DEPOSITION AND CHARACTERIZATION OF TiN-COATED STEELS AT VARIOUS N2 GAS FLOW RATES WITH CONSTANT ETCHING BY USING CAPVD TECHNIQUE

2007 ◽  
Vol 14 (01) ◽  
pp. 93-100 ◽  
Author(s):  
MUBARAK ALI ◽  
ESAH BINTI HAMZAH ◽  
MOHD RADZI HJ. MOHD TOFF
Keyword(s):  
Surface Roughness ◽  
Physical Vapor Deposition ◽  
Gas Flow ◽  
Hard Coatings ◽  
Force Microscopy ◽  
Atomic Force ◽  
Coated Tool ◽  
Excellent Adhesion ◽  
Cathodic Arc

Cathodic Arc Physical Vapor Deposition (CAPVD), a technique used for the deposition of hard coatings, for tooling applications, has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Constant etching, by increasing nitrogen gas flow rate up to 200 sccm, helped in reducing the MD size and number; at higher rates, of say 300 sccm, the behavior was reversed. Minimum value of surface roughness recorded at 200 sccm was measured via both surface roughness tester and atomic force microscopy (AFM). Micro-Vickers hardness of TiN -coated tool showed about 564% times increase in hardness than the uncoated one. Scratch tester was used to study the critical loads for the coating and the excellent adhesion achievable, of say 200 sccm, was demonstrated, with relevance to the various modes.

Afm Studies of Surface Roughness of Borophosphosilicate Glass (BPSG) Films and Their Impact on Defect Detection Capability for Sub Micron Vlsi Technology

1992 ◽  
Vol 280 ◽  
Author(s):  
H. Rojhantalab ◽  
M. Moinpour ◽  
N. Peter ◽  
M.L.A. Dass ◽  
W. Hough ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Defect Detection ◽  
Device Fabrication ◽  
Interlayer Dielectric ◽  
Force Microscopy ◽  
Si Substrates ◽  
Atomic Force ◽  
Vlsi Technology ◽  
Borophosphosilicate Glass

ABSTRACTChemically vapor deposited borophosphosilicate glass (BPSG) has been widely used in microelectronic device fabrication as interlayer dielectric film due to its excellent planarization, gettering and flow properties. With device geometry reducing to sub micron levels, there is an increasingly greater emphasis on detection and elimination of sub micron defects particularly on deposited film. In this paper, we report on the evaluation and characterization of the surface roughness of BPSG films of various thicknesses and film compositions deposited on Si substrates using the Atomic Force Microscopy (AFM). The effects of high temperature densification process on the surface roughness are presented. The defect detection capabilities of conventional laser-based particle counters with respect to the surface roughness of BPSG films are investigated.

Evolution of TiN Coating Surface Roughness during Physical Vapor Deposition on High Speed Steel Substrate

2014 ◽  
Vol 604 ◽  
pp. 67-70
Author(s):  
Leonid Kupchenko ◽  
Rauno Tali ◽  
Eron Adoberg ◽  
Valdek Mikli ◽  
Vitali Podgursky
Keyword(s):  
Surface Roughness ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
High Speed ◽  
Steel Substrate ◽  
High Speed Steel ◽  
Growth Exponent ◽  
Force Microscopy ◽  
Tin Coatings ◽  
Atomic Force

TiN coatings with different thickness were prepared by arc ion plating (AIP) physical vapor deposition (PVD) on high speed steel (HSS) substrates. TiN coatings surface roughness was investigated by atomic force microscopy (AFM) and 3D optical profilometry and growth kinetics was described using scaling exponents β and α. The growth exponent β is 0.91-1.0 and the roughness exponent α is 0.77-0.81. Due to relatively high value of the exponent α, the surface diffusion is likely predominant smoothening mechanism of TiN growth.

