Thin film low voltage RF MEMS shunt capacitive switches using AlN dielectric
2011 ◽
Vol 59
(7)
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pp. 1746-1752
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2012 ◽
Vol 132
(9)
◽
pp. 282-287
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Keyword(s):
2016 ◽
Vol 63
(12)
◽
pp. 5060-5063
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Keyword(s):
2021 ◽
Vol 32
(7)
◽
pp. 8347-8353
Keyword(s):