Derek Abbott ◽  
Tanya M. Monro

2009 ◽  
Vol 1240 ◽  
Author(s):  
Li Han ◽  
Anthony Andrady ◽  
Kim Guzan ◽  
David S Ensor

AbstractElectrospun polymer nanofiber materials have attracted tremendous interest in sensor applications as their effective sensing surface area dramatically increases with decreasing fiber diameter. The highly tunable polymer composite chemistry and surface functionality of the nanofiber material provides a wide platform for exploring different applications, such as filtration media, sound isolation materials, and sensor components. This paper presents a nanofiber sensor platform device composed of electrospun polymer/carbon composite nanofibers combined with electrodes directly printed onto the surface of the electrospun fiber mat. This structure forms an integrated sensor system for detecting various chemical vapors including volatile organic compounds (VOCs) and oxidative gases. In this sensor, the composite polymer nanofibers form a chemo-resistor sensing material, and the conductivity of these composite sensing materials varies with chemical vapor exposure. The sensor performance exhibits very stable baselines with dramatically reduced noise levels compared to conventional interdigitated electrodes. Furthermore, the sensor response to different vapors shows a linear relationship between conductivity change and vapor concentration in the range of ppb – ppm for some analytes, including methanol, chloroform and ozone. The sensitivity and selectivity of these sensors to different vapor analytes will also be discussed.


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