Design and control of critical properties of low-k dielectrics for nanoscale interconnects

Background: No study has explored the limitations of current long-term management of hyperkalemia (HK) in outpatient CKD clinics. Methods: We evaluated the association between current therapeutic options and control of serum K (sK) during 12-month follow up in ND-CKD patients stratified in four groups by HK (sK ≥ 5.0 mEq/L) at baseline and month 12: Absent (no-no), Resolving (yes-no), New Onset (no-yes), Persistent (yes-yes). Results: We studied 562 patients (age 66.2 ± 14.5 y; 61% males; eGFR 39.8 ± 21.8 mL/min/1.73 m2, RAASI 76.2%). HK was “absent” in 50.7%, “resolving” in 15.6%, “new onset” in 16.6%, and “persistent” in 17.1%. Twenty-four hour urinary measurements testified adherence to nutritional recommendations in the four groups at either visit. We detected increased prescription from baseline to month 12 of bicarbonate supplements (from 5.0 to 14.1%, p < 0.0001), K-binders (from 2.0 to 7.7%, p < 0.0001), and non-K sparing diuretics (from 34.3 to 41.5%, p < 0.001); these changes were consistent across groups. Similar results were obtained when using higher sK level (≥5.5 mEq/L) to stratify patients. Mixed-effects regression analysis showed that higher sK over time was associated with eGFR < 60, diabetes, lower serum bicarbonate, lower use of non-K sparing diuretics, bicarbonate supplementation, and K-binder use. Treatment-by-time interaction showed that sK decreased in HK patients given bicarbonate (p = 0.003) and K-binders (p = 0.005). Conclusions: This observational study discloses that one-third of ND-CKD patients under nephrology care remain with or develop HK during a 12-month period despite low K intake and increased use of sK-lowering drugs.

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Effects of BEOL Stack on Thermal Mechanical Stress of Cu Lines

MRS Proceedings ◽

10.1557/proc-0914-f08-01 ◽

2006 ◽

Vol 914 ◽

Cited By ~ 5

Author(s):

Seung-Hyun Rhee ◽

Conal E. Murray ◽

Paul R. Besser

Keyword(s):

Thermal Stress ◽

Integrated Circuits ◽

Structural Integrity ◽

Dielectric Material ◽

Dielectric Materials ◽

X Ray Diffraction ◽

And Control ◽

Measurement And Control ◽

Low K

AbstractThe measurement and control of the stress state in BEOL interconnects are important to ensure structural integrity and long term reliability of integrated circuits. Thermal stress in interconnects is determined by the thermal-mechanical properties of Cu lines, substrate, and dielectric materials. The effect of BEOL stacks on thermal stress characteristics of Cu lines were investigated using X-ray diffraction stress measurements. The stress characteristics of M1 and M4 level interconnects in full low-k and low-k/oxide hybrid dielectric stacks were evaluated, and the results indicated reduced substrate confinement and an increased impact of the dielectric material on in-plane stresses in higher level interconnects. The effects of dielectric stack and material properties were examined and the implication in the stresses of multilevel interconnects are discussed.

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Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.5143417 ◽

2020 ◽

Vol 38 (3) ◽

pp. 033005 ◽

Cited By ~ 1

Author(s):

Askar A. Rezvanov ◽

Andrey V. Miakonkikh ◽

Dmitry S. Seregin ◽

Alexey S. Vishnevskiy ◽

Konstantin A. Vorotilov ◽

...

Keyword(s):

Critical Properties ◽

Methyl Group ◽

Plasma Resistance ◽

Low K ◽

Group Concentration

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Control of Metal Alloy Oxidation with Electric Fields

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100071260 ◽

1973 ◽

Vol 31 ◽

pp. 164-165

Author(s):

R. R. Dils ◽

P. S. Follansbee

Keyword(s):

Electric Fields ◽

Oxidation Process ◽

Base Alloy ◽

Oxide Surface ◽

Platinum Electrodes ◽

Insulating Layer ◽

Iron Base Alloy ◽

Alloy Oxidation ◽

Aluminum Oxide Layer ◽

And Control

Electric fields have been applied across oxides growing on a high temperature alloy and control of the oxidation of the material has been demonstrated. At present, three-fold increases in the oxidation rate have been measured in accelerating fields and the oxidation process has been completely stopped in a retarding field.The experiments have been conducted with an iron-base alloy, Pe 25Cr 5A1 0.1Y, although, in principle, any alloy capable of forming an adherent aluminum oxide layer during oxidation can be used. A specimen is polished and oxidized to produce a thin, uniform insulating layer on one surface. Three platinum electrodes are sputtered on the oxide surface and the specimen is reoxidized.

