Fractional-Order Variable-Gain Super-Twisting Control With Application to Wafer Stages of Photolithography Systems

Author(s):  
Zhian Kuang ◽  
Liting Sun ◽  
Huijun Gao ◽  
Masayoshi Tomizuka

Abstract In this paper, a novel fractional-order variable-gain super-twisting control (FVSTC) scheme is proposed and applied to improve the tracking performance of wafer stages in the photolithography systems. The FVSTC overcomes the drawbacks of the super-twisting control (STC) such as slow response speed and incomplete compensation to disturbances. First, to improve the dynamics of the states on the sliding surface, a fractional-order sliding surface is designed. Moreover, to improve the dynamics of the sliding mode variable, an equivalent-control-based method is utilized, and a switching controller based on a variable-gain super-twisting algorithm is deployed. Via such designed schemes, the proposed controller is robust against external disturbances and model uncertainties. Stability proof of the closed-loop system is provided. Numerical simulations to track a sinusoidal signal and experiments on a wafer stage testbed are conducted. The results show that the proposed FVSTC scheme can achieve much better tracking performance than conventional methods.

2018 ◽  
Vol 10 (10) ◽  
pp. 168781401880493 ◽  
Author(s):  
Reesa Akbar ◽  
Naoki Uchiyama

Quadrotor unmanned aerial vehicle is a nonlinear system of 6-degree-of-freedom motion. In order to handle the nonlinearity that causes undesirable behavior, robustness of flight control has been studied. In this work, we consider the combination of higher order sliding mode control and nonlinear time-varying sliding surface for robustness and accuracy in tracking. An adaptive super-twisting control, a second-order sliding mode control, is utilized to compensate for the uncertainty and perturbation of a quadrotor system. A time-varying sliding surface is designed with a nonlinear function to provide varying properties of closed-loop dynamics and to improve control performance with energy consumption reduction. The proposed control system performance including energy consumption was compared among nonlinear adaptive super-twisting control algorithm, linear adaptive super-twisting control algorithm, and linear super twisting controllers, without and under wind disturbance. The robustness and effectiveness of the proposed control system are demonstrated by several times simulation and experiment using a quadrotor helicopter test bed.


Author(s):  
Manas Kr. Bera ◽  
Bijnan Bandyopadhyay ◽  
A. K. Paul

Quality control is the key issue that needs to be addressed in any gas metal arc welding (GMAW) system, especially in robotic pipeline welding system. This paper explores a second-order sliding mode control (SMC) strategy—a variable gain super-twisting control, to maximize the productivity, consistency in welding quality. This is achieved by the robust finite time output tracking of GMAW system. A nonlinear multi-input multi-output (MIMO) model of GMAW system has been considered here for the design of variable gain super-twisting (VGST) controller by which complete rejection of the bounded uncertainties/disturbances is possible and the adaptive characteristic of its gains help to use the control effort effectively. The stability of internal dynamics of the system is studied to establish the feasibility of solving the robust finite time output tracking problem. The stability of the overall system has been analyzed using Lyapunov stability criterion. The performance of the controller is demonstrated using the model of the system emulating the realistic conditions of operation. The simulation results are presented to illustrate the efficacy of the controller.


2012 ◽  
Vol 2012 ◽  
pp. 1-33 ◽  
Author(s):  
Jiacai Huang ◽  
Hongsheng Li ◽  
YangQuan Chen ◽  
Qinghong Xu

A new robust fractional-order sliding mode controller (FOSMC) is proposed for the position control of a permanent magnet synchronous motor (PMSM). The sliding mode controller (SMC), which is insensitive to uncertainties and load disturbances, is studied widely in the application of PMSM drive. In the existing SMC method, the sliding surface is usually designed based on the integer-order integration or differentiation of the state variables, while in this proposed robust FOSMC algorithm, the sliding surface is designed based on the fractional-order calculus of the state variables. In fact, the conventional SMC method can be seen as a special case of the proposed FOSMC method. The performance and robustness of the proposed method are analyzed and tested for nonlinear load torque disturbances, and simulation results show that the proposed algorithm is more robust and effective than the conventional SMC method.


2019 ◽  
Vol 2019 ◽  
pp. 1-13 ◽  
Author(s):  
Peng Gao ◽  
Guangming Zhang ◽  
Huimin Ouyang ◽  
Lei Mei

A novel sliding mode controller (SMC) with nonlinear fractional order PID sliding surface based on a novel extended state observer for the speed operation of a surface-mounted permanent magnet synchronous motor (SPMSM) is proposed in this paper. First, a new smooth and derivable nonlinear function with improved continuity and derivative is designed to replace the traditional nonderivable nonlinear function of the nonlinear state error feedback control law. Then, a nonlinear fractional order PID sliding mode controller is proposed on the basis of the fractional order PID sliding surface with the combination of the novel nonlinear state error feedback control law to improve dynamic performance, static performance, and robustness of the system. Furthermore, a novel extended state observer is designed based on the new nonlinear function to achieve dynamic feedback compensation for external disturbances. Stability of the system is proved based on the Lyapunov stability theorem. The corresponding comparative simulation results demonstrate that the proposed composite control algorithm displays good stability, dynamic properties, and strong robustness against external disturbances.


2020 ◽  
Vol 32 ◽  
pp. 01004
Author(s):  
Rupak Rokade ◽  
Deepti Khimani

This article presents the implementation results of second order sliding mode control (SOSM) for magnetic levitation system. In practical systems, especially when the actuators are electro-mechanical, the conventional (first order) sliding mode control can not be used effectively as it exhibits chattering, which is highly undesirable. Therefore, for such systems, sliding mode control of higher order can be a suitable choice as the reduce the chattering significantly. In this article the super-twisting control, which isa second order sliding mode control, is designed and implemented for the experimental setup of Maglev system, Model 730 developed by ECP systems.


2020 ◽  
Vol 4 (4) ◽  
pp. 50
Author(s):  
Xuefeng Zhang ◽  
Wenkai Huang

This paper focuses on the sliding mode control (SMC) problem for a class of uncertain singular fractional order systems (SFOSs). The uncertainties occur in both state and derivative matrices. A radial basis function (RBF) neural network strategy was utilized to estimate the nonlinear terms of SFOSs. Firstly, by expanding the dimension of the SFOS, a novel sliding surface was constructed. A necessary and sufficient condition was given to ensure the admissibility of the SFOS while the system state moves on the sliding surface. The obtained results are linear matrix inequalities (LMIs), which are more general than the existing research. Then, the adaptive control law based on the RBF neural network was organized to guarantee that the SFOS reaches the sliding surface in a finite time. Finally, a simulation example is proposed to verify the validity of the designed procedures.


2018 ◽  
Vol 2018 ◽  
pp. 1-9 ◽  
Author(s):  
Chenhui Wang

Some sufficient conditions, which are valid for stability check of fractional-order nonlinear systems, are given in this paper. Based on these results, the synchronization of two fractional-order chaotic systems is investigated. A novel fractional-order sliding surface, which is composed of a synchronization error and its fractional-order integral, is introduced. The asymptotical stability of the synchronization error dynamical system can be guaranteed by the proposed fractional-order sliding mode controller. Finally, two numerical examples are given to show the feasibility of the proposed methods.


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