A Front-Side Micro-Fabricated Tiny-Size Thermoresistive Gas Flow Sensor with Low Cost, High Sensitivity, and Quick Response

2019 ◽  
Author(s):  
Dan Xue ◽  
Wei Zhou ◽  
Zao Ni ◽  
Jiachou Wang ◽  
Xinxin Li
Keyword(s):  
Gas Flow ◽  
Low Cost ◽  
High Sensitivity ◽  
Flow Sensor ◽  
Quick Response ◽  
Front Side

scholarly journals A Front-Side Microfabricated Thermoresistive Gas Flow Sensor for High-Performance, Low-Cost and High-Yield Volume Production

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 205
Author(s):  
Dan Xue ◽  
Jiachou Wang ◽  
Xinxin Li
Keyword(s):  
High Performance ◽  
Gas Flow ◽  
Low Cost ◽  
Type A ◽  
Flow Sensor ◽  
High Yield ◽  
Type B ◽  
Front Side ◽  
Single Side ◽  
Volume Production

In this paper, we present a novel thermoresistive gas flow sensor with a high-yield and low-cost volume production by using front-side microfabricated technology. To best improve the thermal resistance, a micro-air-trench between the heater and the thermistors was opened to minimize the heat loss from the heater to the silicon substrate. Two types of gas flow sensors were designed with the optimal thermal-insulation configuration and fabricated by a single-wafer-based single-side process in (111) wafers, where the type A sensor has two thermistors while the type B sensor has four. Chip dimensions of both sensors are as small as 0.7 mm × 0.7 mm and the sensors achieve a short response time of 1.5 ms. Furthermore, without using any amplification, the normalized sensitivity of type A and type B sensors is 1.9 mV/(SLM)/mW and 3.9 mV/(SLM)/mW for nitrogen gas flow and the minimum detectable flow rate is estimated at about 0.53 and 0.26 standard cubic centimeter per minute (sccm), respectively.

Research on Micromechanical Machining Technology of Micro-Flow Sensor

2013 ◽  
Vol 273 ◽  
pp. 555-559
Author(s):  
Hui Lv ◽  
Shi Bin Liu
Keyword(s):  
Low Cost ◽  
High Sensitivity ◽  
Operating Principle ◽  
Flow Sensor ◽  
Good Stability ◽  
Basic Knowledge ◽  
Paper Briefly ◽  
Technology Application ◽  
Wide Range ◽  
Micro Flow

The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.

scholarly journals Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Sensors ◽  
2021 ◽  
Vol 21 (12) ◽  
pp. 4088
Author(s):  
Andi Setiono ◽  
Michael Fahrbach ◽  
Alexander Deutschinger ◽  
Ernest J. Fantner ◽  
Christian H. Schwalb ◽  
...  
Keyword(s):  
Cigarette Smoke ◽  
Simple Procedure ◽  
Low Cost ◽  
High Sensitivity ◽  
Smoke Exposure ◽  
Cigarette Smoke Exposure ◽  
Quick Response ◽  
Physical Chemical ◽  
Resonance Sensor ◽  
Good Agreement

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors.

scholarly journals An Anti-Counterfeiting Architecture for Traceability System Based on Modified Two-Level Quick Response Codes

Electronics ◽  
2021 ◽  
Vol 10 (3) ◽  
pp. 320
Author(s):  
Shundao Xie ◽  
Hong-Zhou Tan
Keyword(s):  
Product Life Cycle ◽  
Low Cost ◽  
Prototype System ◽  
Qr Code ◽  
Quick Response ◽  
Copy Detection ◽  
Traceability System ◽  
Scanned Image ◽  
Promising Solution ◽  
Product Package