Physical Characterization of BST with Different (x’) Ratios

2014 ◽  
Vol 487 ◽  
pp. 106-109
Author(s):  
Nurhafizah Ramli ◽  
Zaliman Sauli ◽  
Vithyacharan Retnasamy ◽  
They Yee Chin ◽  
K. Anwar ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Roughness ◽  
Strontium Titanate ◽  
Barium Strontium Titanate ◽  
Sol Gel ◽  
Force Microscopy ◽  
Atomic Force ◽  
Fields Of Study ◽  
Barium Strontium

Nowdays Barium strontium titanate (BST) can be applied into many fields of engineering. Its properties attracted more researchers to research and apply it into many fields of study. In this work, sol-gel method of preparing barium strontium titanate (BST) has been used. This work was done with 4 different ratio of x with 4 different deposition layers. The main purpose of this work is to investigate the relation between the ratio of barium (Ba) with different deposition layer and the surface of the substrate. Atomic force microscopy (AFM) was used in whole work to investigate the crystalline structure and surface roughness of the BST thin films.

MACRODROPLET REDUCTION AND GROWTH MECHANISMS IN CATHODIC ARC PHYSICAL VAPOR DEPOSITION OF TiN FILMS

2008 ◽  
Vol 15 (05) ◽  
pp. 653-659 ◽  
Author(s):  
MUBARAK ALI ◽  
ESAH HAMZAH ◽  
TAHIR ABBAS ◽  
MOHD RADZI HJ. MOHD TOFF ◽  
ISHTIAQ A. QAZI
Keyword(s):  
Vapor Deposition ◽  
Metal Ion ◽  
Physical Vapor Deposition ◽  
High Speed ◽  
Gas Flow ◽  
High Speed Steel ◽  
Hard Coatings ◽  
Growth Mechanisms ◽  
Tin Coatings ◽  
Cathodic Arc

Cathodic arc physical vapor deposition (CAPVD) a technique used for the deposition of hard coatings for tooling applications has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition resulting in films with rougher morphology. The MDs contamination and growth mechanisms was investigated in TiN coatings over high-speed steel, as a function of metal ion etching, substrate bias, and nitrogen gas flow rate; it was observed that the latter is the most important factor in controlling the size and number of the macrodroplets.

Characterization of Healthy and Fluorotic Enamel by Atomic Force Microscopy

2010 ◽  
Vol 16 (5) ◽  
pp. 531-536 ◽  
Author(s):  
Verónica Zavala-Alonso ◽  
Gabriel A. Martínez-Castanon ◽  
Nuria Patiño-Marín ◽  
Humberto Terrones ◽  
Kenneth Anusavice ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Depth Profile ◽  
Positive Association ◽  
Clinical Findings ◽  
Mean Values ◽  
Force Microscopy ◽  
Atomic Force ◽  
The Mean

AbstractThe aim was to characterize the external structure, roughness, and absolute depth profile (ADP) of fluorotic enamel compared with healthy enamel. Eighty extracted human molars were classified into four groups [TFI: 0, control (C); 1–3, mild (MI); 4–5, moderate (MO); 6–9, severe fluorosis (S)] according to the Thylstrup-Fejerskov Index (TFI). All samples were analyzed by atomic force microscopy.The mean values of enamel surface roughness (ESR) in nm were: Group C, 92.6; Group MI, 188.8; Group MO, 246.9; and Group S, 532.2. The mean values of absolute depth profile in nm were: C, 1,065.7; MI, 2,360.7; MO, 2,536.7; and S, 6,146.2. The differences between mean ESR and mean ADP among groups were statistically significant (p < 0.05). This structural study confirms at the nanometer level that there is a positive association between fluorosis severity, ESR, and ADP, and there is an association with the clinical findings of fluorosis measured by TFI as well.

Surface Roughness Characterization of ZnO: TiO2-Organic Blended Solar Cells Layers by Atomic Force Microscopy and Fractal Analysis

2014 ◽  
Vol 13 (03) ◽  
pp. 1450020 ◽  
Author(s):  
Ştefan Ţălu ◽  
Sebastian Stach ◽  
Muhammad Ikram ◽  
Dinesh Pathak ◽  
Tomas Wagner ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Atomic Force Microscopy ◽  
Solar Cells ◽  
Fractal Analysis ◽  
Surface Characterization ◽  
Surface Characteristics ◽  
Statistical Parameters ◽  
Force Microscopy ◽  
Atomic Force

