X-ray reflectometry and x-ray fluorescence monitoring of the atomic layer deposition process for high-k gate dielectrics
2005 ◽
Vol 23
(5)
◽
pp. 2244
◽
Keyword(s):
X Ray
◽
2014 ◽
Vol 78
◽
pp. 1243-1253
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2020 ◽
Vol 38
(2)
◽
pp. 022418
2011 ◽
Vol 171
(1)
◽
pp. 345-349
◽
2018 ◽
Vol 57
(6S2)
◽
pp. 06JF05
◽