Rolling Friction in MEMS Ball Bearings: The Effects of Loading and Solid Film Lubrication
The effects of loading and solid film lubrication on rolling friction in MEMS-fabricated ball bearing structures are investigated in this paper. An in-situ non-contact experimental procedure was used to measure the frictional forces transmitted through a linear ball bearing system. The test devices consist of two silicon plates with deep-etched rectangular trenches acting as the housing for 285μm diameter steel microballs. The dynamic friction is measured with respect to relative velocity for several normal loads and it is observed that the frictional force increases linearly with microball contact area. Additionally, test structures with a 1μm silicon carbide (SiC) film deposited in the trenches have been tested. A 70% reduction in rolling resistance is shown between the nonlubricated and the SiC-lubricated test structures under identical experimental conditions. This is attributed to the reduced sliding friction in the SiC-steel contact area during interfacial slipping. To the best of our knowledge this is the first reported characterization of dynamic rolling friction in a MEMS device using a solid film lubricant. It is assumed that all frictional forces measured in this work are due to the desired rolling motion as well as bulk sliding of the microballs.