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Evidence for a Blood Ganglion Barrier in the Superior Cervical Ganglion of the Rat

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100053681 ◽

1982 ◽

Vol 40 ◽

pp. 204-204

Author(s):

D. M. DePace

Keyword(s):

Blood Vessels ◽

Superior Cervical Ganglion ◽

Peripheral Nerves ◽

Time Schedule ◽

Transmission Electron ◽

Cervical Ganglion ◽

The Central Nervous System ◽

Cervical Ganglia ◽

Capillary Circulation ◽

And Control

The majority of blood vessels in the superior cervical ganglion possess a continuous endothelium with tight junctions. These same features have been associated with the blood brain barrier of the central nervous system and peripheral nerves. These vessels may perform a barrier function between the capillary circulation and the superior cervical ganglion. The permeability of the blood vessels in the superior cervical ganglion of the rat was tested by intravenous injection of horseradish peroxidase (HRP). Three experimental groups of four animals each were given intravenous HRP (Sigma Type II) in a dosage of.08 to.15 mg/gm body weight in.5 ml of.85% saline. The animals were sacrificed at five, ten or 15 minutes following administration of the tracer. Superior cervical ganglia were quickly removed and fixed by immersion in 2.5% glutaraldehyde in Sorenson's.1M phosphate buffer, pH 7.4. Three control animals received,5ml of saline without HRP. These were sacrificed on the same time schedule. Tissues from experimental and control animals were reacted for peroxidase activity and then processed for routine transmission electron microscopy.

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Effects of renovascular hypertension on rat adrenal zona glomerulosa

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100083783 ◽

1978 ◽

Vol 36 (2) ◽

pp. 582-583

Author(s):

G. Mazzocchi ◽

P. Rebuffat ◽

C. Robba ◽

P. Vassanelli ◽

G. G. Nussdorfer

Keyword(s):

Renovascular Hypertension ◽

Left Kidney ◽

Renin Angiotensin System ◽

Plasma Renin ◽

Zona Glomerulosa ◽

Ultrastructural Changes ◽

Albino Rats ◽

Left Renal Artery ◽

Angiotensin System ◽

And Control

It is well known that the rat adrenal zona glomerulosa steroidogenic activity is controlled by the renin-angiotensin system. The ultrastructural changes in the rat zona glomerulosa cells induced by renovascular hypertension were described previously, but as far as we are aware no correlated biochemical and morphometric investigations were performed.Twenty adult male albino rats were divided into 2 experimental groups. One group was subjected to restriction of blood flow to the left kidney by the application of a silver clip about the left renal artery. The other group was sham-operated and served as a control. Renovascular hypertension developed in about 10 days: sistolic blood pressure averaged 165 ± 6. 4 mmHg, whereas it was about 110 ± 3. 8 mmHg in the control animals. The hypertensive and control rats were sacrificed 20 days after the operation. The blood was collected and plasma renin activity was determined by radioimmunological methods. The aldosterone concentration was radioimmunologically assayed both in the plasma and in the homogenate of the left capsular adrenal gland.

