Characterization of Static Behavior of a Nonlinear Doubly Clamped Microbeam Under Electrostatic Actuation and Detection

2013 ◽  
Author(s):  
Mohammad Taghi Ahmadian ◽  
Mahdi Mojahedi ◽  
Ahmad Barari ◽  
Keikhosrow Firoozbakhsh
Keyword(s):  
Differential Equations ◽  
Decomposition Method ◽  
Static Deflection ◽  
Static Response ◽  
Electrostatic Forces ◽  
Static Behavior ◽  
Dc Voltage ◽  
Electrostatically Actuated ◽  
Fringing Fields

In this study, the static deflection and pull-in instability of the doubly clamped microbeam with a mass attached to its midpoint are investigated. Nonlinear electrostatic forces, fringing fields, base rotation and mid-plane stretching of the beam in this model are considered. First, a system of two nonlinear integro-differential equations are expressed in partial derivatives which describe coupled flexural-flexural motion of electrostatically actuated microbeam gyroscopes under rotation. Then static deflection and pull-in instability of the microgyroscopes acted upon by DC voltages in both (direction and sensing) directions are studied. The equations of static motion are reduced by Galerkin’s decomposition method. The static response of the microgyroscope to variations in the DC voltage across the drive and sense electrodes is obtained.

Static Deflection and Pull-In Instability of the Electrostatically Actuated Bilayer Microcantilever Beams

2015 ◽  
Vol 07 (06) ◽  
pp. 1550090 ◽  
Author(s):  
M. Mojahedi ◽  
M. Rahaeifard
Keyword(s):  
Scale Parameter ◽  
Couple Stress Theory ◽  
Beam Theory ◽  
Modified Couple Stress Theory ◽  
Length Scale Parameter ◽  
Length Scale ◽  
Static Deflection ◽  
Static Behavior ◽  
Stress Theory ◽  
Electrostatically Actuated

This paper deals with the static behavior of an electrostatically actuated bilayered microswitch on the basis of the modified couple stress theory. The beam is modeled using Euler–Bernoulli beam theory and equivalent elastic modulus and length scale parameter are presented for the bilayer beam. Static deflection and pull-in voltage of the beam is calculated using numerical and analytical methods. The numerical method is based on an iterative approach while the homotopy perturbation method (HPM) is utilized for the analytical simulation. Results show that there is a very good agreement between these methods even in the vicinity of the pull-in instability. Moreover, the effects of different parameters such as thicknesses of layers and length scale parameter on the static deflection and instability of the microcantilever are studied. Results show that for the cases with the equivalent length scale parameter comparable to the thickness of beam, the size-dependency plays significant roles in the static behavior of the bilayer microcantilevers.

scholarly journals A comparison of Adomian decomposition method and RK4 algorithm on Volterra integro differential equations of 2nd kind

2015 ◽  
Vol 4 (4) ◽  
pp. 481
Author(s):  
Kekana M.C ◽  
Shatalov M.Y ◽  
Moshokoa S.P
Keyword(s):  
Differential Equations ◽  
Infinite Series ◽  
Decomposition Method ◽  
Adomian Decomposition Method ◽  
Numerical Results ◽  
Adomian Decomposition

In this paper, Volterra Integro differential equations are solved using the Adomian decomposition method. The solutions are obtained in form of infinite series and compared to Runge-Kutta4 algorithm. The technique is described and illustrated with examples; numerical results are also presented graphically. The software used in this study is mathematica10.

scholarly journals Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry

2014 ◽  
Vol 1 (1) ◽  
Author(s):  
G. Tosolini ◽  
J. M. Michalik ◽  
R. Córdoba ◽  
J. M. de Teresa ◽  
F. Pérez-Murano ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Room Temperature ◽  
Signal To Noise Ratio ◽  
Static Deflection ◽  
Magnetic Structures ◽  
Dual Beam ◽  
Piezoresistive Cantilevers ◽  
Good Signal ◽  
The Magnetic Field

AbstractWe present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.

MEMS Microresonators Based on Nanocrystalline Silicon

2004 ◽  
Vol 808 ◽  
Author(s):  
J. Gaspar ◽  
T. Adrega ◽  
V. Chu ◽  
J. P. Conde
Keyword(s):  
Energy Dissipation ◽  
Chemical Vapor ◽  
Nanocrystalline Silicon ◽  
Quality Factors ◽  
Electrostatically Actuated ◽  
Glass Substrates ◽  
Boron Doped ◽  
Resonance Frequencies ◽  
Geometrical Dimensions

ABSTRACTThis paper describes the fabrication and characterization of thin-film nanocrystalline silicon microresonators processed at temperatures below 110°C on glass substrates. The microelectromechanical structures consist of surface micromachined bridges of boron-doped hydrogenated nanocrystalline silicon (p+-nc-Si:H) deposited at 100°C by hot-wire chemical vapor deposition (HWCVD). The microbridges, which are suspended over an Al gate electrode, are electrostatically actuated and the mechanical resonance is detected in vacuum using an optical setup. The resonance frequency and energy dissipation in p+-nc-Si:H based resonators are studied as a function of the geometrical dimensions of the microstructures. Resonance frequencies between 700 kHz and 36 MHz and quality factors as high as 2000 are observed. A Young's modulus of 160 GPa for the structural bridge film is extracted from the experimental data using an electromechanical model and the main intrinsic energy dissipation mechanisms in nc-Si:H microresonators are discussed.

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