High Etch Rate Modes in Microwave Plasma Etching of Silicon in High Magnetic Fields
1990 ◽
Vol 29
(Part 1, No. 11)
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pp. 2641-2643
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2013 ◽
Vol 740-742
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pp. 825-828
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Keyword(s):
Keyword(s):
Keyword(s):
2017 ◽
Vol 35
(4)
◽
pp. 042003
2012 ◽
Vol 717-720
◽
pp. 893-896
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Keyword(s):
1985 ◽
Vol 3
(4)
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pp. 1025
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