The objective of this work is to quantitatively characterize the 3D complexity of ZnO : TiO 2-organic blended solar cells layers by atomic force microscopy and fractal analysis. ZnO : TiO 2-organic blended solar cells layers were investigated by AFM in tapping-mode in air, on square areas of 25 μm2. A detailed methodology for ZnO : TiO 2-organic blended solar cells layers surface fractal characterization, which may be applied for AFM data, is presented. Detailed surface characterization of the surface topography was obtained using statistical parameters, according with ISO 25178-2: 2012. The fractal dimensions Df values (all with average ± standard deviation), obtained with morphological envelopes method, for: blend D1 ( P 3 HT : PCBM : ZnO : TiO 2 blend with ratio 1:0.35:0.175:0.175 mg in 1 ml of Chlorobenzene) is Df = 2.55 ± 0.01; and for blend D2 ( P 3 HT : PCBM : ZnO : TiO 2 blend with ratio 1:0.55:0.075:0.075 mg in 1 ml of Chlorobenzene) is Df = 2.45 ± 0.01. Denoting the ratios in 1 ml of Chlorobenzene with D1 and D2 articles. The 3D surface roughness of samples revealed a fractal structure at nanometer scale. Fractal and AFM analysis may assist manufacturers in developing ZnO : TiO 2-organic blended solar cells layers with better surface characteristics and provides different yet complementary information to that offered by traditional surface statistical parameters.

Surface Characterization of Carbon Fibers by Atomic Force Microscopy: Roughness Quantification by Power Spectral Density

2017 ◽  
Vol 742 ◽  
pp. 447-456
Author(s):  
Bastian Brück ◽  
Thomas Guglhoer ◽  
Simon Haug ◽  
Christina Kunzmann ◽  
Michael Schulz ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Spectral Density ◽  
Surface Topography ◽  
Power Spectral Density ◽  
Carbon Fibers ◽  
Force Microscopy ◽  
Atomic Force ◽  
Power Spectral ◽  
Local Background

The topography of a surface consists of structures of different length scales. The surface roughness caused by these structures plays a decisive role in interfacial properties. Atomic Force Microscopy (AFM) can be applied to measure the surface topography with great accuracy and thus facilitates roughness quantification. Here, however, the data reduction poses a challenge. In a conventional approach, surface roughness parameters are evaluated based on averaging height differences, which leads to values dominated by the largest height differences of the surface topography. To quantify contributions of smaller structures to the roughness, a previous study presented a tunable local background correction, which eliminates structures on a larger than selected scale. Therefore, this method only considers surface structures smaller than the chosen scale. A different approach to quantify surface roughness on all length scales covered by AFM measurements uses Fourier transformation of the surface topography to calculate the power spectral density, which describes the amplitudes of different contributing spatial frequencies.In the current study, a new approach based on power spectral density is used to quantify surface roughness parameters as a function of the length scale of contributions to the surface topography. This procedure allows a comprehensive characterization of surface roughness and an intuitive comparison of different surfaces.The usefulness of this method and its compatibility to local background correction is demonstrated by analyzing several commercially available carbon fibers with and without different fiber surface treatments.

Investigation of ZrN Hard Coatings Obtained by Cathodic Arc Evaporation

2010 ◽  
Vol 159 ◽  
pp. 113-116 ◽  
Author(s):  
Roumen Kakanakov ◽  
H. Bahchedjiev ◽  
Lilyana Kolaklieva ◽  
T. Cholakova ◽  
Svetla Evtimova ◽  
...  
Keyword(s):  
Hard Coatings ◽  
Crystallographic Structure ◽  
Titanium Nitrides ◽  
X Ray Diffraction ◽  
Force Microscopy ◽  
Atomic Force ◽  
Cathodic Arc Evaporation ◽  
Steel Substrates ◽  
Arc Evaporation ◽  
Cathodic Arc

Zirconium nitrides (ZrN) coatings have shown better quality in comparison to titanium nitrides (TiN) ones regarding the application in the mechanical processing of aluminum and titanium alloys. This work presents the results from investigation on properties of ZrN-based coatings intended for industrial application. The ZrN and ZrTiN hard coatings in a thickness of (3 5) m were obtained on stainless steel substrates by cathodic arc evaporation method. The coating hardness in the range of 25-32 GPa was evaluated using the Vickers measurement technique. The coating properties were studied in relation to the surface morphology by Atomic force microscopy (AFM) and Scanning electron microscopy (SEM). The analyses showed that the number and size of the macroparticles decrease when N2 pressure increases in the deposition chamber. X-ray diffraction analysis (XRD) was performed to identify the crystallographic structure, preferred orientation and stress of the ZrN coatings.

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