Stochastic Analysis of a Nonlinear MEMS Force Sensor
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In this paper, a sensing technique, based on the detection of Hopf bifurcation in the dynamic of a micro-bridge, is proposed. The governing equations of motion are derived, which take into account the fringe and large deflection effects. Moreover, a stochastic analysis approach is proposed for investigating the reliability of the sensor readings. It has been demonstrated that sensitivity of more than 2mV/μN is achievable with this sensing technique.
2003 ◽
Vol 125
(1)
◽
pp. 12-17
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2016 ◽
Vol 5
(1)
◽
pp. 29
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