Al/Si back contact with improved resistivity and contact resistance by an optimized RTP temperature-time profile

Author(s):  
M. Muehlbauer ◽  
V. Gazuz ◽  
R. Auer ◽  
T. Mueller ◽  
W. R. Fahrner
2014 ◽  
Vol 120 ◽  
pp. 412-416 ◽  
Author(s):  
Seung-Yoon Lee ◽  
Hongsik Choi ◽  
Hongmei Li ◽  
Kwangsun Ji ◽  
Seunghoon Nam ◽  
...  

2011 ◽  
Vol 679-680 ◽  
pp. 816-819 ◽  
Author(s):  
Amador Pérez-Tomás ◽  
A. Fontserè ◽  
Marcel Placidi ◽  
N. Baron ◽  
Sébastien Chenot ◽  
...  

The temperature dependence of Ohmic contacts to GaN devices is investigated in this paper via by measuring TLM contact resistances TLM vs Tas a function of temperature. measurements. In particular, the two types of Ohmic contacts are considered: (1) Contacts to highly doped implanted regions (such as the MOSFET drain/source contacts or the back contact of Schottky diodes) and (2) contacts to the 2 dimensional electron gas (2DEG) of an AlGaN/GaN heterojunction.


2002 ◽  
Vol 755 ◽  
Author(s):  
Ilan Golecki ◽  
Karen Fuentes ◽  
Terence Walker

ABSTRACTA methodology is described for protecting Carbon-Carbon fiber-matrix composite (C-C) components from oxidation for extended use in oxidizing ambients for lifetimes of the order of 10,000 hours, from room temperature to 650°C. This time-temperature profile is relevant to applications such as airborne heat exchangers. Weight changes of oxidation-protected, pitch-fiber based C-C coupons in flowing dry air at 650°C are presented. Two types of external protective approaches are compared: (a) multi-phase, borophosphate-based fluidizing overseal coatings applied directly to C-C, and (b) the same overseal coatings applied to CVD SiOxCy coated C-C. The latter, dual-coating approach provides an effective engineering solution for the above temperature-time profile and is particularly applicable to thin (0.1–3 mm thick), complex-shaped articles. The behavior of inert substrates (oxidized silicon) with the same overseal coatings is compared to the behavior of the C-C substrates. This approach can be applied with optional modifications to suit other environmental conditions, and other carbon-containing materials, such as carbon foams and C-SiC composites.


1994 ◽  
Vol 350 ◽  
Author(s):  
M. T. Kush ◽  
J. W. Holmes ◽  
R. Gibala

AbstractInduction heating of disk shaped specimens was used to compare and contrast the thermal fatigue behavior of MoSi2 and MoSi2-based composites. Specimens were subjected to 5 s heating and cooling cycles between temperature limits of 700°C and 1200°C. The monolithic material and a MoSi2- 10 vol% TiC composite exhibited poor thermal shock resistance and could not be thermally cycled according to this temperature-time profile. A 30 vol% TiC composite exhibited much better thermal shock and thermal fatigue resistance as compared to the monolithic material, but exhibited undesirable oxidation. MoSi2-10 and 30 vol% SiC particulate composites exhibited excellent thermal shock and thermal fatigue resistance compared to that of the monolithic material. A MoSi2-10 vol% SiC whisker composite did not show improved thermal fatigue resistance due to the initial processing defects present in the material. The monolithic material and the 10 vol% TiC composite were also subjected to 30 s heating and cooling cycles between temperature limits of 700°C and 1200°C. Both of these materials exhibited better thermal fatigue resistance at this temperature-time profile, but the 10 vol% TiC composite also exhibited undesirable oxidation. The fatigue results are discussed with reference to the initial microstructure of the specimens and the stress-strain history of the specimens which was obtained by a thermoelastic finite element analysis.


2012 ◽  
Vol 2012 ◽  
pp. 1-6
Author(s):  
S. Mousavi Nasab ◽  
M. Aboutalebi ◽  
S. H. Seyedein ◽  
A. Molavi Kakhki ◽  
J. Vahdati Khaki

Single-phase NiTi was fabricated through the thermal explosion mode of combustion synthesis of mechanically activated powders. Combustion and ignition temperatures of combustion synthesis were investigated in different milling times. In this process, equiatomic powder mixtures of nickel and titanium were activated by planetary ball mill and pressed into disk-shaped pellets then heated in a tube furnace, while temperature-time profile was recorded. X-ray diffraction analysis (XRD) was performed on milled powders as well as synthesized samples. Scanning electron microscopy (SEM) was also used to study the microstructural evolution during milling. The results showed that there was a threshold milling time to obtain single-phase NiTi. It was also seen that the ignition temperature and combustion temperature were reduced significantly by increasing milling time.


2009 ◽  
Vol 41 (2) ◽  
pp. 125-133 ◽  
Author(s):  
M.G. Bothara ◽  
P. Vijay ◽  
S.V. Atre ◽  
S.J. Park ◽  
R.M. German ◽  
...  

Plasma pressure compaction (P2C) is a novel sintering technique that enables the consolidation of silicon carbide with a nanoscale microstructure at a relatively low temperature. To achieve a high final density with optimized mechanical properties, the effects of various sintering factors pertaining to the temperature-time profile and pressure were characterized. This paper reports a design of experiment approach used to optimize the processing for a 100 nm SiC powder focused on four sintering factors: temperature, time, pressure, and heating rate. Response variables included the density and mechanical properties. A L9 orthogonal array approach that includes the signal-to-noise (S/N) ratio and analysis of variance (ANOVA) was employed to optimize the processing factors. All of the sintering factors have significant effect on the density and mechanical properties. A final density of 98.1% was achieved with a temperature of 1600?C, hold time of 30 min, pressure of 50 MPa, and heating rate of 100?C/min. The hardness reached 18.4 GPa with a fracture toughness of 4.6 MPa?m, and these are comparable to reports from prior studies using higher consolidation temperatures.


2019 ◽  
Vol 203 ◽  
pp. 110201 ◽  
Author(s):  
Siddhartha Garud ◽  
Cham Thi Trinh ◽  
Holger Rhein ◽  
Sven Kühnapfel ◽  
Stefan Gall ◽  
...  

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