Influence of the electrode material on HfO[sub 2] metal-insulator-metal capacitors

ABSTRACTMetal-insulator-metal (MIM) resistive switching devices are being pursued for a number of applications, including non-volatile memory and high density/low power computing. Reported resistive switching devices vary greatly in the choice of metal oxide and electrode material. Importantly, the choice of both the metal oxide and electrode material can have significant impact on device performance, their ability to switch, and the mode of switching (unipolar, bipolar, nonpolar) that results. In this study, three metal oxides (Cu2O, HfOx, and TiOx) were deposited onto copper bottom electrodes (BEs). Four different top electrode (TE) materials (Ni, Au, Al, and Pt) were then fabricated on the various metal oxides to form MIM structures. Devices were then characterized electrically to determine switching performance and behavior. Our results show that the metal TE plays a large role in determining whether or not the MIM structure will switch resistively and what mode of switching (unipolar, bipolar, or non-polar) is observed.

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Modeling, Fabrication, and Electrical Testing of Metal-Insulator-Metal Diode

10.21236/ada553952 ◽

2011 ◽

Cited By ~ 4

Author(s):

Terrance O'Regan ◽

Matthew Chin ◽

Cheng Tan ◽

Anthony Birdwell

Keyword(s):

Metal Insulator ◽

Metal Insulator Metal

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Reentrant Metal-Insulator-Metal Transition in (DMe-DCNQI)2Cu System - Competition between Spin and Free Electron Degrees of Freedom-

Current Inorganic Chemistry ◽

10.2174/1877944104666140825202424 ◽

2014 ◽

Vol 4 (2) ◽

pp. 110-121 ◽

Cited By ~ 2

Author(s):

Yutaka Nishio ◽

Naoya Tajima ◽

Koji Kajita

Keyword(s):

Free Electron ◽

Degrees Of Freedom ◽

Metal Insulator ◽

Insulator Metal Transition ◽

Metal Insulator Metal

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Structural Integrity of Three-dimensional Metal-insulator-metal (3-D MIM) Capacitor Embedded in Fully-filled Cu Through-silicon Via (TSV)

IEEE Transactions on Components Packaging and Manufacturing Technology ◽

10.1109/tcpmt.2021.3067322 ◽

2021 ◽

pp. 1-1

Author(s):

Ye Lin ◽

Hong Yu Li ◽

Chuan Seng Tan

Keyword(s):

Structural Integrity ◽

Three Dimensional ◽

Metal Insulator ◽

Through Silicon Via ◽

Metal Insulator Metal

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Hyperspectral Molecular Orientation Mapping in Metamaterials

Applied Sciences ◽

10.3390/app11041544 ◽

2021 ◽

Vol 11 (4) ◽

pp. 1544

Author(s):

Meguya Ryu ◽

Yoshiaki Nishijima ◽

Shinya Morimoto ◽

Naoki To ◽

Tomoki Hashizume ◽

...

Keyword(s):

Molecular Orientation ◽

Field Enhancement ◽

Chemical Mapping ◽

Metal Insulator ◽

Orientation Mapping ◽

Metal Insulator Metal ◽

Finger Printing ◽

Thermal Emitter ◽

Ir Bands ◽

Sub Wavelength

The four polarisation method is adopted for measurement of molecular orientation in dielectric nanolayers of metal-insulator-metal (MIM) metamaterials composed of gold nanodisks on polyimide and gold films. Hyperspectral mapping at the chemical finger printing spectral range of 4–20 μμm was carried out for MIM patterns of 1–2.5 μμm period (sub-wavelength). Overlay images taken at 0,π4,π2,3π4 orientation angles and subsequent baseline compensation are shown to be critically important for the interpretation of chemical mapping results and reduction of spurious artefacts. Light field enhancement in the 60-nm-thick polyimide (I in MIM) was responsible for strong absorption at the characteristic polyimide bands. Strong absorbance A at narrow IR bands can be used as a thermal emitter (emittance E=1−R), where R is the reflectance and A=1−R−T, where for optically thick samples the transmittance is T=0.

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Nonstoichiometric Nanolayered Ni/NiO/Al2O3/CrAu Metal–Insulator–Metal Infrared Rectenna

ACS Applied Nano Materials ◽

10.1021/acsanm.0c03012 ◽

2021 ◽

Vol 4 (3) ◽

pp. 2470-2475 ◽

Cited By ~ 1

Author(s):

Ayendra Weerakkody ◽

Amina Belkadi ◽

Garret Moddel

Keyword(s):

Metal Insulator ◽

Metal Insulator Metal

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Design of a Liquid-Crystal-Tunable Terahertz Demultiplexer Based on a Metal-Insulator-Metal Waveguide

Applied Sciences ◽

10.3390/app9040644 ◽

2019 ◽

Vol 9 (4) ◽

pp. 644

Author(s):

Xue-Shi Li ◽

Naixing Feng ◽

Yuan-Mei Xu ◽

Liang-Lun Cheng ◽

Qing Liu

Keyword(s):

Liquid Crystal ◽

Electric Field ◽

Metal Insulator ◽

Resonance Modes ◽

External Bias ◽

Bias Electric Field ◽

Metal Waveguide ◽

Metal Insulator Metal ◽

Fabry Perot ◽

Mim Waveguide

A tunable demultiplexer with three output channels infiltrated by liquid crystal (LC) is presented, which is based on a metal-insulator-metal (MIM) waveguide. The operating frequencies of the three output channels can be tuned simultaneously at will by changing the external bias electric field applied to the LC. By analyzing the Fabry-Pérot (FP) resonance modes of the finite-length MIM waveguide both theoretically and numerically, the locations of the three channels are delicately determined to achieve the best demultiplexing effects. Terahertz (THz) signals input from the main channel can be demultiplexed by channels 1, 2 and 3 at 0.7135 THz, 1.068 THz and 1.429 THz, respectively. By applying an external electric field to alter the tilt angle of the infiltrating LC material, the operating frequencies of channels 1, 2 and 3 can be relatively shifted up to 12.3%, 9.6% and 9.7%, respectively. The designed demultiplexer can not only provide a flexible means to demultiplex signals but also tune operating bands of output channels at the same time.

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