Submicron Ferroelectric Capacitors Fabricated by Chemical Mechanical Polishing Process for High-Density Ferroelectric Memories
2000 ◽
Vol 39
(Part 1, No. 4B)
◽
pp. 2083-2086
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2002 ◽
Vol 41
(Part 1, No. 8)
◽
pp. 5120-5124
◽
2002 ◽
Vol 41
(Part 1, No. 8)
◽
pp. 5098-5103
◽
2007 ◽
Vol 38
(7-8)
◽
pp. 674-682
◽
2018 ◽
Vol 548
◽
pp. 232-238
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2004 ◽
Vol 28
(5)
◽
pp. 617-623
2008 ◽
Vol 254
(15)
◽
pp. 4856-4863
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2007 ◽
pp. 263-266