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X-Ray Replication of Submicrometer Linewidth Patterns

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100078250 ◽

1977 ◽

Vol 35 ◽

pp. 136-137

Author(s):

Henry I. Smith ◽

D.C. Flanders

Keyword(s):

Electron Beam Lithography ◽

Cross Sectional ◽

X Ray ◽

Electron Backscattering ◽

Spatial Frequencies ◽

Cross Sectional Profile ◽

Carbon Foils ◽

Sectional Profile ◽

And Control ◽

Soft Radiation

Scanning electron beam lithography has been used for a number of years to write submicrometer linewidth patterns in radiation sensitive films (resist films) on substrates. On semi-infinite substrates, electron backscattering severely limits the exposure latitude and control of cross-sectional profile for patterns having fundamental spatial frequencies below about 4000 Å(l),Recently, STEM'S have been used to write patterns with linewidths below 100 Å. To avoid the detrimental effects of electron backscattering however, the substrates had to be carbon foils about 100 Å thick (2,3). X-ray lithography using the very soft radiation in the range 10 - 50 Å avoids the problem of backscattering and thus permits one to replicate on semi-infinite substrates patterns with linewidths of the order of 1000 Å and less, and in addition provides means for controlling cross-sectional profiles. X-radiation in the range 4-10 Å on the other hand is appropriate for replicating patterns in the linewidth range above about 3000 Å, and thus is most appropriate for microelectronic applications (4 - 6).

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Ultrastructural changes in sciatic nerve tissue: Effects of passive maternal smoking

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100076858 ◽

1983 ◽

Vol 41 ◽

pp. 650-651

Author(s):

Amankwah K.S. ◽

A.D. Weberg ◽

R.C. Kaufmann

Keyword(s):

Sciatic Nerve ◽

Maternal Smoking ◽

Ultrastructural Level ◽

Uranyl Acetate ◽

Nerve Tissue ◽

Ultrastructural Changes ◽

Cacodylate Buffer ◽

And Control ◽

Spontaneous Delivery

Previous research has revealed that passive (involuntary inhalation) tobacco smoking during gestation can have adverse effects upon the developing fetus. These prior investigations did not concentrate on changes in fetal morphology. This study was undertaken to delineate fetal neural abnormalities at the ultrastructural level in mice pups exposed in utero to passive maternal smoking.Pregnant study animals, housed in a special chamber, were subjected to cigarette smoke daily from conception until delivery. Blood tests for determination of carbon monoxide levels were run at 15-18 days gestation. Sciatic nerve tissue from experimental and control animals were obtained following spontaneous delivery and fixed in 2.5% gluteraldehyde in 0.1M cacodylate buffer pH 7.3. The samples were post-fixed in osmium ferrocyanide (1:1 mixture of 1.5% aqueous OSO4 and 2.5% K4 Fe(CN)6). Following dehydration, the tissues were infiltrated with and embedded in Spurr. Sections were stained with uranyl acetate and lead citrate.

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A Superconducting Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100064104 ◽

1971 ◽

Vol 29 ◽

pp. 10-11 ◽

Cited By ~ 1

Author(s):

R. E. Worsham ◽

J. E. Mann ◽

E. G. Richardson

Keyword(s):

Liquid Helium ◽

Focal Length ◽

Vacuum System ◽

Objective Lens ◽

Electrical Instability ◽

Radiation Shields ◽

And Control ◽

Thermal Oscillations ◽

Flux Pump

This superconducting microscope, Figure 1, was first operated in May, 1970. The column, which started life as a Siemens Elmiskop I, was modified by removing the objective and intermediate lenses, the specimen chamber, and the complete vacuum system. The large cryostat contains the objective lens and stage. They are attached to the bottom of the 7-liter helium vessel and are surrounded by two vapor-cooled radiation shields.In the initial operational period 5-mm and 2-mm focal length objective lens pole pieces were used giving magnification up to 45000X. Without a stigmator and precision ground pole pieces, a resolution of about 50-100Å was achieved. The boil-off rate of the liquid helium was reduced to 0.2-0.3ℓ/hour after elimination of thermal oscillations in the cryostat. The calculated boil-off was 0.2ℓ/hour. No effect caused by mechanical or electrical instability was found. Both 4.2°K and 1.7-1.9°K operation were routine. Flux pump excitation and control of the lens were quite smooth, simple, and, apparently highly stable. Alignment of the objective lens proved quite awkward, however, with the long-thin epoxy glass posts used for supporting the lens.

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