Traceability is considered a promising solution for product safety. However, the data in the traceability system is only a claim rather than a fact. Therefore, the quality and safety of the product cannot be guaranteed since we cannot ensure the authenticity of products (aka counterfeit detection) in the real world. In this paper, we focus on counterfeit detection for the traceability system. The risk of counterfeiting throughout a typical product life cycle in the supply chain is analyzed, and the corresponding requirements for the tags, packages, and traceability system are given to eliminate these risks. Based on the analysis, an anti-counterfeiting architecture for traceability system based on two-level quick response codes (2LQR codes) is proposed, where the problem of counterfeit detection for a product is transformed into the problem of copy detection for the 2LQR code tag. According to the characteristics of the traceability system, the generation progress of the 2LQR code is modified, and there is a corresponding improved algorithm to estimate the actual location of patterns in the scanned image of the modified 2LQR code tag to improve the performance of copy detection. A prototype system based on the proposed architecture is implemented, where the consumers can perform traceability information queries by scanning the 2LQR code on the product package with any QR code reader. They can also scan the 2LQR code with a home-scanner or office-scanner, and send the scanned image to the system to perform counterfeit detection. Compared with other anti-counterfeiting solutions, the proposed architecture has advantages of low cost, generality, and good performance. Therefore, it is a promising solution to replace the existing anti-counterfeiting system.

scholarly journals Integrating high-performing electrochemical transducers in lateral flow assay

2021 ◽  
Author(s):  
Antonia Perju ◽  
Nongnoot Wongkaew
Keyword(s):  
High Performance ◽  
Point Of Care ◽  
Low Cost ◽  
High Sensitivity ◽  
Lateral Flow ◽  
Analytical Performance ◽  
Label Free ◽  
High Performing ◽  
Lateral Flow Assays ◽  
Electrochemical Transducers

AbstractLateral flow assays (LFAs) are the best-performing and best-known point-of-care tests worldwide. Over the last decade, they have experienced an increasing interest by researchers towards improving their analytical performance while maintaining their robust assay platform. Commercially, visual and optical detection strategies dominate, but it is especially the research on integrating electrochemical (EC) approaches that may have a chance to significantly improve an LFA’s performance that is needed in order to detect analytes reliably at lower concentrations than currently possible. In fact, EC-LFAs offer advantages in terms of quantitative determination, low-cost, high sensitivity, and even simple, label-free strategies. Here, the various configurations of EC-LFAs published are summarized and critically evaluated. In short, most of them rely on applying conventional transducers, e.g., screen-printed electrode, to ensure reliability of the assay, and additional advances are afforded by the beneficial features of nanomaterials. It is predicted that these will be further implemented in EC-LFAs as high-performance transducers. Considering the low cost of point-of-care devices, it becomes even more important to also identify strategies that efficiently integrate nanomaterials into EC-LFAs in a high-throughput manner while maintaining their favorable analytical performance.

scholarly journals 60–700 K CTAT and PTAT Temperature Sensors with 4H-SiC Schottky Diodes

Sensors ◽  
2021 ◽  
Vol 21 (3) ◽  
pp. 942
Author(s):  
Razvan Pascu ◽  
Gheorghe Pristavu ◽  
Gheorghe Brezeanu ◽  
Florin Draghici ◽  
Philippe Godignon ◽  
...  
Keyword(s):  
Low Cost ◽  
Schottky Diodes ◽  
Schottky Contact ◽  
High Sensitivity ◽  
Xrd Analysis ◽  
Absolute Temperature ◽  
Lower Sensitivity ◽  
Readout Circuit ◽  
Sensing Element ◽  
High Performing

A SiC Schottky dual-diode temperature-sensing element, suitable for both complementary variation of VF with absolute temperature (CTAT) and differential proportional to absolute temperature (PTAT) sensors, is demonstrated over 60–700 K, currently the widest range reported. The structure’s layout places the two identical diodes in close, symmetrical proximity. A stable and high-barrier Schottky contact based on Ni, annealed at 750 °C, is used. XRD analysis evinced the even distribution of Ni2Si over the entire Schottky contact area. Forward measurements in the 60–700 K range indicate nearly identical characteristics for the dual-diodes, with only minor inhomogeneity. Our parallel diode (p-diode) model is used to parameterize experimental curves and evaluate sensing performances over this far-reaching domain. High sensitivity, upwards of 2.32 mV/K, is obtained, with satisfactory linearity (R2 reaching 99.80%) for the CTAT sensor, even down to 60 K. The PTAT differential version boasts increased linearity, up to 99.95%. The lower sensitivity is, in this case, compensated by using a high-performing, low-cost readout circuit, leading to a peak 14.91 mV/K, without influencing linearity.

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