Laser-Beam-Scanning Chemical Vapor Deposition Technique for Controlling the Spatial Thickness Distribution of Thin Films
1991 ◽
Vol 30
(Part 1, No. 8)
◽
pp. 1740-1741
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2006 ◽
Vol 6
(11)
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pp. 3479-3482
2010 ◽
Vol 81
(11)
◽
pp. 113903
◽
1997 ◽
Vol 36
(Part 1, No. 8)
◽
pp. 5187-5191
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2016 ◽
Vol 4
(16)
◽
pp. 3403-3414
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2001 ◽
Vol 40
(Part 1, No. 6A)
◽
pp. 4051-4055
◽